Download or read book Proceedings of the Workshop on Silicides and Metals for VLSI Applications V written by Workshop on Silicides and Metals for VLSI Applications (5, 1987, San Juan Bautista, Calif.) and published by . This book was released on 1987 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Silicides and Metals for VLSI Applications V 11 14 May 1987 San Juan Bautista California written by Michael D. Strathman and published by . This book was released on 1987 with total page 1759 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Silicides and Metals for VLSI Applications V written by Michael D. Strathman and published by . This book was released on 1987 with total page 1759 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Refractory Metal Silicides for VLSI II 14 17 May 1984 St Francis Retreat Center San Juan Bautista California written by Michael D. Strathman and published by . This book was released on 1984 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Metals Dielectrics and Interfaces for VLSI VI 9 12 May 1988 St Francis Retreat Center San Juan Bautista California written by and published by . This book was released on 1988 with total page 1795 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Metals Dielectrics and Interfaces for VLSI written by Workshop on Metals, Dielectrics, and Interfaces for VLSI. 6, 1988, San Juan Bautista, Calif.. and published by . This book was released on 1988 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1988 with total page 1532 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Workshop on Silicides and Metals for VLSI Applications written by Michael D. Strathman and published by . This book was released on 1987 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Silicides for VLSI Applications written by Shyam P. Murarka and published by Academic Press. This book was released on 2012-12-02 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Download or read book Tungsten and Other Refractory Metals for VLSI Applications IV written by Robert S. Blewer and published by . This book was released on 1989 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Index of Conference Proceedings Received written by British Library. Document Supply Centre and published by . This book was released on 1987 with total page 792 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book VLSI Metallization written by Krishna Shenai and published by Artech House Publishers. This book was released on 1991 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive collection of reprinted articles presents the most important developments on VLSI contact and interconnect technologies and applications. The book covers important developments in metallization of compound semiconductor technologies, and includes a section on metallization reliability and high speed testing.

Download or read book Silicides for VLSI Applications written by S. P. Murarka and published by . This book was released on 1983 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Polycrystalline Silicon Metal Silicides and CVD Metals for Integrated circuit Applications written by and published by . This book was released on 1987 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book VLSI Metallization written by Norman G. Einspruch and published by Academic Press. This book was released on 2014-12-01 with total page 491 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Electronics Microstructure Science, Volume 15: VLSI Metallization discusses the various issues and problems related to VLSI metallization. It details the available solutions and presents emerging trends. This volume is comprised of 10 chapters. The two introductory chapters, Chapter 1 and 2 serve as general references for the electrical and metallurgical properties of thin conducting films. Subsequent chapters review the various aspects of VLSI metallization. The order of presentation has been chosen to follow the common processing sequence. In Chapter 3, some relevant metal deposition techniques are discussed. Chapter 4 presents the methods of VLSI lithography and etching. Conducting films are first deposited at the gate definition step; therefore, the issues related to gate metallization are discussed next in Chapter 5.In Chapter 6, contact metallization is elaborated, and Chapter 7 is devoted to multilevel metallization schemes. Long-time reliability is the subject of Chapter 8, which discusses the issues of contact and interconnect electromigration. GaAs metallization is tackled in Chapter 9. The volume concludes with a general discussion of the functions of interconnect systems in VLSI. Materials scientists, processing and design engineers, and device physicists will find the book very useful.

Download or read book Ohmic Contacts to Semiconductors written by Electrochemical Society and published by . This book was released on 1969 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Metallization written by S. P. Murarka and published by Butterworth-Heinemann. This book was released on 1993 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title covers fundemental concepts, properties and applicabilities of metals and alloys for use in various metallization schemes. Metallizations form the key components on electronic circuits - controlling device properties and providing power and device interconnections with the outside world or with other devices. The recent advent of submicron dimensions and increasingly faster devices in the semiconductor have challenged researchers to keep metallization schemes in line with new demanding requirements.