Download or read book Phase resolved Measurements of Ion Dynamics in Radio Frequency Plasma Sheaths by Laser induced Fluorescence written by Brett William Jacobs and published by . This book was released on 2010 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ion Dynamics in a Single and Dual Radio Frequency Sheath Measured by Laser Induced Fluorescence written by Nathaniel Breckenridge Moore and published by . This book was released on 2015 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion dynamics are investigated in a single and dual radio frequency sheath as a function of radius above a 30 cm diameter biased silicon wafer for the first time in an industrial inductively coupled (440 kHz, 500 W) plasma etch tool. Ion velocity distribution (IVD) function measurements in the argon plasma are taken using laser induced fluorescence (LIF). Planar sheets of laser light enter the chamber both parallel and perpendicular to the surface of the wafer in order to measure both parallel and perpendicular IVDs at thousands of spatial positions. A fast (30 ns exposure) CCD camera measures the resulting fluorescence with a spatial resolution of 0.4 mm. The dual-frequency bias on the wafer is comprised of a 2 MHz low frequency (LF) bias and a 19 MHz high frequency (HF) bias. The laser is phase locked to the LF bias and IVD measurements are taken at several different LF phases. Ion energy distribution (IED) function measurements and calculated moments are compared for several cases. For the LF case (no HF), the IEDs were found to be highly phase dependent and were varied radially up to 10%. Calculated mean velocity vectors showed large impact angles near the surface of the wafer with the largest angles observed near the wafer edge. The LF experimental results are compared with simulations designed specifically for this particular plasma tool and showed good qualitative agreement. For the dual frequency case, IEDs were measured at two disparate phases of the phase-locked LF bias. IEDs were found to be multi-peaked and were well-approximated by a sum of Maxwellian distributions. The calculated fluxes in the dual frequency case were found to be substantially more radially uniform than the single frequency bias case. For industrial applications, this radially uniform ion flux is evidently a trade off with the undesirable multi-peaked structure in the IEDs.
Download or read book Temporally Spatially and Spectrally Resolved Studies of Pulsed Capacitively Coupled Plasmas written by John Poulose and published by . This book was released on 2016 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing provides an important tool for the semiconductor manufacturing industry. In particular, it is used extensively for surface processing of integrated circuits. Compared to continuous wave operation, pulsed operation of the radio frequency power allows for increased control over several plasma parameters. As power is reapplied either a re-ignition or re-energization event will occur. Re-energization of a plasma will gradually increase the power delivery to an existing discharge. In contrast, plasma re-ignition will induce abrupt impedance changes due to the plasma sheath and bulk formation. The plasma transition due to re-ignition also induces nonlinear changes to the measured voltage and current frequencies; these are typically thought to be fixed. These transitions are of particular interest in the application of frequency tuning of matching networks to maximize power transfer in pulsed plasma. In pulsed conditions where the plasma sheath re-formation occurs, a center frequency pull is present corresponding to fast changes in the complex impedance. This frequency pull is also observed in temporally and spatially resolved optical emission intensity of pulsed plasma. This combination of data from the electrical characteristics and optical emission allows us to develop a better understanding of the transients during the beginning and end of the powered component of the pulse. By combining phase resolved optical emission spectrometry with the radio frequency power delivery, we are able show the difference in the plasma sheath width early in the pulse. In the electronegative discharges we and that the sheath width is small early in the pulse but it expands rapidly as it approaches steady state. The rapid expansion in 1 kHz CF4/O2/Ar plasma results in a wave like phenomenon, with negative ions bouncing between the growing sheaths.
Download or read book Journal of Research of the National Institute of Standards and Technology written by and published by . This book was released on 1995 with total page 842 pages. Available in PDF, EPUB and Kindle. Book excerpt: Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Gaseous Electronics Conference Radio Frequency Reference Cell written by James K. Olthoff and published by DIANE Publishing. This book was released on 1996 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.
Download or read book Laser Induced Fluorescence Thermometry of a Weakly Ionized Radio Frequency Plasma written by and published by . This book was released on 1999 with total page 11 pages. Available in PDF, EPUB and Kindle. Book excerpt: Results are reported of two-line laser-induced fluorescence thermometry measurements in a weakly ionized, radiofrequency plasma. The work was performed in support of hypervelocity studies in the AEDC SI Impact Range. Rotational temperatures of nitric oxide were determined to be in the range 1000-2000 K, based on excitation of two lines in the NO A-X (0,0) band. A data analysis procedure is described for separating the weak, laser-induced fluorescence signals from natural emission from the plasma. By comparing temperatures from a strong and a weak beam, it is demonstrated that optical saturation is avoided. A strong correlation is found between the PLIF-derived NO temperatures and the intensity of natural emission from the plasma. This correlation is used to estimate the temperature distribution in the plasma outside the region that was accessible to interrogation by the laser sheets.
Download or read book Observation of Enhanced Electric Field in an RF plugged Sheet Plasma in the RFC XX M Open ended Machine written by T. Oda and published by . This book was released on 1987 with total page 22 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Bell Laboratories Talks and Papers written by Bell Telephone Laboratories, inc. Libraries and Information Systems Center and published by . This book was released on 1984 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1990 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book FY US Air Force Plan for Defense Research Sciences written by and published by . This book was released on 1985 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Development of the Megahertz Planar Laser induced Fluorescence Diagnostic for Plasma Turbulence Visualization written by Alexey Kuritsyn and published by . This book was released on 2004 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2726 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modified Laser induced Fluorescence dip Spectroscopy for Measuring Weak Electric Fields at Plasma Sheats written by Zhen Wang and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Induced Fluorescence Measurements in Inductively Coupled RF Processed Plasmas written by Sergi Gomez and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
