Download or read book Physical Design and Mask Synthesis for Directed Self Assembly Lithography written by Seongbo Shim and published by Springer. This book was released on 2018-03-21 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Download or read book Design for Manufacturing with Directed Self assembly Lithography written by Jiaojiao Ou and published by . This book was released on 2018 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ultra-scaled very-large-scale integration (VLSI), lithography has become the bottleneck in integrated circuit (IC) fabrication. Since the conventional 193nm immersion lithography has reached the resolution limit, multiple patterning (MP) is adopted in order to meet the pitch requirement of ultra-scaled design. However, the manufacturing cost also increases dramatically with the growth of number of masks at the same time. Therefore, industries are looking for alternative lithography techniques to extend the 193nm immersion lithography to the sub-7nm nodes. With the continuous delaying of Extreme Ultraviolet (EUV), Directed Self-Assembly (DSA) lithography has emerged as one of the promising alternative lithography techniques due to its low cost, high throughput, and its ability to multiply the pitch of lines and vias. DSA has been intensively explored by both industry and academia in recent years. Memory and the dense via layer in logic might be the first application of DSA lithography in the mainstream IC production. DSA can also be applied on fabrication of cut masks to reduce the overall wire extensions. However, there are still many challenges, such as defectivity, line edge roughness and placement accuracy, which prevent DSA from the high-volume manufacturing. Integrating this technology into the fab flow and designing circuit around it also remain to be problematic. Considering the limitations and constraints of the topologies of DSA, this dissertation investigates and proposes novel algorithms for the DSA-aware design problem in the areas of design for manufacturability and physical design. First, a DSA based cut mask optimization for unidirectional design is proposed. Efficient algorithm is developed to assign DSA guiding template to metal line ends to minimize wire extensions and conflicts. Second, as redundant via insertion has been widely used in the post-routing stage to improve the yield, but the insertion of more vias introduces challenges for DSA patterning. This dissertation proposes a novel approach to perform the DSA aware redundant via insertion to improve the redundant via insertion rate and DSA compatibility. Since both via grouping and DSA guiding template decomposition are the essential problems for DSA aware design, which should be solved concurrently, this dissertation also proposes an efficient algorithm to solve this problem. Considering multiple patterning has already been used in DSA lithography, a coherent work, including single block-copolymer (BCP) and double block-copolymer guiding template assignment, is proposed for DSA and multiple pattering hybrid lithography. In addition, it is also noticed that optimization in the post-routing stage is not enough to eliminate DSA patterning violations, thus this dissertation also proposes the DSA compliant detailed routing algorithm with concurrent double pattering and guiding templates assignment.
Download or read book Mask Synthesis Techniques for Directed Self assembly written by Joydeep Mitra and published by . This book was released on 2019 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Directed Self assembly of Block Co polymers for Nano manufacturing written by Roel Gronheid and published by Woodhead Publishing. This book was released on 2015-07-17 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields
Download or read book Combination of Nanoimprint Lithography with Block Copolymer Directed Self Assembly written by Laetitia Esther West and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Updates in Advanced Lithography written by Sumio Hosaka and published by BoD – Books on Demand. This book was released on 2013-07-03 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.
Download or read book From Small Molecules to Macromolecules written by Zachary Ryan McCarty and published by . This book was released on 2018 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: The incorporation of electronic device technology into our everyday lives has become an unavoidable reality in today’s connected world. Getting to this point has taken countless ingenious measures by scientists and engineers dedicated to increasing the speed and efficiency of the microelectronic devices that power many of the tools we rely on every day. For more than 50 years, the microelectronics industry has successfully manufactured generations of devices by shrinking the transistors on their chips. This shrinkage was made possible by improvements in photolithography. However, the physical limits to the resolution of lithography has now been reached leading leaving the microelectronic industry to employ costly and inefficient double patterning processes, which are expensive and unsustainable to extend the resolution of photolithography in high-volume manufacturing. Many question whether the ever cheaper and faster demand can continue. This dilemma has inspired the exploration at alternative patterning processes, one of which is the directed self-assembly (DSA) of block-copolymers (BCPs). Through careful and judicious design, the self-assembly of BCPs allows access to sub-5 nm features which are inaccessible by all current photolithographic technologies. While there has been extensive work done on the DSA of BCPs to produce aligned, lamellae in thin films, there is still a need for improvement in this field. Forming BCP films with a thickness on the order of their domain size and transferring the patterns formed by self-assembled BCPs into useful substances by reactive ion etching (RIE) is one area that requires more thorough investigation. Several strategies have been devised to impart some degree of etch-selectivity to one of the domains of a BCPs. One such strategy, which will be the focus of the work presented in this dissertation is the selective formation of a metal-oxide etch mask in one of the polymer domains of a BCPs. The development of a suitable BCP candidate will be presented as well as the results of several studies on vapor-phase infiltration processes. The challenges and discoveries made will be presented throughout this work.
Download or read book Points Lines and Walls written by Maurice Kléman and published by John Wiley & Sons. This book was released on 1983 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advances in Nanostructured Materials and Nanopatterning Technologies written by Vincenzo Guarino and published by Elsevier. This book was released on 2020-02-11 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Nanostructured Materials and Nanopatterning Technologies: Applications for Healthcare, Environment and Energy demonstrates how to apply micro- and nanofabrication and bioextrusion based systems for cell printing, electrophoretic deposition, antimicrobial applications, and nanoparticles technologies for use in a range of green industry sectors, with an emphasis on emerging applications. Details strategies to design and realize smart nanostructured/patterned substrates for healthcare and energy and environmental applications Enables the preparation, characterization and fundamental understanding of nanostructured materials for promising applications in health, environmental and energy related sectors Provides a broader view of the context around existing projects and techniques, including discussions on potential new routes for fabrication
Download or read book Beyond the Molecular Frontier written by National Research Council and published by National Academies Press. This book was released on 2003-03-19 with total page 238 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemistry and chemical engineering have changed significantly in the last decade. They have broadened their scopeâ€"into biology, nanotechnology, materials science, computation, and advanced methods of process systems engineering and controlâ€"so much that the programs in most chemistry and chemical engineering departments now barely resemble the classical notion of chemistry. Beyond the Molecular Frontier brings together research, discovery, and invention across the entire spectrum of the chemical sciencesâ€"from fundamental, molecular-level chemistry to large-scale chemical processing technology. This reflects the way the field has evolved, the synergy at universities between research and education in chemistry and chemical engineering, and the way chemists and chemical engineers work together in industry. The astonishing developments in science and engineering during the 20th century have made it possible to dream of new goals that might previously have been considered unthinkable. This book identifies the key opportunities and challenges for the chemical sciences, from basic research to societal needs and from terrorism defense to environmental protection, and it looks at the ways in which chemists and chemical engineers can work together to contribute to an improved future.
Download or read book VLSI Physical Design From Graph Partitioning to Timing Closure written by Andrew B. Kahng and published by Springer Nature. This book was released on 2022-06-14 with total page 329 pages. Available in PDF, EPUB and Kindle. Book excerpt: The complexity of modern chip design requires extensive use of specialized software throughout the process. To achieve the best results, a user of this software needs a high-level understanding of the underlying mathematical models and algorithms. In addition, a developer of such software must have a keen understanding of relevant computer science aspects, including algorithmic performance bottlenecks and how various algorithms operate and interact. This book introduces and compares the fundamental algorithms that are used during the IC physical design phase, wherein a geometric chip layout is produced starting from an abstract circuit design. This updated second edition includes recent advancements in the state-of-the-art of physical design, and builds upon foundational coverage of essential and fundamental techniques. Numerous examples and tasks with solutions increase the clarity of presentation and facilitate deeper understanding. A comprehensive set of slides is available on the Internet for each chapter, simplifying use of the book in instructional settings. “This improved, second edition of the book will continue to serve the EDA and design community well. It is a foundational text and reference for the next generation of professionals who will be called on to continue the advancement of our chip design tools and design the most advanced micro-electronics.” Dr. Leon Stok, Vice President, Electronic Design Automation, IBM Systems Group “This is the book I wish I had when I taught EDA in the past, and the one I’m using from now on.” Dr. Louis K. Scheffer, Howard Hughes Medical Institute “I would happily use this book when teaching Physical Design. I know of no other work that’s as comprehensive and up-to-date, with algorithmic focus and clear pseudocode for the key algorithms. The book is beautifully designed!” Prof. John P. Hayes, University of Michigan “The entire field of electronic design automation owes the authors a great debt for providing a single coherent source on physical design that is clear and tutorial in nature, while providing details on key state-of-the-art topics such as timing closure.” Prof. Kurt Keutzer, University of California, Berkeley “An excellent balance of the basics and more advanced concepts, presented by top experts in the field.” Prof. Sachin Sapatnekar, University of Minnesota
Download or read book Geometric Algorithms and Combinatorial Optimization written by Martin Grötschel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Historically, there is a close connection between geometry and optImization. This is illustrated by methods like the gradient method and the simplex method, which are associated with clear geometric pictures. In combinatorial optimization, however, many of the strongest and most frequently used algorithms are based on the discrete structure of the problems: the greedy algorithm, shortest path and alternating path methods, branch-and-bound, etc. In the last several years geometric methods, in particular polyhedral combinatorics, have played a more and more profound role in combinatorial optimization as well. Our book discusses two recent geometric algorithms that have turned out to have particularly interesting consequences in combinatorial optimization, at least from a theoretical point of view. These algorithms are able to utilize the rich body of results in polyhedral combinatorics. The first of these algorithms is the ellipsoid method, developed for nonlinear programming by N. Z. Shor, D. B. Yudin, and A. S. NemirovskiI. It was a great surprise when L. G. Khachiyan showed that this method can be adapted to solve linear programs in polynomial time, thus solving an important open theoretical problem. While the ellipsoid method has not proved to be competitive with the simplex method in practice, it does have some features which make it particularly suited for the purposes of combinatorial optimization. The second algorithm we discuss finds its roots in the classical "geometry of numbers", developed by Minkowski. This method has had traditionally deep applications in number theory, in particular in diophantine approximation.
Download or read book Bioinspired Materials Science and Engineering written by Guang Yang and published by John Wiley & Sons. This book was released on 2018-07-04 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: An authoritative introduction to the science and engineering of bioinspired materials Bioinspired Materials Science and Engineering offers a comprehensive view of the science and engineering of bioinspired materials and includes a discussion of biofabrication approaches and applications of bioinspired materials as they are fed back to nature in the guise of biomaterials. The authors also review some biological compounds and shows how they can be useful in the engineering of bioinspired materials. With contributions from noted experts in the field, this comprehensive resource considers biofabrication, biomacromolecules, and biomaterials. The authors illustrate the bioinspiration process from materials design and conception to application of bioinspired materials. In addition, the text presents the multidisciplinary aspect of the concept, and contains a typical example of how knowledge is acquired from nature, and how in turn this information contributes to biological sciences, with an accent on biomedical applications. This important resource: Offers an introduction to the science and engineering principles for the development of bioinspired materials Includes a summary of recent developments on biotemplated formation of inorganic materials using natural templates Illustrates the fabrication of 3D-tumor invasion models and their potential application in drug assessments Explores electroactive hydrogels based on natural polymers Contains information on turning mechanical properties of protein hydrogels for biomedical applications Written for chemists, biologists, physicists, and engineers, Bioinspired Materials Science and Engineering contains an indispensible resource for an understanding of bioinspired materials science and engineering.
Download or read book Nanofabrication written by Zheng Cui and published by Springer Science & Business Media. This book was released on 2009-01-01 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.
Download or read book Nanolithography written by M. Gentili and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt: Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
Download or read book Janus Particle Synthesis Self Assembly and Applications written by Shan Jiang and published by Royal Society of Chemistry. This book was released on 2012-11-30 with total page 313 pages. Available in PDF, EPUB and Kindle. Book excerpt: Named after the two-faced roman god, Janus particles have gained much attention due to their potential in a variety of applications, including drug delivery. This is the first book devoted to Janus particles and covers their methods of synthesis, how these particles self-assemble, and their possible uses. By following the line of synthesis, self-assembly and applications, the book not only covers the fundamental and applied aspects, but it goes beyond a simple summary and offers a logistic way of selecting the proper synthetic route for Janus particles for certain applications. Written by pioneering experts in the field, the book introduces the Janus concept to those new to the topic and highlights the most recent research progress on the topic for those active in the field and catalyze new ideas.
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
