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Book Microfabrication and Mechanical Properties of Free Standing Thin Films

Download or read book Microfabrication and Mechanical Properties of Free Standing Thin Films written by James E. Steinwall and published by . This book was released on 1992 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Microfabrication and Characterization of PVDF Copolymer Thin Films Suitable for Integrating with Optical Microsystems

Download or read book Microfabrication and Characterization of PVDF Copolymer Thin Films Suitable for Integrating with Optical Microsystems written by Kiran Kumar Chatrathi and published by . This book was released on 2006 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the emerging field of Micro Electro Mechanical Systems (MEMS) silicon continues to be the best material to integrate with mechanical and electrical miniature systems such as microsensors and microactuators that use various schemes of sensing and actuation. The functionality of these systems may be enhanced from extended type of materials with enhanced sensitivity and improved actuation. The integration of piezoelectric materials in MEMS facilitates the functionality of the devices. PVDF (Polyvinylidene fluoride) and its copolymers in the domain of piezoelectric materials have always been upfront to integrate with MEMS, in particular, copolymers of PVDF possess a much enhanced material properties and can eventually deliver better performance than PVDF homopolymer. The application of copolymers extends to all classes of miniaturized systems such as optical microsystems, sensors, actuators etc. In thin film technology, it is very important to have a better understanding of the crystal structure and material properties of thin films. In the present work microfabrication and characterization of P(VDF-TrFE) copolymer thin films are carried out. Various deposition techniques for PVDF thin films are presented and spin coating technique is finally adopted for microfabrication of PVDF copolymer thin films due to its advantages. Further spinning characterization of PVDF copolymer thin films are presented. An optimized set of spin parameters are found in order to develop a uniformly deposited PVDF copolymer thin films. In the current work, polarization of the films is performed through step-wise poling method. A simple experimental setup for stepwise poling method is presented. The main aspect of the present work is focused on the material characterization of the microfabricated PVDF copolymer thin films through "Fourier Transform Infrared Spectroscopy" (FTIR). An in-depth FTIR analysis on the effect of annealing PVDF copolymer thin films is presented and the analysis is extended through the study on the variation of the significant optical parameters such as absorbance and transmittance spectra in the infrared region. The study focuses on the variation of the spectra in the piezoelectric phase of the thin films. Further, the effect of polarization (poling) of PVDF copolymer thin films on the absorbance and transmittance spectra is also presented, FTIR analysis is further extended through comparison of the spectra of the microfabricated PVDF copolymer thin films with the available commercial PVDF thin films. In the present work, the mechanical properties of the spin coated PVDF copolymer thin are characterized through the measurement of piezoelectric constant, d 31 for the considered geometry of PVDF copolymer thin films. The results are compared with the measured piezoelectric constant of commercial PVDF thin film. Finally a novel variable optical attenuator (VOA) through piezoelectric actuation is presented. The design of the VOA using PVDF copolymer thin films is discussed and the optical attenuation properties of the VOA are analyzed.

Book Introduction to Microfabrication

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2005-01-28 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Book Microfabricated Structures for the Measurement of Adhesion and Mechanical Properties of Polymer Films

Download or read book Microfabricated Structures for the Measurement of Adhesion and Mechanical Properties of Polymer Films written by Mark G. Allen and published by . This book was released on 1986 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabricated test structures for the in-situ measurement of adhesion of thin films have been described. Young's modulus and residual tensile stress are determined from pre-peel measurement of the load-deflection behavior of suspended membranes. On systems of weak adhesion, a blister test using suspended membranes has been carried out. For systems of good adhesion, an island test structure has been developed allowing even thin films to be tested. Mechanical models for all three structures are described. Keywords: Polymer, Polyimide, Mechanical properties, Adhesion, Film, Microfabrication, Stress, Modulus, Blister test, Critical pressure, Peel.

Book Fundamentals of Microfabrication

Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Book Preparation and Properties of Thin Films

Download or read book Preparation and Properties of Thin Films written by K. N. Tu and published by Elsevier. This book was released on 2013-10-22 with total page 351 pages. Available in PDF, EPUB and Kindle. Book excerpt: Treatise on Materials Science and Technology, Volume 24: Preparation and Properties of Thin Films covers the progress made in the preparation of thin films and the corresponding study of their properties. The book discusses the preparation and property correlations in thin film; the variation of microstructure of thin films; and the molecular beam epitaxy of superlattices in thin film. The text also describes the epitaxial growth of silicon structures (thermal-, laser-, and electron-beam-induced); the characterization of grain boundaries in bicrystalline thin films; and the mechanical properties of thin films on substrates. The ion beam modification of thin film; the use of thin alloy films for metallization in microelectronic devices; and the fabrication and physical properties of ultrasmall structures are also encompassed. Materials scientists and materials engineers will find the book invaluable.

Book Manufacturing Techniques for Microfabrication and Nanotechnology

Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d

Book Thin Films Volume 875

Download or read book Thin Films Volume 875 written by Thomas E. Buchheit and published by Cambridge University Press. This book was released on 2005 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book has a long tradition of representing current topics in thin-film properties and how they are related to the performance and reliability of thin-film structures. Several emerging and well-developed technologies rely on understanding the behavior of these structures. This book provides a forum for an exchange of ideas among researchers who are interested in the mechanical behavior of thin films, broadly applied to their materials choice or methodology. The book focuses on stress-related phenomena in thin films for a wide range of materials. Of particular interest are studies that explore the frontiers of thin-film materials science with regard to materials selection or size scale. Topics include: elasticity in thin films; characterizing thin films by nanoindentation; mechanical behavior of nanostructured films; mechanical properties of thin; thin-film plasticity; thin-film plasticity; thin-film plasticity; novel testing techniques; in situ characterization techniques; adhesion and fracture of thin films; fatigue and stress in interconnect and metallization; deformation, growth and microstructure in thin films and thin-film processing.

Book Tensile Testing of Thin Films

Download or read book Tensile Testing of Thin Films written by D. T. Read and published by . This book was released on 1997 with total page 96 pages. Available in PDF, EPUB and Kindle. Book excerpt: Five technical papers covering the development of a set of techniques for measuring the tensile properties of thin films are gathered here. Also included are drawings of the mechanical components of the apparatus and listings of two computer programs. Additional necessary parts include a computer, instrumentation, two piezoelectric stacks, and an appropriate platform equipped with a microscope. Piezoelectric stacks are used as actuators. Noncontacting eddy-current displacement sensors measure both the tensile displacement and the force.Closed-loop feedback control allows a variety of test programs. The maximum available displacement is about 50 um, and the maximum available force is about 0.3 N. The resolution of displacement is about 25 nm, and the resolution of force is about 100 uN. Cyclic loading has been demonstrated for cycles as short as 20 s.

Book Microfabrication of Thin films

Download or read book Microfabrication of Thin films written by Yei Hwan Jung and published by . This book was released on 2017 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin films are layers of materials with thicknesses ranging from sub-nanometers to several micrometers. In engineering, thin films are attractive because of their exceptional materials properties that are ideal for a wide range of applications. At micro-scale, thin films are extremely difficult to handle because of the delicacy of the films that can easily break or tear apart with slight mechanical deformations. Therefore, microfabrication of thin films has long been a challenge in most fields. In this work, conventional microfabrication techniques were modified to fabricate various thin films, including high-performance flexible and stretchable electronics and biodegradable electronics. Moreover, the techniques used for fabricating such devices were implemented to create thin film scaffolds that can benefit stem cell replacement therapy. Recent progresses in flexible or stretchable electronics and unconventional microfabrication technology present a route to creating high-performance biocompatible materials in forms that enable conformal contacts to the curvilinear surfaces, such as skin, tissues and organs. One of the key technology missing for such thin film electronics was the high-frequency operation of electronics, which enables wireless communications and high-speed data transfers. New device designs and fabrication strategies were developed for high-frequency flexible and stretchable electronic components, which possess state-of-the-art performance that would lead to electronics capable of high-frequency operations using purely thin film components. Moreover, thin film electronics are not only advantageous for creating flexible and stretchable electronics, but also for tremendously reducing the amount of inorganic materials used for electronics manufacture. Thus, the fabrication techniques were utilized to demonstrate a complete set of green device components required for high-performance electronics using modified microfabrication techniques and thin film components on biodegradable wood-derived films. Finally, the unique precision manufacturing capabilities in microfabrication technology were applied to create complex micro-structures on polymer thin films for stem cell transplantation scaffolds. The demonstrated transplantable thin film scaffold with micro-structures can guide the polarization of retinal stem cells, offering replacement therapy for the patients who were limited to no treatment options.

Book An Experimental Technique for the Study of the Mechanical Behavior of Thin Film Materials at Micro and Nano scale

Download or read book An Experimental Technique for the Study of the Mechanical Behavior of Thin Film Materials at Micro and Nano scale written by Arash Tajik and published by . This book was released on 2008 with total page 169 pages. Available in PDF, EPUB and Kindle. Book excerpt: An experimental technique has been presented to probe the mechanical behavior of thin film materials. The method is capable of tensile testing thin films on substrate and free-standing thin film specimens. A mechanical gripper was designed to address the current challenges in gripping thin film specimens. In order to measure the strain field across the gage section, the moire interferometry technique was used and the respective optical setup was designed. A versatile microfabrication process has been developed to fabricate free-standing dog-bone specimens. Aluminum was used as the model material; however, any other metallization material can be integrated in the process. Thin film specimens have been characterized using SEM, AFM, and TEM. A process has been developed to fabrication diffraction gratings on the specimen by FIB milling. Different grating geometries were fabricated and the diffraction efficiency of the gratings was characterized. The structural damage induced by the Ga+ ions during the FIB milling of the specimens was partially characterized using STEM and EDS. In order to extract the strain field information from the moire interferogram data, a numerical postprocessing technique was developed based on continuous wavelet transforms (CWT). The method was applied on simulated uniform and nonuniform strain fields and the wavelet parameters were tuned to achieve the best spatial localization and strain accuracy.

Book The Physics of Microfabrication

Download or read book The Physics of Microfabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.

Book Thin Films Stresses and Mechanical Properties VIII

Download or read book Thin Films Stresses and Mechanical Properties VIII written by Richard Vinci and published by Cambridge University Press. This book was released on 2014-06-05 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of mechanical behavior is crucial for a wide variety of thin-film technologies such as semiconductor devices and packaging (including advanced interconnects, dielectrics and silicides), information storage media, hard coatings, microelectromechanical systems (MEMS), and biomedical devices. The influence of mechanical behavior is seen in thin-film performance and reliability, as well as morphology development during processing and service. The increased need for understanding of these properties has challenged modern materials science because concepts, models and techniques developed for bulk materials often do not apply in small dimensions. This book addresses key issues in the still growing field of thin-film mechanical behavior. Topics include: multilayer thin films; metallic thin films; epitaxy, deposition parameters, microstructure and stresses; thin films for applications in MEMS; polymer thin films; mechanical properties of amorphous and crystalline carbon; adhesion and fracture; reliability in microelectronics; and nanoindentation and advanced testing techniques.