Download or read book Quantitative Defect Spectroscopy on Operating AlGaN GaN High Electron Mobility Transistors written by Andrew C Malonis and published by . This book was released on 2009 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: Despite numerous advances in the growth, fabrication, and characterization of AlGaN/GaN HEMT devices, there remain a number of unknowns related to the impact of deep levels on HEMT performance. Of specific interest to ongoing development of HEMT technology is the development of techniques which can not only detect the specific energy levels of deep levels in operating devices, but can also relate the presence of these defects to changes in specific device parameters. By examining more established techniques and developing new on-device characterization methods, the impact of defects on AlGaN/GaN HEMTs was quantitatively studied.

Download or read book The Role of Defects on Schottky and Ohmic Contact Characteristics for GaN and AlGaN GaN High electron Mobility Transistors written by Dennis Eugene Walker and published by . This book was released on 2006 with total page 217 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: The AlGaN/GaN material system is ideally suited for UV detectors, light sources, and high performance, high power transistors. Through an understanding of the physics and device properties associated with defects, engineered solutions can allow the utilization of the full potential of AlGaN/GaN device properties. Auger Electron Spectroscopy (AES) and secondary electron threshold (SET) techniques allow the characterization of band bending and work function at semiconductor surfaces. Using these techniques with ultra-high vacuum (UHV) sample cleaving and metal deposition, Schottky barrier formation to non-polar GaN was investigated revealing cases of both ideal band-bending and Fermi level pinning. Cathodoluminescence spectroscopy (CL) allows the investigation of luminescent defect levels with depth-resolving capability by controlling the incident beam voltage and associated electron beam penetration into the sample. High electron mobility transistors (HEMTs) exhibiting current collapse were investigated using CL and CL mapping and specific defects were found in the GaN channel and buffer regions that may help explain the current collapse phenomena. Coupling a novel gate mask into a typical HEMT fabrication sequence and utilizing three, independent UHV sample cleaning techniques including thermal desorption of contaminants, Ga-reflux, and N2 ion sputtering, and metallization of the gates on AlGaN/GaN HEMTs, correlations in defect levels, surface cleaning technique, and finished device performance were found. In analyzing the CL data for this sample, however, a specific feature located just below the GaN near band edge was observed to accumulate near the Ohmic contacts prompting a further investigation of both the effects of the RIE etch used in producing the UHV-compatible mask as well as four different Ohmic contact structures on both defect levels determined by CL and on final device performance. Finally, a bulk GaN sample was processed with Ohmic contacts to determine the correlation of the AlGaN device layer in the formation of this defect level associated with the Ohmic contacts and the role of the mesa RIE etch on the same defect. Through these investigations, progress in the underlying physics of Schottky barrier formation on GaN and the important role of defects on device performance using AES, SET, and CL have been demonstrated.

Download or read book Analysis and Optimization of AlGaN GaN High Electron Mobility Transistors for Microwave Applications written by Michael Hosch and published by Cuvillier Verlag. This book was released on 2011-08-08 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis deals with the analysis and optimization of some of the most prominent non-ideal effects in AlGaN/GaN high electron mobility transistors used in microwave applications as well as the optimization of the RF gain. The effect of current collapse, the root cause of leakage currents as well as field-dependent self-heating effects have been investigated by eletrical characterization using well established techniques and have been analyzed using 2-dimensional physical device simulations. It will be shown that the origin of all effects is strongly related to the device surface and some are even competing effects making device optimization a challenge. However, a detailed localization of the regions affecting device performance will be given leading to a better understanding for fabrication process optimization. Finally, I simulation study is conducted giving suggestions for RF gain improvement based on very simple device layout variations.

Download or read book Investigation of Electrically active Defects in AIGaN GaN High Electron Mobility Transistors by Spatially resolved Spectroscopic Scanned Probe Techniques written by Drew Cardwell and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The nm-scale trap spectroscopy techniques were used to spatially resolve particular traps in AlGaN/GaN HEMTs grown by metal-organic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE). Typically, deeper traps were observed in the AlGaN barrier layer, within several hundred nanometers of the gate edge in the drain access region, in both MOCVD and MBE-grown HEMTs. Measurements on MOCVD-grown HEMTs with Fe-doped GaN buffer layers indicated that an Ec - 0.57 eV trap is located in the GaN buffer layer and is correlated with the presence of Fe in the GaN buffer.

Download or read book Dynamic Performance Simulation of AlGaN GaN High Electron Mobility Transistors written by Shrijit Mukherjee and published by . This book was released on 2019-05-31 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: GaN based devices have reached a point in terms of processing maturity where the favorable wide-band gap related properties can be implemented in several commercial and military applications. However, long term reliability continues to affect large scale integration of such devices, specifically the potential of AlGaN/GaN High Electron Mobility Transistors (HEMTs), due to the indefinite nature of defects in the structure and mechanisms of performance degradation relevant to such defects. Recent efforts have begun to concentrate more on the bulk properties of the GaN buffer on which the heterostructure is grown, and how defects distributed in the buffer can affect the performance under various operating schemes. This dissertation discusses numerical simulator based investigation of the numerous possibilities by which such point defects can affect electrical behavior. For HEMTs designed for satellite communication systems, proton irradiation results indicate changes in the device parasitics resulting in degradation of RF parameters. Assumption of such radiation damage introducing fast traps indicate severe degradation far exceeding experimental observation. For power switching applications, the necessity of accurately capturing as-grown defects was realized when modeling current relaxation during bias switching. Ability to introduce multiple trap levels in the material bulk aided in achieving simulation results replicating experimental results more accurately than published previously. Impact of factors associated with such traps, either associated with discrete energy levels or band-like distribution in energy, on the nature of current relaxation characterized by its derivative has been presented. Dissertation Discovery Company and University of Florida are dedicated to making scholarly works more discoverable and accessible throughout the world. This dissertation, "Dynamic Performance Simulation of AlGaN/GaN High Electron Mobility Transistors" by Shrijit Mukherjee, was obtained from University of Florida and is being sold with permission from the author. A digital copy of this work may also be found in the university's institutional repository, IR@UF. The content of this dissertation has not been altered in any way. We have altered the formatting in order to facilitate the ease of printing and reading of the dissertation.

Download or read book Investigation of Electrically Active Defects in GaN AlGaN and AlGaN GaN High Electron Mobility Transistors written by Aaron R. Arehart and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: To further refine the capabilities to quantitativelymeasure defect energies and concentrations in the access regions of HEMTs, an atomic forcemicroscope is adapted to perform nanometer-scale defect characterization. Using scanning Kelvin probe microscopy, evidence of the spatial and time-dependent measurement capabilities is demonstrated. Initial HEMT results are presented and suggest the total trap concentration of ~1012 cm−2 consistent with previous results.

Download or read book Low Frequency Noise Characterization of AlGaN GaN High Electron Mobility Transistors written by Ningjiao Zhang and published by . This book was released on 2013 with total page 46 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: Low frequency noise performance is an important aspect of semiconductor transistors evaluation. It is also a macroscopical method of defect spectroscopy. Characterization of low frequency noise performance at different bias conditions can help to locate defects of the devices together with other materials and device characterization techniques.

Download or read book Qualitative and Quantative Characterization of Trapping Effects in AlGaN GaN High Electron Mobility Transistors written by Hyeong Nam Kim and published by . This book was released on 2009 with total page 195 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on temperature-dependent drain current transients, it was demonstrated that PGA modifies trap activity in AlGaN/GaN HEMTs. The PGA process removes shallow traps with an activation energy of ~ 38 meV and tE of ~ 0.5 us at 295 K and induces deeper traps at least with an activation energy of ~ 0.31 eV and tE of ~ 21.6 us at 295 K. Shallow traps result in fast drain current transient and high reverse gate leakage current while deep traps lead to slow current recovery but a small leakage current.

Download or read book Fabrication and Characterization of AlGaN GaN High Electron Mobility Transistors written by Peter Javorka and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book written by and published by . This book was released on 1970 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book AlGaN GaN HEMTs Reliability Degradation Modes and Analysis written by Ponky Ivo and published by Cuvillier. This book was released on 2012-10-25 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: AlGaN/GaN HEMTs reliability and stability issues were investigated in dependence on epitaxial design and process modification. DC-Step-Stress-Tests have been performed on wafers as a fast device robustness screening method. As a criterion of robustness they deliver a critical source-drain voltage for the onset of degradation. Several degradation modes were observed which depend on epi design, epi quality and process technology. Electrical and optical characterizations together with electric field simulations were performed to get insight into respective degradation modes. It has been found that AlGaN/GaN HEMT devices with GaN cap show higher critical source-drain voltages as compared to non-capped devices. Devices with low Al concentration in the AlGaN barrier layer also show higher critical source-drain voltages. Superior stability and robustness performance have been achieved from devices with AlGaN backbarrier epi design grown on n-type SiC substrate. For the onset on any degradation modes the presence of high electrical fields is most decisive for ON- and OFF-state operation conditions. Therefore careful epi design to reduce high electric field is mandatory. It is also shown that epi buffer quality and growth process have a great impact on device robustness. Defects such as point defects and dislocations are assumed to be created initially during stressing and accumulated to larger defect clusters during device stressing. Electroluminescence (EL) measurements were performed to detect early degradation. Extended localized defects are resulting as bright spots at OFF-state conditions in conjunction with a gate leakage increase.

Download or read book Physical Degradation and Preparation for In situ Microscopy of AlGaN GaN based HEMTs written by Andrew Charles Lang and published by . This book was released on 2013 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most promising class of materials poised to take over the future of microwave power transistors are wide band gap semiconductors among which GaN is most exciting. A high electron mobility transistor (HEMT) made of an AlGaN/GaN heterostructure can take advantage of a sheet charge layer known as a two-dimensional electron gas (2DEG) to achieve superior properties compared to other materials such as Si, SiC and GaAs. Unfortunately AlGaN/GaN HEMTs are plagued by unknown reliability and there is no clear mechanism which describes how these devices degrade. Degradation of AlGaN/GaN HEMTs is a result of multiple mechanisms, and from a materials perspective it is most advantageous to study the physical degradation and microstructural changes of these electronic devices. During high voltage and high frequency operation AlGaN/GaN HEMTs experience irreversible degradation in their electronic properties, and this degradation has been attributed to physical degradation of the device1-7. By performing high resolution transmission electron microscope (HRTEM) imaging and taking advantage of the phase information within a bright field TEM image by performing Geometric Phase Analysis, a higher resolution and greater quantitative understanding of the degradation of AlGaN/GaN HEMTs can be achieved. Establishing the ability to reproducibly perform HRTEM and quantitative analysis on AlGaN/GaN HEMTs of varying amount of bias is only the first step on the road toward to the ultimate goal of performing in-situ TEM on these devices. Much of the ground work for in-situ studies has been laid out and key issues for moving forward are discussed.

Download or read book The Effects of Thermal Strain and Neutron Irradiation on Defect Formation in AlGaN GaN High Electron Mobility Transistors and GaN Schottky Diodes written by Chung-Han Lin and published by . This book was released on 2013 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Our DRCLS, SPS, time-resolved SPS (t-SPS), current-voltage-temperature (I-V-T) shows that fast and thermal neutron preferentially affect device properties. Fast neutron will induce defects in GaN by recoil and displacement damage whereas thermal neutron tends to enhance the interaction between metal/semiconductor interfaces due to heat. Time-resolved surface photovoltage spectroscopy (t-SPS) results reveal a defect evolution of GaN under fast neutron irradiation that indicates low fast neutron dosage will enhance GaN properties a result which is confirmed by DRCLS results. XPS results show that Ti and Ni are more resistant than other metal but will interact with GaN at higher thermal neutron fluence. Our results show that fast and thermal neutrons are both detrimental electronic devices without proper protection.

Download or read book Impact of Electrochemical Process on the Degradation Mechanisms of AlGaN GaN HEMTs written by Feng Gao (Ph. D.) and published by . This book was released on 2014 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt: AlGaN/GaN high electron mobility transistors (HEMTs) constitute a new generation of transistors with excellent electrical characteristics and great potential to replace silicon technology in the future, especially in high power and high frequency applications. However, the poor long term reliability of these devices is an important bottleneck for their wide market insertion and limits their advanced development. This thesis tackles this problem by focusing on understanding the physics behind various degradation modes and providing new quantitative models to explain these mechanisms. The first part of the thesis, Chapters 2 and 3, reports studies of the origin of permanent structural and electrical degradation in AlGaN/GaN HEMTs. Hydroxyl groups (OH-) from the environment and/or adsorbed water on the III-N surface are found to play an important role in the formation of surface pits during the OFF-state electrical stress. The mechanism of this water-related structural degradation is explained by an electrochemical cell formed at the gate edge where gate metal, the II-N surface and the passivation layer meet. Moreover, the permanent decrease of the drain current is directly linked with the formation of the surface pits, while the permanent increase of the gate current is found to be uncorrelated with the structural degradation. The second part of the thesis, Chapters 4 and 5, identifies water-related redox couples in ambient air as important sources of dynamic on-resistance and drain current collapse in AlGaN/GaN HEMTs. Through in-situ X-ray photoelectron spectroscopy (XPS), direct signature of the water-related species is found at the AlGaN surface at room temperature. It is also found that these species, as well as the current collapse, can be thermally removed above 200 °C in vacuum conditions. An electron trapping mechanism based on H2O/H2 and H2O/O2 redox couples is proposed to explain the 0.5 eV energy level commonly attributed to surface trapping states. Moreover, the role of silicon nitride passivation in successfully removing current collapse in these devices is explained by blocking the water molecules away from the AlGaN surface. Finally, fluorocarbon, a highly hydrophobic material, is proven to be an excellent passivation to overcome transient degradation mechanisms in AlGaN/GaN HEMTs.

Download or read book GaN Based HEMTs for High Voltage Operation Design Technology and Characterization written by Eldad Bahat-Treidel and published by Cuvillier Verlag. This book was released on 2012-06-08 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: Gallium nitride (GaN)-based High Electron Mobility Transistors (HEMTs) for high voltage, high power switching and regulating for space applications are studied in this work. Efficient power switching is associated with operation in high OFF-state blocking voltage while keeping the ON-state resistance, the dynamic dispersion and leakage currents as low as possible. The potential of such devices to operate at high voltages is limited by a chain of factors such as subthreshold leakages and the device geometry. Blocking voltage enhancement is a complicated problem that requires parallel methods for solution; epitaxial layers design, device structural and geometry design, and suitable semiconductor manufacturing technique. In this work physical-based device simulation as an engineering tool was developed. An overview on GaN-based HEMTs physical based device simulation using Silvaco-“ATLAS” is given. The simulation is utilized to analyze, give insight to the modes of operation of the device and for design and evaluation of innovative concepts. Physical-based models that describe the properties of the semiconductor material are introduced. A detailed description of the specific AlGaN/GaN HEMT structure definition and geometries are given along with the complex fine meshing requirements. Nitride-semiconductor specific material properties and their physical models are reviewed focusing on the energetic band structure, epitaxial strain tensor calculation in wurtzite materials and build-in polarization models. Special attention for thermal conductivity, carriers’ mobility and Schottky-gate-reverse-bias-tunneling is paid. Empirical parameters matching and adjustment of models parameters to match the experimental device measured results are discussed. An enhancement of breakdown voltage in AlxGa1-xN/GaN HEMT devices by increasing the electron confinement in the transistor channel using a low Al content AlyGa1-yN back-barrier layer structure is systematically studied. It is shown that the reduced sub-threshold drain-leakage current through the buffer layer postpones the punch-through and therefore shifts the breakdown of the device to higher voltages. It is also shown that the punch-through voltage (VPT) scales up with the device dimensions (gate to drain separation). An optimized electron confinement results both, in a scaling of breakdown voltage with device geometry and a significantly reduced sub-threshold drain and gate leakage currents. These beneficial properties are pronounced even further if gate recess technology is applied for device fabrication. For the systematic study a large variations of back-barrier epitaxial structures were grown on sapphire, n-type 4H-SiC and semi-insulating 4H-SiC substrates. The devices with 5 μm gate-drain separation grown on n-SiC owning Al0.05Ga0.95N and Al0.10Ga0.90N back-barrier exhibit 304 V and 0.43 m × cm2 and 342 V and 0.41 m × cm2 respectively. To investigate the impact of AlyGa1-yN back-barrier on the device properties the devices were characterized in DC along with microwave mode and robustness DC-step-stress test. Physical-based device simulations give insight in the respective electronic mechanisms and to the punch-through process that leads to device breakdown. Systematic study of GaN-based HEMT devices with insulating carbon-doped GaN back-barrier for high voltage operation is also presented. Suppression of the OFF-state sub-threshold drain leakage-currents enables breakdown voltage enhancement over 1000 V with low ON-state resistance. The devices with 5 μm gate-drain separation on SI-SiC and 7 μm gate-drain separation on n-SiC exhibit 938 V and 0.39 m × cm2 and 942 V and 0.39 m × cm2 respectively. Power device figure of merit of ~2.3 × 109 V2/-cm2 was calculated for these devices. The impacts of variations of carbon doping concentration, GaN channel thickness and substrates are evaluated. Trade-off considerations in ON-state resistance and of current collapse are addressed. A novel GaN-based HEMTs with innovative planar Multiple-Grating-Field-Plates (MGFPs) for high voltage operation are described. A synergy effect with additional electron channel confinement by using a heterojunction AlGaN back-barrier is demonstrated. Suppression of the OFF-state sub-threshold gate and drain leakage-currents enables breakdown voltage enhancement over 700 V and low ON-state resistance of 0.68 m × cm2. Such devices have a minor trade-off in ON-state resistance, lag factor, maximum oscillation frequency and cut-off frequency. Systematic study of the MGFP design and the effect of Al composition in the back-barrier are described. Physics-based device simulation results give insight into electric field distribution and charge carrier concentration depending on field-plate design. The GaN superior material breakdown strength properties are not always a guarantee for high voltage devices. In addition to superior epitaxial growth design and optimization for high voltage operation the device geometrical layout design and the device manufacturing process design and parameters optimization are important criteria for breakdown voltage enhancement. Smart layout prevent immature breakdown due to lateral proximity of highly biased interconnects. Optimization of inter device isolation designed for high voltage prevents substantial subthreshold leakage. An example for high voltage test device layout design and an example for critical inter-device insulation manufacturing process optimization are presented. While major efforts are being made to improve the forward blocking performance, devices with reverse blocking capability are also desired in a number of applications. A novel GaN-based HEMT with reverse blocking capability for Class-S switch-mode amplifiers is introduced. The high voltage protection is achieved by introducing an integrated recessed Schottky contact as a drain electrode. Results from our Schottky-drain HEMT demonstrate an excellent reverse blocking with minor trade-off in the ON-state resistance for the complete device. The excellent quality of the forward diode characteristics indicates high robustness of the recess process. The reverse blocking capability of the diode is better than –110 V. Physical-based device simulations give insight in the respective electronic mechanisms. Zusammenfassung In dieser Arbeit wurden Galliumnitrid (GaN)-basierte Hochspannungs-HEMTs (High Electron Mobility Transistor) für Hochleistungsschalt- und Regelanwendungen in der Raumfahrt untersucht. Effizientes Leistungsschalten erfordert einen Betrieb bei hohen Sperrspannungen gepaart mit niedrigem Einschaltwiderstand, geringer dynamischer Dispersion und minimalen Leckströmen. Dabei wird das aus dem Halbleitermaterial herrührende Potential für extrem spannungsfeste Transistoren aufgrund mehrerer Faktoren aus dem lateralen und dem vertikalen Bauelementedesign oft nicht erreicht. Physikalisch-basierte Simulationswerkzeuge für die Bauelemente wurden daher entwickelt. Die damit durchgeführte Analyse der unterschiedlichen Transistorbetriebszustände ermöglichte das Entwickeln innovativer Bauelementdesignkonzepte. Das Erhöhen der Bauelementsperrspannung erfordert parallele und ineinandergreifende Lösungsansätze für die Epitaxieschichten, das strukturelle und das geometrische Design und für die Prozessierungstechnologie. Neuartige Bauelementstrukturen mit einer rückseitigen Kanalbarriere (back-barrier) aus AlGaN oder Kohlenstoff-dotierem GaN in Kombination mit neuartigen geometrischen Strukturen wie den Mehrfachgitterfeldplatten (MGFP, Multiple-Grating-Field-Plate) wurden untersucht. Die elektrische Gleichspannungscharakterisierung zeigte dabei eine signifikante Verringerung der Leckströme im gesperrten Zustand. Dies resultierte bei nach wie vor sehr kleinem Einschaltwiderstand in einer Durchbruchspannungserhöhung um das etwa Zehnfache auf über 1000 V. Vorzeitige Spannungsüberschläge aufgrund von Feldstärkenspitzen an Verbindungsmetallisierungen werden durch ein geschickt gestaltetes Bauelementlayout verhindert. Eine Optimierung der Halbleiterisolierung zwischen den aktiven Strukturen führte auch im kV-Bereich zu vernachlässigbaren Leckströme. Während das Hauptaugenmerk der Arbeit auf der Erhöhung der Spannungsfestigkeit im Vorwärtsbetrieb des Transistors lag, ist für einige Anwendung auch ein rückwärtiges Sperren erwünscht. Für Schaltverstärker im S-Klassenbetrieb wurde ein neuartiger GaN-HEMT entwickelt, dessen rückwärtiges Sperrverhalten durch einen tiefgelegten Schottkykontakt als Drainelektrode hervorgerufen wird. Eine derartige Struktur ergab eine rückwärtige Spannungsfestigkeit von über 110 V.

Download or read book Photoionisation Spectroscopy of Traps in AlGaN GaN High Electron Mobility Transistors Grown by Molecular Beam Epitaxy written by and published by . This book was released on 2003 with total page 3 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photoionization spectroscopy has been carried out in bias-stressed AlGaN=GaN high electron mobility transistors (HEMTs) grown by Molecular Beam Epitaxy (MBE) to probe the nature of the deep trapping centers responsible for stress-induced current collapse in these devices. The results indicate that a GaN buffer layer trap previously associated with current collapse in devices grown by Metal Organic Chemical Vapor Deposition (MOCVD) is responsible for induced collapse in MBE-grown structures.

Download or read book Surface and Mechanical Stress Effects in AlGaN GaN High Electron Mobility Transistors written by Sameer Jayanta Joglekar and published by . This book was released on 2017 with total page 161 pages. Available in PDF, EPUB and Kindle. Book excerpt: Gallium Nitride (GaN) belongs to a class of materials called wide band-gap semiconductors. In recent years, the versatile nature of this material has been exploited for a wide range of applications from solid state lighting to RF and microwave communication, as well as high power switching. The first part of this thesis discusses planar AlGaN/GaN transistors. GaN is a piezoelectric material, and changes in mechanical stress result in a change in the charge density which in turn affects the maximum current in AlGaN/GaN transistors. Finite element modelling techniques were applied to quantify the mechanical stress distribution in planar AlGaN/GaN RF transistors resulting from device fabrication, and operation in the on- and off-state. Thereafter, two important surface and interface effects were studied in this thesis. In the first one, the impact of surface cleanings, surface treatments and plasma-based dry etch conditions on two different types of ohmic contact technologies was investigated. Contact resistance measurements were correlated with surface characterization results. The second was that of interface positive charges at the Al2O3-GaN interface and the increase in electron density in the device resulting from them. In both these problems, a combination of device electrical measurements and material characterization techniques was used to establish direct correlations between device behavior and material properties. The second part of the thesis deals exclusively with nano-ribbon (NR) or fin-like AlGaN/GaN transistors. Fundamental transport properties of charge density and mobility in NR devices were studied in order to understand the difference in behavior of these devices from planar devices. The influence of passivation films on the charge density in these structures was investigated, using Al2O3 passivation as a specific example. Electron mobility degradation due to sidewall-scattering in NR devices was quantified using different mobility extraction methods based on device measurements. The thesis concludes with a potential application of NR AlGaN/GaN transistors for high linearity power amplification. A new kind of transistor with varying threshold voltages along the gate width is proposed to improve the DC and RF linearity of GaN-based devices.