Download or read book Microelectromechanical Systems Materials and Devices written by David A. LaVan and published by Cambridge University Press. This book was released on 2014-06-05 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.
Download or read book Microelectromechanical Systems Materials and Devices III Volume 1222 written by Jörg Bagdahn and published by Cambridge University Press. This book was released on 2010-06-18 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices II Volume 605 written by Maarten De Boer and published by Mrs Proceedings. This book was released on 2000-10-02 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1997-12-01 with total page 75 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices written by Arthur H. Heuer and published by . This book was released on 1999 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices written by Arthur H. Heuer and published by . This book was released on 1999 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices IV written by and published by . This book was released on 2002 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microelectromechanical Systems Materials and Devices IV written by Frank W. DelRio and published by Cambridge University Press. This book was released on 2014-06-05 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: Symposium S, "Microelectromechanical Systems-Materials and Devices IV," held November 29-December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were spawned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic, and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection, and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials, and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials, and biomaterials (ceramic, metallic, polymeric, composite based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.
Download or read book Microelectromechanical Systems Volume 1139 written by Srikar Vengallatore and published by Cambridge University Press. This book was released on 2009-06-23 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices IV Volume 687 written by Arturo A. Ayón and published by . This book was released on 2002-05-23 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Download or read book Microelectromechanical Systems Volume 1139 written by Srikar Vengallatore and published by Cambridge University Press. This book was released on 2014-06-05 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices III Volume 657 written by Harold Kahn and published by Cambridge University Press. This book was released on 2001-09-05 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.
Download or read book Microelectromechanical Systems Materials and Devices III written by Jörg Bagdahn and published by Cambridge University Press. This book was released on 2010-06-18 with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt: Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
Download or read book Nuclear Radiation Detection Materials Volume 1038 written by Arnold Burger and published by . This book was released on 2008-11-20 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This symposium will provide a venue for the presentation of the latest results and discussion of radiation detection materials from both experimental and theoretical standpoints. As advances are made in this area of materials, additional experimental and theoretical approaches are used to both guide the growth of materials and to characterize the materials that have a wide array of applications for detecting different types of radiation. The types of detector materials for semiconductors and scintillators include a variety of molecular compounds such as lanthanum halides, zinc oxide, lead iodide, cadmium telluride, mercuric iodide, thallium bromide, as well as others, such as cadmium zinc telluride." "An additional class of scintillators includes those based on organic compounds and glasses. Ideally, desired materials used for radiation detection have attributes such as appropriate-range bandgaps, high atomic numbers of the central element, high densities, performance at room temperature, and strong mechanical properties, and are low cost in terms of their production. There are significant gaps in the knowledge related to these materials that are very important in making radiation detector materials that are higher quality in terms of their reproducible purity, homogeneity, and mechanical integrity. The topics that are the focal point of this symposium address these issues so that much better detectors may be made in the future."--BOOK JACKET.
Download or read book Fundamentals of Nanoindentation and Nanotribology IV Volume 1049 written by Materials Research Society. Meeting and published by . This book was released on 2008-05-15 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book is a snapshot of the state of the art in nanoindentation and nanotribology, and highlights emerging topics including the development of new methods for characterizing nanoscale mechanical and tribological properties.
Download or read book Thermoelectric Power Generation Volume 1044 written by Timothy P. Hogan and published by . This book was released on 2008-06-11 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. The focus of this book is in the fields of thermoelectrics, thermionics and thermoacoustics for thermal-to-electric energy conversion.
Download or read book Diamond Electronics fundamentals to Applications II written by Christoph E. Nebel and published by . This book was released on 2008 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
