Download or read book Modeling And Feedback Control Of Mems Devices written by Bruno Borovic and published by LAP Lambert Academic Publishing. This book was released on 2013 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electromechanical systems (MEMS) are micromachines that allow computation, sensing, mobility, and manipulation at small scales down to the size of microns. During the past decade, MEMS technology has allowed the development of many advanced devices that have found their way to the market. Ever increasing needs for MEMS are fueled by the exponential growth of markets such as cell phones, gaming, and communications and military applications. Both quality and price requirements put stringent specifications on the new MEMS devices. Feedback control techniques facilitate reliably meeting these specifications. This book provides the reader with control strategies and design techniques in a collection of practical examples, covering topics such as dynamical modeling of MEMS devices, dynamic control for performance improvement, and improved MEMS design based on control system analysis.
Download or read book Modeling and Feedback Control of MEMS Devices written by Bruno Borovic and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: As MEMS actuators reach maturity and emerge from the research lab into commercial applications, their increased reliability, speed, and performance accuracy is needed. MEMS are typically driven directly in an open-loop fashion by applying simple actuating signals. The requirements for better dynamical behavior, however, have resulted in the gradual introduction of improved actuation approaches, such as pre shaped open-loop driving and closed-loop control. Unlike macro mechanical systems where the implementation of the feedback is relatively simple, it is quite problematic in the MEMS case. The presence of fast system dynamics, and physical area efficiency requirements have introduced additional challenges for feedback control design. The main purpose of this work is to explore possibilities and envision applications where closed-loop strategies can be successfully used. Naturally, the design of reliable actuating techniques requires simple but accurate dynamic models of the device, either in input/output or in the state variable form. Accurate models lead towards optimal design, better performance, better understanding of the device, short development time, and consequently, lower cost of the device. The modeling of thermal and electrostatic actuators, based on synergy between finite element analysis (FEA) and analytical approaches is, therefore, another subject that this dissertation deals with. The dissertation focuses mainly on the two most common types of MEMS actuators - thermal and electrostatic. It encloses several chapters addressing development of the modeling methods and advanced actuating techniques, including closed-loop control. The dissertation contains a novel, finite element analysis (FEA)-based modeling method for thermal actuators, position and light intensity control techniques for an optical MEMS device actuated by an electrostatic comb drive, a control system for preventing lateral instability for the comb electrostatic actuator and, finally, a discussion on the sensing structure and force contribution model for the lateral motion control.
Download or read book Sports Cards 2001 magazine written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Feedback Control of MEMS to Atoms written by Jason J. Gorman and published by Springer Science & Business Media. This book was released on 2011-12-17 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.
Download or read book Analysis and Modeling of Capacitive MEMS Gyroscopes with Feedback Control written by Wei Cui and published by . This book was released on 2010 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book System level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.
Download or read book Digital Feedback Control of MEMS Devices written by Nitin Kataria and published by . This book was released on 2009 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: A CAD Metric for control fidelity is proposed and the potential for power savings is demonstrated using this decomposition on three different control problems.
Download or read book Feedback Control of MEMS to Atoms written by Jason J. Gorman and published by Springer Science & Business Media. This book was released on 2011-12-16 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control from MEMS to Atoms illustrates the use of control and control systems as an essential part of functioning integrated systems. The book is organized according to the dimensional scale of the problem, starting with micro-scale systems and ending with atomic-scale systems. Similar to macro-scale machines and processes, control systems can play a major role in improving the performance of micro- and nano-scale systems and in enabling new capabilities that would otherwise not be possible. However, the majority of problems at these scales present many new challenges that go beyond the current state-of-the-art in control engineering. This is a result of the multidisciplinary nature of micro/nanotechnology, which requires the merging of control engineering with physics, biology and chemistry.
Download or read book Reliability Modeling of Microelectromechanical Systems Using Neural Networks written by J. Sebastian Perera and published by . This book was released on 2000 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Photonic MEMS Devices written by Ai-Qun Liu and published by CRC Press. This book was released on 2018-10-08 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Download or read book Modeling and Control of MEMS Micromirror Arrays with Nonlinearities and Parametric Uncertainties written by Jessica Rae Bronson and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The measurements, taken for multiple mirrors across three different arrays, validate the results from analytical models, and demonstrate the need to compensate for differences in performance. Results from the modeling and characterization are used to develop passive and active control techniques to ensure accurate position tracking across an array of devices in the presence of model uncertainties. A passive design method is presented called a progressive-linkage that is intended to eliminate the occurrence of electrostatic pull-in and hysteresis. Also, classical and optimal feedback control techniques are utilized to further delineate the impact of the parametric uncertainties on the system performance. As these mirrors are arranged in an array, the performance of individual mirrors is examined, and then this control is extended to the problem of controlling an array. This array control problem is explored by considering different types of feedback error metrics and the sensors that may be used to provide the feedback signal for this system. The impact of the work presented in this dissertation is an increased understanding of the complexities of designing and operating arrays of electrostatic micromirrors for high-precision applications. The modeling methods developed may be extended in future work to include design optimization to decrease the effects of parametric uncertainty on the micromirror performance, as well as developing systems that can easily incorporate feedback mechanisms for implementation of the closed-loop control algorithms.
Download or read book Design Modeling and Control of Nanopositioning Systems written by Andrew J. Fleming and published by Springer. This book was released on 2014-05-15 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell surgery and precision optics. Piezoelectric transducers, employed ubiquitously in nanopositioning applications are then discussed in detail including practical considerations and constraints on transducer response. The reader is then given an overview of the types of nanopositioner before the text turns to the in-depth coverage of mechanical design including flexures, materials, manufacturing techniques, and electronics. This process is illustrated by the example of a high-speed serial-kinematic nanopositioner. Position sensors are then catalogued and described and the text then focuses on control. Several forms of control are treated: shunt control, feedback control, force feedback control and feedforward control (including an appreciation of iterative learning control). Performance issues are given importance as are problems limiting that performance such as hysteresis and noise which arise in the treatment of control and are then given chapter-length attention in their own right. The reader also learns about cost functions and other issues involved in command shaping, charge drives and electrical considerations. All concepts are demonstrated experimentally including by direct application to atomic force microscope imaging. Design, Modeling and Control of Nanopositioning Systems will be of interest to researchers in mechatronics generally and in control applied to atomic force microscopy and other nanopositioning applications. Microscope developers and mechanical designers of nanopositioning devices will find the text essential reading.
Download or read book Photonic Mems Devices written by Ai-Qun Liu and published by CRC Press. This book was released on 2019-08-30 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today's researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Download or read book Methodology for the Modeling and Simulation of Microsystems written by Bartlomiej F. Romanowicz and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems.
Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications
Download or read book Nonlinear Control of Microelectromechanical Systems MEMS Devices written by Kwadwo Osei Owusu and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Different actuation principles have been developed for MEMS but electrostatic actuators are the most common. A significant drawback in the use of electrostatic actuators for some applications is their nonlinear voltage to position characteristics. Analog operation of these devices requires the use of feedback to stabilize and linearize them. Controlling and optimizing the operation of electrostatic controllers using feedback requires the establishment of the complete and accurate dynamical model of the device. In this thesis, we show how an optical switch driven by a MEMS electrostatic comb drive is controlled to guarantee its performance, stability and reliability for use in optical networks. Analog control of electrostatically actuated MEMS devices is also discussed and analyzed. A simple 1-DOF actuator model is used to derive a nonlinear control scheme which eliminates "snap through" and improves the dynamic performance of electrostatic microactuators. Finally, a novel fiber-optic pressure sensor design that employs a misaligned fiber-axis with respect to diaphragm center is discussed. It is shown that such a configuration increases the sensor sensitivity and pressure measurement range appreciably.
Download or read book Advanced Mechatronics and MEMS Devices written by Dan Zhang and published by Springer Science & Business Media. This book was released on 2012-09-14 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
