Download or read book Nanoparticle Engineering for Chemical Mechanical Planarization written by Ungyu Paik and published by CRC Press. This book was released on 2019-04-15 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices. Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each step in the CMP process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. They present design techniques using polymeric additives to improve CMP performance. The final chapter focuses on novel CMP slurry for the application to memory devices beyond 50nm technology. Most books published on CMP focus on the polishing process, equipment, and cleaning. Even though some of these books may touch on CMP slurries, the methods they cover are confined to conventional slurries and none cover them with the detail required for the development of next-generation devices. With its coverage of fundamental concepts and novel technologies, this book delivers expert insight into CMP for all current and next-generation systems.
Download or read book Chemical Mechanical Polishing 14 written by R. Rhoades and published by The Electrochemical Society. This book was released on 2016-09-21 with total page 93 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Global Roadmap for Ceramic and Glass Technology written by Stephen W. Freiman and published by John Wiley & Sons. This book was released on 2007-06-29 with total page 964 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the only global roadmap that identifies the technical and manufacturing challenges associated with the development and expansion of commercial markets for ceramics and glass. Featuring presentations by industry leaders at the 1st International Congress on Ceramics (ICC) held in 2006, it suggests positive, proactive ways to address these challenges. The ICC Global Roadmap contains the following content: 1) Summary papers prepared by the invited speakers before the meeting 2) A detailed account of the presentation of each invited speaker written by an editor who attends the presentation 3) A summary account and future recommendations for the industry on each topic covered written by the board and the president of this meeting, Dr. Stephen Freiman (National Institutes of Standards and Technology) 4) The CDRom accompanying the book contains all of the above as well as pdfs of the presentations for non-invited speakers, including posters presented and discussed.
Download or read book Advances in Chemical Mechanical Planarization CMP written by Babu Suryadevara and published by Woodhead Publishing. This book was released on 2021-09-10 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. - Reviews the most relevant techniques and processes for CMP of dielectric and metal films - Includes chapters devoted to CMP for current and emerging materials - Addresses consumables and process control for improved CMP, including post-CMP
Download or read book Nanotechnology Commercialization written by Takuya Tsuzuki and published by CRC Press. This book was released on 2016-04-19 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: In terms of commercialization, nanomaterials occupy a unique place in nanotechnology. Engineered nanomaterials, especially nanoparticulate materials, are the leading sector in nanotechnology commercialization. In addition, the nanomaterial sector has attracted much more heated debate than any other nanotechnology sector with regard to safety, regul
Download or read book Nanoparticle Technology Handbook written by Makio Naito and published by Elsevier. This book was released on 2018-03-06 with total page 906 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanoparticle Technology Handbook, Third Edition, is an updated and expanded authoritative reference providing both the theory behind nanoparticles and the practical applications of nanotechnology. This third edition features twenty new chapters, providing a reference much broader in scope than the previous edition. Over 140 experts in nanotechnology and/or particle technology contributed to this new edition. The book not only includes the theory behind nanoparticles, but also the practical applications of nanotechnology. It examines future possibilities and new innovations and contains important knowledge on nanoparticle characterization and the effect of nanoparticles on the environment and humans. Nanoparticle technology is a new and revolutionary technology, which is increasingly used in electronic devices and nanomaterials. It handles the preparation, processing, application and characterization of nanoparticles and has become the core of nanotechnology as an extension of conventional fine particle/powder technology. Nanoparticle technology plays an important role in the implementation of nanotechnology in many engineering and industrial fields, including electronic devices, advanced ceramics, new batteries, engineered catalysts, functional paint and ink, drug delivery system, biotechnology, etc., making use of the unique properties of nanoparticles, which are completely different from those of bulk materials. - Introduces all aspects of nanoparticle technology, from the fundamentals to applications - Cover basic information on preparation through to the characterization of nanoparticles in a systematic way - Features information on nanostructures, which play an important role in practical applications - Includes the effects of nanoparticles on human health and the environment - Includes applications of nanoparticles in diverse fields, including applications in new areas, such as electronics cosmetics, etc. - Offers up-to-date information given by specialists in each field
Download or read book Gas Phase Nanoparticle Synthesis written by Claes Granqvist and published by Springer Science & Business Media. This book was released on 2013-06-05 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Material Science and Engineering written by Ping Chen and published by CRC Press. This book was released on 2016-03-18 with total page 711 pages. Available in PDF, EPUB and Kindle. Book excerpt: Material Science and Engineering presents novel and fundamental advances in the field of material science and engineering. This proceedings collects the comprehensive and worldwide research results on Metallic Materials and Applications, Chemical Materials, Electronic Materials, Nanomaterials, Composite and Polymer Materials, Bio and Medical Materi
Download or read book Advances in Chemical Mechanical Planarization CMP written by Babu Suryadevara and published by Woodhead Publishing. This book was released on 2016-01-09 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The technology has grown to encompass the removal and planarization of multiple metal and dielectric materials and layers both at the device and the metallization levels, using different tools and parameters, requiring improvements in the control of topography and defects. This important book offers a systematic review of fundamentals and advances in the area. Part One covers CMP of dielectric and metal films, with chapters focusing on the use of particular techniques and processes, and on CMP of particular various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. Part Two addresses consumables and process control for improved CMP, and includes chapters on the preparation and characterization of slurry, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes, and approaches for defection characterization, mitigation, and reduction. - Considers techniques and processes for CMP of dielectric and metal films - Includes chapters devoted to CMP for particular materials - Addresses consumables and process control for improved CMP
Download or read book Green synthesis of copper and zinc nanoparticles using different varieties of banana starch latex and sap and evaluation of their antifungal activity against Fusarium oxysporum cubense written by Prem Jose Vazhacharickal and published by Amazon Publishers, USA. This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Soil borne diseases which are caused to various plants include a wide variety of soil microbes like fungi and bacteria, among which Fusarium wilt is one such disease caused by Fusarium oxysporum cubense in banana plants. Wilt disease or the panama disease of plant is among the most destructive disease of banana in the tropics and even the control methods like field sanitation, soil treatments and crop rotations have not been a long term control for this disease. An alternative method of treating Fusarium oxysporum was adopted by using various banana parts mainly its peel, pulp sap and its latex of varieties such as Robusta (B1) Musa acuminate Colla (AAA), Etha (B2) Musa x paradisiaca (AAB), Poovan (B3) Musa x paradisiaca (AAB), Sundari (B4) Musa acuminate Colla (AA), Njalipoovan (B5) Musa acuminate Colla (AB), Palayamkodan (B6) Musa x paradisiaca (AAB), Kannan (B8) Musa acuminate Colla (AAA), Pachakadali (B9) Musa acuminate Colla (AAA). Nanoparticles are small particles with a dimension of 10-9 and 10-10. Green synthesis is a new method developed for the synthesis of nanoparticles which is small in size, large surface area and eco- friendly. Leaf extracts of these plants were used for synthesis of copper and zinc nanoparticles, as nanoparticles are powerful antimicrobial agents. The results shows that dry skin and fruit extracts of Palemkodan, Njalipoovan, Etha, Pachakhadali with solvents, propane, ethanol, methanol and acetone and the fresh extract latex and sap of Palemkodan and Poovan with solvents isoproponol, ethanol, methanol with 1/10 and 1/50 dilution are used for the synthesis of copper and zinc nanoparticles. Copper and zinc nanoparticle shows greater antifungal activity than copper sulphate and zinc sulphate, respectively and dry extract. The maximum zone of inhibition was at 50 and 100 µl for all the test plates. This indicates that the zone of inhibition increases with as the concentration of nanoparticles increased. An overall result showed that ethanol, methanol and isoropane could be used as a good solvents and skin of Njalipoovan and Etha could be used for controlling the Fusarium oxysporum cubense under invitro conditions.
Download or read book Green synthesis of copper and zinc nanoparticles from plant extracts and evaluation of their antifungal activity against Fusarium oxysporum cubense an overview written by Prem Jose Vazhacharickal and published by Amazon Publishers, USA. This book was released on 2019-04-20 with total page 141 pages. Available in PDF, EPUB and Kindle. Book excerpt: Soil borne diseases which are caused to various plants include a wide variety of soil microbes like fungi and bacteria, among which Fusarium wilt is one such disease caused by Fusarium oxysporum cubense in banana plants. Wilt disease or the panama disease of plant is among the most destructive disease of banana in the tropics and even the control methods like field sanitation, soil treatments and crop rotations have not been a long term control for this disease. An alternative method of treating Fusarium oxysporum was adopted by using various natural plant leaves of Chromolaena odorata, Justicia adhatoda, Glycosmis pentaphylla, Azadirachta indica, Gliricidia sepium, Piper nigrum, Ocimum tenuiflorum and Tabernaemontana divaricate. Nanoparticles are small particles with a dimension of 10-9 and 10-10. Green synthesis is a new method developed for the synthesis of nanoparticles which is small in size, large surface area and eco- friendly. Leaf extracts of these plants were used for synthesis of copper and zinc nanoparticles, as nanoparticles are powerful antimicrobial agents. The extract is prepared with a stock solution of 100mM copper sulphate and 100mM zinc sulphate. The leaf extracts were prepared with 5 solvents (Distilled water, Propane, Hexane, Acetone and Methanol). The action of plant leaves were observed by the zone of inhibition obtained with a concentration of 50, 100 and 150µl respectively. The result was more in copper nanoparticles of leaf extract as compared to the zinc nanoparticles of particular leaf extracts but the zinc particles with methanol and propane showed good result with particular leaves. In dried condition of leaves copper nanoparticles with propane as solvent exhibited a greater zone of inhibition. Moreover the solvent, methanol showed good results with both zinc and copper nanoparticles. The synthesized nanoparticle were characterized by UV-VIS spectrophotometry to confirm the formation of nanoparticles. Green synthesis is used namely because of low cost, simple, use of less toxic materials, most important is eco-friendly.
Download or read book Emerging Technologies for Nanoparticle Manufacturing written by Jayvadan K. Patel and published by Springer Nature. This book was released on 2021-06-23 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of nanoparticle production methods, scale-up issues drawing attention to industrial applicability, and addresses their successful applications for commercial use. There is a need for a reference book which will address various aspects of recent progress in the methods of development of nanoparticles with a focus on polymeric and lipid nanoparticles, their scale-up techniques, and challenges in their commercialization. There is no consolidated reference book that discusses the emerging technologies for nanoparticle manufacturing. This book focuses on the following major aspects of emerging technologies for nano particle manufacturing. I. Introduction and Biomedical Applications of Nanoparticles II. Polymeric Nanoparticles III. Lipid Nanoparticles IV. Metallic Nanoparticles V. Quality Control for Nanoparticles VI. Challenges in Scale-Up Production of Nanoparticles VII. Injectable Nanosystems VIII. Future Directions and Challenges Leading scientists are selected as chapter authors who have contributed significantly in this field and they focus more on emerging technologies for nanoparticle manufacturing, future directions, and challenges.
Download or read book Applied Plastics Engineering Handbook written by Myer Kutz and published by William Andrew. This book was released on 2011-07-20 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical reference for all plastics engineers who are seeking to answer a question, solve a problem, reduce a cost, improve a design or fabrication process, or even venture into a new market. Applied Plastics Engineering Handbook covers both polymer basics – helpful to bring readers quickly up to speed if they are not familiar with a particular area of plastics processing – and recent developments – enabling practitioners to discover which options best fit their requirements. Each chapter is an authoritative source of practical advice for engineers, providing authoritative guidance from experts that will lead to cost savings and process improvements. Throughout the book, the focus is on the engineering aspects of producing and using plastics. The properties of plastics are explained along with techniques for testing, measuring, enhancing and analyzing them. - Practical introductions to both core topics and new developments make this work equally valuable for newly qualified plastics engineers seeking the practical rules-of-thumb they don't teach you in school, and experienced practitioners evaluating new technologies or getting up to speed on a new field - The depth and detail of the coverage of new developments enables engineers and managers to gain knowledge of, and evaluate, new technologies and materials in key growth areas such as biomaterials and nanotechnology - This highly practical handbook is set apart from other references in the field, being written by engineers for an audience of engineers and providing a wealth of real-world examples, best practice guidance and rules-of-thumb
Download or read book Fabrication and Application of Nanomaterials written by S. Bandyopadhyay and published by McGraw-Hill Education. This book was released on 2019-06-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. Nanomaterials principles, practices, and fabrication methods This advanced textbook offers comprehensive coverage of nanomaterials synthesis, characterization, and functionalization using solution-based approaches. Written from a chemical engineering perspective, Fabrication and Application of Nanomaterials illustrates each topic through concise theory, numerical problems, and recent case studies. Students, scientists, and engineers studying nanotechnology and the application of nanomaterials should find the text a highly useful reference. Coverage includes: • An introduction to nanomaterials • Nucleation, growth, and synthesis of metal nanoparticles • Functionalization of metal nanoparticles • Synthesis of polymer-based nanoparticles • Functionalization and properties of hydrogels • Characterization of metal nanoparticles • Applications in • Catalysis • Drug delivery and biomedicine • Water treatment and water management • Energy harvesting
Download or read book Tribology In Chemical Mechanical Planarization written by Hong Liang and published by CRC Press. This book was released on 2005-03-01 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt: Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and the basics of wear. The book concludes its focus with mechanical aspects of CMP, pad materials, elastic modulus, and cell buckling. As the first source to integrate CMP and tribology, Tribology in Chemical-Mechanical Planarization provides applied scientists and engineers in the fields of semiconductors and microelectronics with clear foresight to the future of this technology.
Download or read book The British National Bibliography written by Arthur James Wells and published by . This book was released on 2009 with total page 1922 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nanoparticles written by American Chemical Society. Meeting and published by . This book was released on 2008 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book summarizes recent advances in methods to synthesize, stabilize, passivate and functionalize diverse nanoparticles from metals, metal oxides, semiconductors, polymers, organics and biomolecules. A wide range of potential appplications with nanoparticles as building blocks are described.
