Download or read book Optical Emission Spectroscopy to Determine Electron Energy Distributions with Enhanced High Energy tails in low temperature Plasmas written by Shicong Wang and published by . This book was released on 2016 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Low-temperature" plasmas are weakly ionized gases with many technological applications, including the fabrication of integrated circuits. Diagnostics to determine plasma properties are desirable tools for application development, control and model verification. Processes depend on gas phase reactions involving plasma electrons, which are selectively heated to temperatures in the range of kTe~1-10 eV. Because atom and molecule collisions with the most energetic portion of the electron population are responsible for a large proportion of the excitation, ionization and dissociation reactions central to plasma applications, diagnostics to measure this portion of the electron energy distribution function (EEDF) hold particular value. The topic of this study is a non-invasive diagnostic that makes use of the wavelength dependence of the spectrum of emitted light from the plasma to determine the high-energy portion of the EEDF. A previously developed emission model employs published energy-dependent collision probabilities to compute relative light intensities for a set of characteristic emission wavelengths. Spectra are computed using this model for set of trial EEDFs and the “best fit” EEDF is selected from this set as that for which the predicted spectrum is found to be closest to the measured spectrum. The analysis relies on the use of a mathematical function with adjustable parameters to express the forms of the energy dependence in the trial EEDFs. One notable contribution of this study is the introduction of the log-normal distribution as a simple function that can represent a wide range of shapes (energy dependence) for the high-energy portions of EEDFs. The diagnostic was implemented on an inductively coupled plasma with an auxiliary electron source. The EEDF was manipulated systematically by varying the current and energy of the injected electrons. While the original emission model employed light emissions resulting only from the electronic excitation of neutral argon atoms, it was found that additional wavelengths corresponding to higher energy excitation thresholds are needed. Robust measurements of the EEDF tail were achieved for a range of operating conditions through the inclusion of emissions from Ar+ ions and the use of a gas mixture of argon, helium and neon in both experiment and emission model.
Download or read book Determination of the Electron Energy Distribution Function of a Low Temperature Plasma from Optical Emission Spectroscopy written by Dirk Hilar Dodt and published by . This book was released on 2009 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Emission Spectroscopy of Long Pulse Relativistic Electron Beam produced Argon Plasmas written by Thomas Edward Repetti and published by . This book was released on 1987 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975 with total page 1090 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 834 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Processing of Semiconductors written by P.F. Williams and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1974-03 with total page 1100 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Emission Spectroscopy Investigation of Microwave Plasmas written by Jayakumaran Sivagnaname and published by . This book was released on 1998 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Emission Spectroscopy written by W. Dekeyser and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron emission spectroscopy became recently a major tool for the study of molecules and solids. These volumes contain a rather complete review of the state of the art in this field. Both the physical and chemical aspects are covered extensively by well known specialists. Different modes of excitation are used in electron emission spec troscopy. The electron-solid scattering is covered in detail by C. B. Duke, from a theoretical point of view. Elastic and inelastic low energy electron diffraction are extensively discussed in relation to the geometrical, electronic and vibronic structure of solid surfaces. Auger electron emission spectroscopy (AES) is covered by J. C. Tracy. The tech nique is discussed from the point of view of surface research. This part also contains a complete literature list concerning the application of AES up to the middle of 1972. Electron emission produced by X-ray impact, is covered by C. S. Fadley, D. T. Clark, R. P. Gupta and S. K. Sen. The contribution by C. S. Fadley, entitled Theoretical Aspects of X-Ray Photo electron Spectroscopy', is an up to date discussion of core electron binding energies, valence electron binding energies, multiplet splittings and multi-electron processes. R. P. Gupta and S. K. Sen's contribution provides an introduction to crystal field theory and its application to electron energy level determination. D. T. Clark deals with the more chemical aspects of X-ray photoelectron spectroscopy, i.e. the study of chemical shifts and the relation to the bonding characteristics in molecules.
Download or read book Physics Of Semiconductors The Proceedings Of The Xxi International Conference In 2 Volumes written by Ping Jiang and published by World Scientific. This book was released on 1993-03-31 with total page 2151 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 21st conference proceedings continue the tradition of the ICPS series. The proceedings cover all aspects of semiconductor physics, including those related to materials, processing and devices. Plenary and invited speakers address areas of major interest.
Download or read book INIS Atomindeks written by and published by . This book was released on 1988 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Abstracts written by Materials Research Society. Meeting and published by . This book was released on 1992 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Fusion Energy Update written by and published by . This book was released on 1983 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1993 with total page 1146 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1224 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Emission Spectroscopy Studies of Plasma in Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition written by Daniel S. Vanslette and published by . This book was released on 1996 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
