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Book MEMS Mirrors

Download or read book MEMS Mirrors written by Huikai Xie and published by MDPI. This book was released on 2018-05-04 with total page 217 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines

Book Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change

Download or read book Optimization of MEMS Actuator Driven by Shape Memory Alloy Thin Film Phase Change written by Cory R. Knick and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy (NiTi) was identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers. This model would also be extensible to other phase-change-driven actuators where nonlinear and significant residual stress changes are used to drive actuation.

Book Optical MEMS

Download or read book Optical MEMS written by Frederic Zamkotsian and published by . This book was released on 2019 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments' digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal-silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

Book MEMS Mirrors

    Book Details:
  • Author : Huikai Xie (Ed.)
  • Publisher :
  • Release : 2018
  • ISBN : 9783038428688
  • Pages : 210 pages

Download or read book MEMS Mirrors written by Huikai Xie (Ed.) and published by . This book was released on 2018 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS mirrors can steer, modulate and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous commercial success in projectors, displays and fiberoptic communications. Micro-spectrometers based on MEMS mirrors are starting to appear in the consumer market. There are also many breakthroughs in applying MEMS mirrors for endoscopic imaging. Equally excitingly, a new wave of opportunities for MEMS mirrors is coming up, for example, micro-LiDAR for autonomous driving and robotics, optical cross connect (OXC) for cloud data centers, and optical scanners for virtual reality/augumented reality, just to name a few. Of course, there are a number of big challenges that researchers and engineers must overcome to fully utiltize MEMS mirrors' potential: modeling and control are inherently complex due to the multiphysics, multi-DOF and nonlinear nature of the microactuators for MEMS mirrors; reliability is always a huge hurdle for commercilization; and the tradeoffs among the speed, aperture, and scan range are often overwhelming. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of MEMS mirrors based on all kinds of actuation mechanisms; and (2) new developments of applying MEMS mirrors of any kind in consumer electronics, optical communications, industry, medicine, agriculture, space, or defense.

Book Self Powered and Soft Polymer MEMS NEMS Devices

Download or read book Self Powered and Soft Polymer MEMS NEMS Devices written by Ajay Giri Prakash Kottapalli and published by Springer. This book was released on 2019-02-28 with total page 85 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.

Book Microactuators

Download or read book Microactuators written by Massood Tabib-Azar and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: 219 8. 2 Sensors 221 8. 3 Physical Sensors 222 8. 3. 1 Electrical Sensing Means 223 8. 3. 2 Magnetic Field Methods 231 8. 3. 3 Optical Methods 232 8. 4 Chemical Sensors 241 8. 4. 1 Electrical Gas and Chemical Sensors 243 8. 4. 2 Guided-Optics Intrinsic Chemical Sensors 246 8. 4. 3 Extrinsic Chemical Sensors 250 8. 4. 4 Polymer Waveguide Chemical Sensors 251 8. 4. 5 Surface Plasmon Chemical Sensors 252 8. 4. 6 Indicator-Mediated Extrinsic Sensing 253 8. 4. 7 Optical Biosensors 256 8. 4. 8 Ultrasonic Gas and Chemical Sensors 257 8. 4. 9 Intelligent Sensors 258 8. 5 Connections/Links and Wiring 258 8. 5. 1 Optical Links 260 8. 5. 2 Requirement on the Processing Unit/Intelligence 262 8. 6 Actuators 263 8. 7 Signal Processing/Computing 264 8. 7. 1 Implicit Computation 266 8. 7. 2 Explicit Computation 267 8. 8 References 274 Subject Index 279 Micro-Actuators (Electrical, Magnetic, Thermal, Optical, Mechanical, and Chemical) It has become quite apparent that sensors and actuators are the main bottleneck of the modem information processing and control systems. Microprocessors and computers used to be the main limiting element in most information processing systems. But thanks to the enonnous progress in the microelectronics industry, most information analysis tasks can be processed in real time. The data has to be acquired by the processor in some form and processed and used to produce some useful function in the real world.

Book Advanced Piezoelectric Materials

Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Electroceramic Based MEMS

Download or read book Electroceramic Based MEMS written by Nava Setter and published by Springer Science & Business Media. This book was released on 2006-03-30 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Book Ferroelectric Thin Films

    Book Details:
  • Author : Masanori Okuyama
  • Publisher : Springer Science & Business Media
  • Release : 2005-02-22
  • ISBN : 9783540241638
  • Pages : 272 pages

Download or read book Ferroelectric Thin Films written by Masanori Okuyama and published by Springer Science & Business Media. This book was released on 2005-02-22 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric thin films continue to attract much attention due to their developing applications in memory devices, FeRAM, infrared sensors, piezoelectric sensors and actuators. This book, aimed at students, researchers and developers, gives detailed information about the basic properties of these materials and the associated device physics. The contributing authors are acknowledged experts in the field.

Book Additive Manufacturing Technologies

Download or read book Additive Manufacturing Technologies written by Ian Gibson and published by Springer Nature. This book was released on 2020-11-10 with total page 685 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook covers in detail digitally-driven methods for adding materials together to form parts. A conceptual overview of additive manufacturing is given, beginning with the fundamentals so that readers can get up to speed quickly. Well-established and emerging applications such as rapid prototyping, micro-scale manufacturing, medical applications, aerospace manufacturing, rapid tooling and direct digital manufacturing are also discussed. This book provides a comprehensive overview of additive manufacturing technologies as well as relevant supporting technologies such as software systems, vacuum casting, investment casting, plating, infiltration and other systems. Reflects recent developments and trends and adheres to the ASTM, SI and other standards; Includes chapters on topics that span the entire AM value chain, including process selection, software, post-processing, industrial drivers for AM, and more; Provides a broad range of technical questions to ensure comprehensive understanding of the concepts covered.

Book Design and Modeling of Mechanical Systems   III

Download or read book Design and Modeling of Mechanical Systems III written by Mohamed Haddar and published by Springer. This book was released on 2017-11-25 with total page 1225 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a collection of original peer-reviewed contributions presented at the 7th International Congress on Design and Modeling of Mechanical Systems (CMSM’2017), held in Hammamet, Tunisia, from the 27th to the 29th of March 2017. It reports on both research findings, innovative industrial applications and case studies concerning mechanical systems and related to modeling and analysis of materials and structures, multiphysics methods, nonlinear dynamics, fluid structure interaction and vibroacoustics, design and manufacturing engineering. Continuing on the tradition of the previous editions, this proceedings offers a broad overview on the state-of-the art in the field and a useful resource for academic and industry specialists active in the field of design and modeling of mechanical systems. CMSM’2017 was jointly organized by two leading Tunisian research laboratories: the Mechanical, Modeling and Manufacturing Laboratory of the National Engineering School of Sfax and the Mechanical Engineering Laboratory of the National Engineering School of Monastir..

Book Additive Manufacturing Technologies

Download or read book Additive Manufacturing Technologies written by Ian Gibson and published by Springer. This book was released on 2014-11-26 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers in detail the various aspects of joining materials to form parts. A conceptual overview of rapid prototyping and layered manufacturing is given, beginning with the fundamentals so that readers can get up to speed quickly. Unusual and emerging applications such as micro-scale manufacturing, medical applications, aerospace, and rapid manufacturing are also discussed. This book provides a comprehensive overview of rapid prototyping technologies as well as support technologies such as software systems, vacuum casting, investment casting, plating, infiltration and other systems. This book also: Reflects recent developments and trends and adheres to the ASTM, SI, and other standards Includes chapters on automotive technology, aerospace technology and low-cost AM technologies Provides a broad range of technical questions to ensure comprehensive understanding of the concepts covered

Book Introduction to Materials for Advanced Energy Systems

Download or read book Introduction to Materials for Advanced Energy Systems written by Colin Tong and published by Springer. This book was released on 2018-12-12 with total page 930 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first of its kind text enables today’s students to understand current and future energy challenges, to acquire skills for selecting and using materials and manufacturing processes in the design of energy systems, and to develop a cross-functional approach to materials, mechanics, electronics and processes of energy production. While taking economic and regulatory aspects into account, this textbook provides a comprehensive introduction to the range of materials used for advanced energy systems, including fossil, nuclear, solar, bio, wind, geothermal, ocean and hydropower, hydrogen, and nuclear, as well as thermal energy storage and electrochemical storage in fuel cells. A separate chapter is devoted to emerging energy harvesting systems. Integrated coverage includes the application of scientific and engineering principles to materials that enable different types of energy systems. Properties, performance, modeling, fabrication, characterization and application of structural, functional and hybrid materials are described for each energy system. Readers will appreciate the complex relationships among materials selection, optimizing design, and component operating conditions in each energy system. Research and development trends of novel emerging materials for future hybrid energy systems are also considered. Each chapter is basically a self-contained unit, easily enabling instructors to adapt the book for coursework. This textbook is suitable for students in science and engineering who seek to obtain a comprehensive understanding of different energy processes, and how materials enable energy harvesting, conversion, and storage. In setting forth the latest advances and new frontiers of research, the text also serves as a comprehensive reference on energy materials for experienced materials scientists, engineers, and physicists. Includes pedagogical features such as in-depth side bars, worked-out and end-of- chapter exercises, and many references to further reading Provides comprehensive coverage of materials-based solutions for major and emerging energy systems Brings together diverse subject matter by integrating theory with engaging insights

Book To Measure the Sky

    Book Details:
  • Author : Frederick R. Chromey
  • Publisher : Cambridge University Press
  • Release : 2010-05-27
  • ISBN : 052176386X
  • Pages : 461 pages

Download or read book To Measure the Sky written by Frederick R. Chromey and published by Cambridge University Press. This book was released on 2010-05-27 with total page 461 pages. Available in PDF, EPUB and Kindle. Book excerpt: With a lively yet rigorous and quantitative approach, this textbook introduces the fundamental topics in optical observational astronomy for undergraduates. It explains the theoretical foundations for observational practices and reviews essential physics to support students' mastery of the subject. Student understanding is strengthened through over 120 exercises and problems.

Book Fundamentals of Microfabrication and Nanotechnology  Three Volume Set

Download or read book Fundamentals of Microfabrication and Nanotechnology Three Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1992 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Book Piezoelectric Actuators and Ultrasonic Motors

Download or read book Piezoelectric Actuators and Ultrasonic Motors written by Kenji Uchino and published by Springer Science & Business Media. This book was released on 1996-11-30 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: Remarkable developments have taken place in the field of mechatronics in recent years. As symbolized by the "Janglish (Japanese English)" word, mechatronics, the technology and the social adaptation for introducing electronics into mechanics has been readily accepted in Japan. Currently robots are producing many products under computer control in Japanese factories, and supermarkets are utilizing automation systems for sample displays and sales. Further, the fast paced change in semiconductor chip technology has given rise to the need for micro-displacement positioning techniques. Actuators utilizing piezoelectridelectrostrictive effects are expected to meet these needs in mechanical components in the next micro mechatronic age. This book, in English, builds on my earlier publications concerned with ceramic actuators. The first edition titled "Essentials for Development and Applications of Piezoelectric Actuators" was published in 1984 through the Japan Industrial Technology Center. The second edition "PiezoelectriclElectrostrictive Actuators" published in Japanese through Morikita Pub. Co. (Tokyo) became one of the best sellers in that company in 1986, and was then translated into Korean. The problem solving edition "Piezoelectric Actuators -Problem Solving" was also published through Morikita, which was sold in conjunction with a 60 minute video tape to provide easy understanding.