Download or read book Refractory Metals and Silicides for Very Large Scale Integration Applications written by Krishna C. Saraswat and published by . This book was released on 1985 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt: Continuous advancements in technology have resulted in integrated circuits with smaller device dimensions, and larger area and complexity. The overall circuit performance has depended primarily on the device properties. However, the parasitic resistance and capacitance associated with interconnections and contacts, as for an MOS transistor, are now beginning to influence the circuit performance and will be the primary factors in the evolution of submicron VLSI technology. Examples of contact resistance shallow junction series resistance and rc time delay of interconnections, respectively are shown. Results of theoretical modeling indicate that below 1 micron minimum feature size the impact of these parsitics will seriously hurt the circuit and system performance. The RC time delay, the IR voltage drop, the power consumption and the crosstalk noise due to these parastics will become appreciable. Thus even with very fast devices, the overall performance of a large circuit could be seriously affected by the limitations of interconnections and contacts. It is evident that refractory metals and silicides are playing increasingly important roles. It must be also be pointed out that these materials will not replace aluminum but compliment it. The materials which have been used or proposed for forming interconnections can be broadly classified into four categories: heavily doped polysilicon, low temperature metals, high temperature refractory metals and metal silicides. Table compares properties of some of these materials showing their compatibility with present silicon fabrication technology.

Download or read book Silicides for VLSI Applications written by Shyam P. Murarka and published by Academic Press. This book was released on 2012-12-02 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Download or read book A Characterization of Refractory Metals and Refractory Metal Silicides for VLSI Circuit Applications written by Phu Hiep Luong and published by . This book was released on 1984 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Very Large Scale Integration written by Kim Ho Yeap and published by BoD – Books on Demand. This book was released on 2018-02-28 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, a variety of topics related to Very-Large-Scale Integration (VLSI) is extensively discussed. The topics encompass the physics of VLSI transistors, the process of integrated chip design and fabrication and the applications of VLSI devices. It is intended to provide information on the latest advancement of VLSI technology to researchers, physicists as well as engineers working in the field of semiconductor manufacturing and VLSI design.

Download or read book Incorporation of Metal Silicides and Refractory Metals in VLSI Technology written by C. M. Osburn and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Tungsten and Other Refractory Metals for VLSI Applications written by and published by . This book was released on 1984 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book VLSI Science and Technology 1984 written by Kenneth E. Bean and published by . This book was released on 1984 with total page 554 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Refractory Metals and Silicides for VLSI IV written by Workshop on Refractory Metals and Silicides for VLSI (4, 1986, San Juan Bautista, Calif.) and published by . This book was released on 1986 with total page 1415 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Workshop on Refractory Metals and Silicides for VLSI 3 written by and published by . This book was released on 1985 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book VLSI Science and Technology 1982 written by Conrad J. Dell'Oca and published by . This book was released on 1982 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Workshop on Refractory Metals and Silicides for VLSI written by and published by . This book was released on 1984 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Refractory Metals and Silicides for VLSI III written by Michael D. Strathman and published by . This book was released on 1985 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Energy Research Abstracts written by and published by . This book was released on 1986 with total page 760 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Tungsten and Other Refractory Metals for VLSI Applications written by R. S. Blewer and published by . This book was released on 1986 with total page 594 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Workshop on Refractory Metals and Silicides for VLSI 4 written by and published by . This book was released on 1986 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Workshop on Refractory Metals and Silicides for VLSI 6 written by and published by . This book was released on 1988 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Refractory Metals and Silicides for VLSI 3 written by University of California, Berkeley. Continuing Education in Engineering, University Extension and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: