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Download or read book Optical Microlithography written by and published by . This book was released on 2007 with total page 590 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical Microlithography III written by Harry L. Stover and published by . This book was released on 1984 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical Microlithography XVII written by Bruce W. Smith and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Download or read book Optical Microlithography XI written by Luc Van den Hove and published by SPIE-International Society for Optical Engineering. This book was released on 1998 with total page 1114 pages. Available in PDF, EPUB and Kindle. Book excerpt: A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.

Download or read book Optical Microlithography written by Harry L. Stover and published by . This book was released on 1982 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Download or read book Optical Imaging in Projection Microlithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2005 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Download or read book Optical Microlithography and Metrology for Microcircuit Fabrication written by Michel J. Lacombat and published by SPIE-International Society for Optical Engineering. This book was released on 1989 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt:

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Download or read book Optical Microlithography XXIII written by Mircea V. Dusa and published by SPIE-International Society for Optical Engineering. This book was released on 2010 with total page 1218 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821

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