Download or read book Electromechanics and MEMS written by Thomas B. Jones and published by Cambridge University Press. This book was released on 2013-05-02 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive MEMS textbook, with worked examples and numerous homework problems.

Download or read book Micro Electronic and Mechanical Systems written by Kenichi Takahata and published by BoD – Books on Demand. This book was released on 2009-12-01 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Download or read book MEMS based Circuits and Systems for Wireless Communication written by Christian C Enz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book MEMS written by Vikas Choudhary and published by CRC Press. This book was released on 2017-12-19 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Download or read book Advanced RF MEMS written by Stepan Lucyszyn and published by Cambridge University Press. This book was released on 2010-08-19 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

Download or read book EKC2008 Proceedings of the EU Korea Conference on Science and Technology written by Seung-Deog Yoo and published by Springer Science & Business Media. This book was released on 2008-10-14 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: Current research fields in science and technology were presented and discussed at the EKC2008, informing about the interests and directions of the scientists and engineers in EU countries and Korea. The Conference has emerged from the idea of bringing together EU and Korea to get to know each other better, especially in fields of science and technology. The focus of the conference is put on the topics: Computational Fluid Dynamics; Mechatronics and Mechanical Engineering; Information and Communications Technology; Life and Natural Sciences; Energy and Environmental Technology.

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Download or read book Nanotechnology for Lithium Ion Batteries written by Yaser Abu-Lebdeh and published by Springer Science & Business Media. This book was released on 2012-10-17 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique combined analysis of two scientific success stories—lithium-ion batteries and nanotechnology—has contributions from leading international experts who analyze the positive interplay between them, as well as future developments in energy storage.

Download or read book Recent Advances in Computational Optimization written by Stefka Fidanova and published by Springer. This book was released on 2013-04-10 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optimization is part of our everyday life. We try to organize our work in a better way and optimization occurs in minimizing time and cost or the maximization of the profit, quality and efficiency. Also many real world problems arising in engineering, economics, medicine and other domains can be formulated as optimization tasks. This volume is a comprehensive collection of extended contributions from the Workshop on Computational Optimization. This book presents recent advances in computational optimization. The volume includes important real world problems like parameter settings for con- trolling processes in bioreactor, robot skin wiring, strip packing, project scheduling, tuning of PID controller and so on. Some of them can be solved by applying traditional numerical methods, but others need a huge amount of computational resources. For them it is shown that is appropriate to develop algorithms based on metaheuristic methods like evolutionary computation, ant colony optimization, constrain programming etc.

Download or read book Poly SiGe for MEMS above CMOS Sensors written by Pilar Gonzalez Ruiz and published by Springer Science & Business Media. This book was released on 2013-07-17 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.

Download or read book Microactuators Microsensors and Micromechanisms written by Ashok Kumar Pandey and published by Springer Nature. This book was released on 2022-11-20 with total page 379 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Download or read book Porous Silicon From Formation to Applications Optoelectronics Microelectronics and Energy Technology Applications Volume Three written by Ghenadii Korotcenkov and published by CRC Press. This book was released on 2016-01-06 with total page 620 pages. Available in PDF, EPUB and Kindle. Book excerpt: Porous silicon is rapidly attracting increasing interest from various fields, including optoelectronics, microelectronics, photonics, medicine, sensor and energy technologies, chemistry, and biosensing. This nanostructured and biodegradable material has a range of unique properties that make it ideal for many applications. This book, the third of a

Download or read book Electrical Contacts written by Paul G. Slade and published by CRC Press. This book was released on 2017-12-19 with total page 1314 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering the theory, application, and testing of contact materials, Electrical Contacts: Principles and Applications, Second Edition introduces a thorough discussion on making electric contact and contact interface conduction; presents a general outline of, and measurement techniques for, important corrosion mechanisms; considers the results of contact wear when plug-in connections are made and broken; investigates the effect of thin noble metal plating on electronic connections; and relates crucial considerations for making high- and low-power contact joints. It examines contact use in switching devices, including the interruption of AC and DC circuits with currents in the range 10mA to 100kA and circuits up to 1000V, and describes arc formation between open contacts and between opening contacts. Arcing effects on contacts such as erosion, welding, and contamination are also addressed. Containing nearly 3,000 references, tables, equations, figures, drawings, and photographs, the book provides practical examples encompassing everything from electronic circuits to high power circuits, or microamperes to mega amperes. The new edition: Reflects the latest advances in electrical contact science and technology Examines current research on contact corrosion, materials, and switching Includes updates and revisions in each chapter, as well as up-to-date references and new figures and examples throughout Delivers three new chapters on the effects of dust contamination, electronic sensing for switching systems, and contact phenomena for micro-electronic systems (MEMS) applications With contributions from recognized experts in the field, Electrical Contacts: Principles and Applications, Second Edition assists practicing scientists and engineers in the prevention of costly system failures, as well as offers a comprehensive introduction to the subject for technology graduate students, by expanding their knowledge of electrical contact phenomena.

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Download or read book Micro and Nano Scale NMR written by Jens Anders and published by John Wiley & Sons. This book was released on 2018-08-20 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: This must-have book is the first self-contained summary of recent developments in the field of microscale nuclear magnetic resonance hardware, covering the entire technology from miniaturized detectors, the signal processing chain, and detection sequences. Chapters cover the latest advances in interventional NMR and implantable NMR sensors, as well as in using CMOS technology to manufacture miniaturized, highly scalable NMR detectors for NMR microscopy and high-throughput arrays of NMR spectroscopy detectors.