Download or read book Plasma Electronics Second Edition written by Toshiaki Makabe and published by CRC Press. This book was released on 2014-08-27 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,
Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.
Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma. They discuss charged particle transport in general and in detail as well as macroscopic plasma characteristics and elementary processes in gas phase and on surfaces. After laying this groundwork, the book examines state-of-the-art computational methods for modeling plasma and reviews various important applications including inductively and capacitively coupled plasma, magnetically enhanced plasma, and various processing techniques, while numerous problems and worked examples reinforce the concepts. Uniquely combining physics, numerical methods, and practical applications, Plasma Electronics: Applications in Microelectronic Device Fabrication equips you with the knowledge necessary to scale up lab bench breakthroughs into industrial innovations.
Download or read book Plasma Physics and Engineering written by Alexander Fridman and published by CRC Press. This book was released on 2004-04-15 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma engineering is a rapidly expanding area of science and technology with increasing numbers of engineers using plasma processes over a wide range of applications. An essential tool for understanding this dynamic field, Plasma Physics and Engineering provides a clear, fundamental introduction to virtually all aspects of modern plasma science and technology, including plasma chemistry and engineering, combustion, chemical physics, lasers, electronics, methods of material treatment, fuel conversion, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions.
Download or read book Plasma Physics written by B. Samuel Tanenbaum and published by . This book was released on 1967 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This text on plasma physics is written for students at the senior or first-year graduate level ... It is intended to serve both as an introduction to the theory of plasmas for students planning to do further work in the subject and as a survey for students with out research interests who want to have some knowledge of plasmas"--Preface.
Download or read book Plasma Antennas Second Edition written by Theodore Anderson and published by Artech House. This book was released on 2020-11-30 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This updated edition of an Artech House classic contains steering, focusing, and spreading of antenna beams using the physics of refraction of electromagnetic waves through a plasma. Pulsing circuitry for ionizing plasma antennas with low power requirements are covered. New and improved smart plasma antenna and applications to wi-fi and the applications of plasma antennas are discussed. Experimental work on plasma antenna noise and new progress on ruggedization and custom-made plasma tubes are also presented. This unique resource provides readers with a solid understanding of the efficient design and prototype development of plasma antennas to meet the challenge of reducing the power required to ionize the gas at various plasma densities. Thorough coverage of the technical underpinnings of plasma antennas, as well as important discussions on current markets and applications are discussed. Additionally, the book presents experimental work in this cutting-edge area and reveals the latest developments in the field.
Download or read book Plasma Confinement written by R. D. Hazeltine and published by Courier Corporation. This book was released on 2013-02-20 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: Graduate-level text examines the essential physics underlying international research in magnetic confinement fusion with accounts of fundamental concepts behind methods of confining plasma at or near thermonuclear conditions. 1992 edition.
Download or read book The Fourth State of Matter written by Yaffa Eliezer and published by Institute of Physics Publishing (GB). This book was released on 1989 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for the general science reader, this study explains the nature and properties of the fourth state of matter, known as plasma, the conditions under which it can form and some of the uses to which it might be put.
Download or read book Plasma Waves written by Donald Gary Swanson and published by Taylor & Francis. This book was released on 2020-07-14 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: Extended and revised, Plasma Waves, 2nd Edition provides essential information on basic formulas and categorizes the various possible types of waves and their interactions. The book includes modern and complete treatments of electron cyclotron emission, collisions, relativistic effects, Landau damping, quasilinear and nonlinear wave theory, and tunneling equations. The broad scope encompasses waves in cold, warm, and hot plasmas and relativistic plasma waves. Special chapters deal with the effects of boundaries, inhomogeneities, and nonlinear effects. The author derives all formulae and describes several fundamental wave experiments, allowing for a greater appreciation of the subject.
Download or read book Introduction to Plasma Physics written by Donald A. Gurnett and published by Cambridge University Press. This book was released on 2017-02-20 with total page 535 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introducing the principles and applications of plasma physics, this new edition is ideal as an advanced undergraduate or graduate-level text.
Download or read book Introduction to Plasma Physics written by R.J Goldston and published by CRC Press. This book was released on 2020-07-14 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Plasma Physics is the standard text for an introductory lecture course on plasma physics. The text’s six sections lead readers systematically and comprehensively through the fundamentals of modern plasma physics. Sections on single-particle motion, plasmas as fluids, and collisional processes in plasmas lay the groundwork for a thorough understanding of the subject. The authors take care to place the material in its historical context for a rich understanding of the ideas presented. They also emphasize the importance of medical imaging in radiotherapy, providing a logical link to more advanced works in the area. The text includes problems, tables, and illustrations as well as a thorough index and a complete list of references.
Download or read book Fundamentals of Gaseous Ionization and Plasma Electronics written by Essam Nasser and published by John Wiley & Sons. This book was released on 1971 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Engineering written by Michael Keidar and published by Academic Press. This book was released on 2018-08-06 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Engineering, Second Edition, applies the unique properties of plasmas (ionized gases) to improve processes and performance over many fields, such as materials processing, spacecraft propulsion and nanofabrication. The book considers this rapidly expanding discipline from a unified standpoint, addressing fundamentals of physics and modeling, as well as new and real-word applications in aerospace, nanotechnology and bioengineering. This updated edition covers the fundamentals of plasma physics at a level suitable for students using application examples and contains the widest variety of applications of any text on the market, spanning the areas of aerospace engineering, nanotechnology and nanobioengineering. This is highly useful for courses on plasma engineering or plasma physics in departments of Aerospace Engineering, Electrical Engineering and Physics. It is also useful as an introduction to plasma engineering and its applications for early career researchers and practicing engineers. Features new material relevant to application, including emerging areas of plasma nanotechnology and medicine Contains a new chapter on plasma-based control, as well as a description of RF and microwave-based plasma applications, plasma lighting, reforming and other most recent application areas Provides a technical treatment of the fundamental and engineering principles used in plasma applications
Download or read book Plasma Scattering of Electromagnetic Radiation written by John Sheffield and published by Academic Press. This book was released on 2010-11-25 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work presents one of the most powerful methods of plasma diagnosis in exquisite detail, to guide researchers in the theory and measurement techniques of light scattering in plasmas. Light scattering in plasmas is essential in the research and development of fusion energy, environmental solutions, and electronics. Referred to as the "Bible" by researchers, the work encompasses fusion and industrial applications essential in plasma research. It is the only comprehensive resource specific to the plasma scattering technique. It provides a wide-range of experimental examples and discussion of their principles with worked examples to assist researchers in applying the theory. Computing techniques for solving basic equations helps researchers compare data to the actual experiment New material on advances on the experimental side, such as the application of high density plasmas of inertial fusion Worked out examples of the scattering technique for easier comprehension of theory
Download or read book Plasma Physics and Fusion Energy written by Jeffrey P. Freidberg and published by Cambridge University Press. This book was released on 2008-07-10 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been an increase in interest worldwide in fusion research over the last decade and a half due to the recognition that a large number of new, environmentally attractive, sustainable energy sources will be needed to meet ever increasing demand for electrical energy. Based on a series of course notes from graduate courses in plasma physics and fusion energy at MIT, the text begins with an overview of world energy needs, current methods of energy generation, and the potential role that fusion may play in the future. It covers energy issues such as the production of fusion power, power balance, the design of a simple fusion reactor and the basic plasma physics issues faced by the developers of fusion power. This book is suitable for graduate students and researchers working in applied physics and nuclear engineering. A large number of problems accumulated over two decades of teaching are included to aid understanding.
Download or read book Plasma Chemistry written by Alexander Fridman and published by Cambridge University Press. This book was released on 2008-05-05 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing a fundamental introduction to all aspects of modern plasma chemistry, this book describes mechanisms and kinetics of chemical processes in plasma, plasma statistics, thermodynamics, fluid mechanics and electrodynamics, as well as all major electric discharges applied in plasma chemistry. Fridman considers most of the major applications of plasma chemistry, from electronics to thermal coatings, from treatment of polymers to fuel conversion and hydrogen production and from plasma metallurgy to plasma medicine. It is helpful to engineers, scientists and students interested in plasma physics, plasma chemistry, plasma engineering and combustion, as well as chemical physics, lasers, energy systems and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics and numerical formulas for practical calculations related to specific plasma-chemical processes and applications. Problems and concept questions are provided, helpful in courses related to plasma, lasers, combustion, chemical kinetics, statistics and thermodynamics, and high-temperature and high-energy fluid mechanics.
