Download or read book Processing of Thin Film Bulk Acoustic Resonators written by Masaaki Imura and published by . This book was released on 2001 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.

Download or read book Dual Mode Thin Film Bulk Acoustic Resonators FBARs Based on AlN ZnO and GaN Films with Tilted C Axis Orientation written by and published by . This book was released on 2010 with total page 91 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film bulk acoustic wave resonators (FBAR) using piezoelectric AlN, ZnO and GaN thin films have attracted extensive research activities in the past years. Highly c-axis oriented (normal-plane orientation) binary semiconductor piezoelectric thin films are particularly investigated for resonators operating at the fundamental thickness longitudinal mode. Depending on the processing conditions, tilted polarization (c-axis off the normal direction to the substrate surface) is often found in the as-deposited piezoelectric thin films, which leads to the coexistence of thickness longitudinal mode and shear mode for the thin film resonators.

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Springer and published by . This book was released on 2012-08-29 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Design Fabrication and Characterization of Beam Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators written by Lori Ann Callaghan and published by . This book was released on 2005 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-mechanical filters comprised of bulk acoustic resonators are being fabricated and studied as a solution to the demands for low power consumption, high functionality devices in the telecommunication industry. A novel, suspended thin Film Bulk Acoustic wave Resonator (SFBAR) has been fabricated using an aluminum nitride film sputtered directly on a 100 silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator. The SFBAR has been fabricated by combining both thin film processing and bulk silicon micro machining. The AlN was etched in an Inductively Coupled Plasma (ICP) chlorine etch, using titanium dioxide as the masking material. A silicon Deep Reactive Ion Etch (DRIE) was used to create an open ended air cavity with a novel circular shape. A representative resonator, designated here as sample W9HS8 resonator 10018, was characterized with a Quality Factor values at resonance and anti-resonance of 68 and 151,

Download or read book Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator Project Supported by the National Natural Science Foundation of China Nos 61274119 61306141 61335008 and the Natural Science Foundation of Jiangsu Province No BK20131099 written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by . This book was released on 2013 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Thin film Bulk Acoustic Resonators for Biomolecular Interaction Analysis written by Martin Nirschl and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book High Frequency Thin film Bulk Acoustic Wave Resonators for Gas and Bio analytical Applications written by G. M. Ashley and published by . This book was released on 2005 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book RF Bulk Acoustic Wave Filters for Communications written by Ken-ya Hashimoto and published by Artech House. This book was released on 2009 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: This timely book presents a thorough overview of RF BAW filters, covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films. Moreover, the book discusses the integration of BAW filters in RF systems.

Download or read book Fabrication Development and Analysis of Film Bulk Acoustic Resonators on Flexible Polymer Substrates written by Ghazal Hakemi and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: It is the focus of this project to explore the possibility of achieving Radio Fre?quency (RF) micro-devices on flexible polymer substrates. To this end standard MEMS fabrication methods have been tailored to allow the integration of func?tional materials and device patterning for production of RF MEMS devices with flexible organic substrates. Material quality, device yield, performance and re-liability are critical aspects of our study. The project encompasses the use of a direct integration method for the creation of Film Bulk Acoustic Resonators (FBARs) on Liquid Crystal Polymer (LCP) substrates. An FBAR is a passive component used for resonance and filtering purposes. Its production on organic substrates would lead to a number of ad-vantages including: overall cost savings, size reduction and ability of the device to be directly integrated on the printed circuit board (PCB) front-end with the other essential components (i.e. antenna) without the use of wiring and inter-connections. New fabrication process flows have been developed to allow the creation of FBAR microwave devices on LCP. First of all pre-processing of the polymer substrate is carried out to make it rigid and smooth. Substrate smoothness and stiffness are necessary in order to obtain functioning devices and for the substrate to comply to the standard fabrication methods. Rigidity is achieved through a backing method whereby silicon or glass are attached to LCP with an intermediate adhesive layer. The best way to achieve smoothness was found to be Chemical Mechanical Polishing (CMP). Standard fabrication techniques were then employed to deposit the metal and piezoelectric material and pattern them. Both bulk and surface micromachining were used and, in some cases, tailored to suit the new substrates (LCP) tolerance limits (such as temperature and flexibility). Zinc Oxide (ZnO) piezoelectric is the preferred functional material and it is chosen due to its relatively low deposition temperature re?quirements (below 300C) and its high frequency characteristics. The creation of a front-to-back processed FBAR on LCP is successfully carried out at relatively low temperatures since the Zinc oxide (ZnO) functional mate?rial is proven to yield good crystallinity at a deposition temperature of 100C and also because micromachining temperatures do not generally exceed 115C. The final device is characterized through RF measurements, compared with sim?ulations and standard FBARs and the polymer/ceramic integration reliability for device creation is briefly addressed. In conclusion FBARs are successfully created on LCP with only minor compli?cations related to LCP surface roughness and RIE etch of the polymer. The project lays promising prospects for RF MEMS devices on compliant organic substrates.

Download or read book Thin film Bulk Acoustic Resonators on Integrated Circuits for Physical Sensing Applications written by Matthew Leigh Johnston and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of 0.8-1.5 GHz FBAR devices is validated for both off-chip and on-chip devices, and the integrated system is characterized for sensitivity and limit of detection. On-chip, parallel measurement of multiple sensors in real time is demonstrated for a quantitative vapor sensing application, and the limit of detection is below 50 ppm. This sensor platform could be used for a broad scope of label-free detection applications in chemistry, biology, and medicine, and it demonstrates potential for enabling a low-cost, point of use instrument.

Download or read book High Coupling Materials for Thin Film Bulk Acoustic Wave Resonators written by Janine Conde and published by . This book was released on 2009 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Download or read book Investigation of Spurious Waves in Thin film Bulk Acoustic Wave Resonators written by Wenxia Yang and published by . This book was released on 2013 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: