Download or read book Range Concepts and Heavy Ion Ranges written by Jens Lindhard and published by . This book was released on 1963 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Physics of Micro Nano Fabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Download or read book The Range in Metals and Metal Oxide Systems of Heavy Ions in the Energy Range 60 to 400 Kev written by Bruce D. Sartwell and published by . This book was released on 1970 with total page 26 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Calculation of Stopping Power and Range energy Values for Any Heavy Ion in Nongaseous Media written by Palmer G. Steward and published by . This book was released on 1966 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Stopping of Heavy Ions written by Peter Sigmund and published by Springer Science & Business Media. This book was released on 2004-07-09 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a concise presentation of theoretical concepts characterizing and quantifying the slowing down of swift heavy ions in matter. Although the penetration of charged particles through matter has been studied for almost a hundred years, the quantitative theory for swift penetrating ions heavier than helium has been developed mainly during the past decade and is still progressing rapidly. The book addresses scientists and engineers working at accelerators with an interest in materials analysis and modification, medical diagnostics and therapy, mass spectrometry and radiation damage, as well as atomic and nuclear physicists. Although not a textbook, this monograph represents a unique source of state-of-the-art information that is useful to a university teacher in any course involving the interaction of charged particles with matter.
Download or read book NASA Technical Paper written by and published by . This book was released on 1989 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ion Implantation and Synthesis of Materials written by Michael Nastasi and published by Springer Science & Business Media. This book was released on 2007-05-16 with total page 271 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.
Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2000-08-09 with total page 1186 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."
Download or read book Ion Beams in Materials Processing and Analysis written by Bernd Schmidt and published by Springer Science & Business Media. This book was released on 2012-12-13 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.
Download or read book Particle Penetration and Radiation Effects Volume 2 written by Peter Sigmund and published by Springer. This book was released on 2014-05-29 with total page 617 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book represents volume 2 of a 3-volume monograph on Particle Penetration and Radiation Effects. While volume 1 addressed the basic theory of scattering and stopping of swift point charges, i.e., protons, antiprotons and alpha particles, the present volume focuses on ions heavier than helium as well as molecules and clusters over an energy range from a few keV/u to a few hundred MeV/u. The book addresses the foundations in atomic-collision physics of a wide variety of application areas within materials and surface science and engineering, micro and nano science and technology, radiation medicine and biology as well as nuclear and particle physics. Problems have been added to all chapters. This should make the book useful for both self-study and advanced university courses. An effort has been made to establish a unified notation throughout the monograph.
Download or read book III V Integrated Circuit Fabrication Technology written by Shiban Tiku and published by CRC Press. This book was released on 2016-04-27 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing
Download or read book Planar Processing Primer written by G. Anner and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 637 pages. Available in PDF, EPUB and Kindle. Book excerpt: Planar Processing Primer is based on lecture notes for a silicon planar process ing lecture/lab course offered at the University of Illinois-UC for over fifteen years. Directed primarily to electrical engineering upperclassmen and graduate students, the material also has been used successfully by graduate students in physics and ceramic and metallurgical engineering. It is suitable for self-study by engineers trained in other disciplines who are beginning work in the semiconductor fields, and it can make circuit design engineers aware of the processing limitations under which they must work. The text describes and explains, at an introductory level, the principal processing steps used to convert raw silicon into a semiconductor device or integrated circuit. First-order models are used for theoretical treatments (e.g., of diffusion and ion implantation), with reference made to more advanced treatments, to computer programs such as SUPREM that include higher order effects, and to interactions among sequential processes. In Chapters 8, 9, and to, the application of silicon processes to compound semiconductors is discussed briefly. Over the past several years, the size of transistors has decreased markedly, allowing more transistors per chip unit area, and chip size has increased.
Download or read book Silicon written by Paul Siffert and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: With topics ranging from epitaxy through lattice defects and doping to quantum computation, this book provides a personalized survey of the development and use of silicon, the basis for the revolutionary changes in our lives sometimes called "The Silicon Age." Beginning with the very first developments more than 50 years ago, this reports on all aspects of silicon and silicon technology up to its use in exciting new technologies, including a glance at possible future developments.
Download or read book Nuclear and Radiochemistry written by Jens-Volker Kratz and published by John Wiley & Sons. This book was released on 2013-08-15 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: The third edition of this classic in the field is completely updated and revised with approximately 30% new content so as to include the latest developments. The handbook and ready reference comprehensively covers nuclear and radiochemistry in a well-structured and readily accessible manner, dealing with the theory and fundamentals in the first half, followed by chapters devoted to such specific topics as nuclear energy and reactors, radiotracers, and radionuclides in the life sciences. The result is a valuable resource for both newcomers as well as established scientists in the field.
Download or read book Nuclear and Radiochemistry 2 Volume Set written by Jens-Volker Kratz and published by John Wiley & Sons. This book was released on 2013-12-04 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: The third edition of this classic in the field is completely updated and revised with approximately 30% new content so as to include the latest developments. The handbook and ready reference comprehensively covers nuclear and radiochemistry in a well-structured and readily accessible manner, dealing with the theory and fundamentals in the first half, followed by chapters devoted to such specific topics as nuclear energy and reactors, radiotracers, and radionuclides in the life sciences. The result is a valuable resource for both newcomers as well as established scientists in the field.
Download or read book Low Energy Ion Irradiation of Materials written by Bernd Rauschenbach and published by Springer Nature. This book was released on 2022-08-19 with total page 763 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive introduction to all aspects of low-energy ion–solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion–solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
Download or read book Nanofabrication by Ion Beam Sputtering written by Tapobrata Som and published by CRC Press. This book was released on 2012-11-27 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attractive. This book reviews various fascinating results, understand the underlying physics of ion induced pattern formation, to highlight the potential applications of the patterned surfaces, and to explore the patterning behavior by different irradiation parameters in order to create desired surface morphologies on specific materials.
