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Book Metrology for submicrometer devices and circuits

Download or read book Metrology for submicrometer devices and circuits written by W. Murray Bullis and published by . This book was released on 1980 with total page 48 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book National Semiconductor Metrology Program

Download or read book National Semiconductor Metrology Program written by National Semiconductor Metrology Program (U.S.) and published by . This book was released on 1996 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book NBS Special Publication

Download or read book NBS Special Publication written by and published by . This book was released on 1980 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book National Semiconductor Metrology Program

Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 2000 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Journal of Research of the National Bureau of Standards

Download or read book Journal of Research of the National Bureau of Standards written by United States. National Bureau of Standards and published by . This book was released on 1988 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Scientific and Technical Aerospace Reports

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1981 with total page 1370 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.

Book Publications Catalog of the U S  Department of Commerce

Download or read book Publications Catalog of the U S Department of Commerce written by United States. Department of Commerce. Office of Publications and published by . This book was released on 1980 with total page 822 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book VLSI Metallization

Download or read book VLSI Metallization written by Norman G. Einspruch and published by Academic Press. This book was released on 2014-12-01 with total page 491 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Electronics Microstructure Science, Volume 15: VLSI Metallization discusses the various issues and problems related to VLSI metallization. It details the available solutions and presents emerging trends. This volume is comprised of 10 chapters. The two introductory chapters, Chapter 1 and 2 serve as general references for the electrical and metallurgical properties of thin conducting films. Subsequent chapters review the various aspects of VLSI metallization. The order of presentation has been chosen to follow the common processing sequence. In Chapter 3, some relevant metal deposition techniques are discussed. Chapter 4 presents the methods of VLSI lithography and etching. Conducting films are first deposited at the gate definition step; therefore, the issues related to gate metallization are discussed next in Chapter 5.In Chapter 6, contact metallization is elaborated, and Chapter 7 is devoted to multilevel metallization schemes. Long-time reliability is the subject of Chapter 8, which discusses the issues of contact and interconnect electromigration. GaAs metallization is tackled in Chapter 9. The volume concludes with a general discussion of the functions of interconnect systems in VLSI. Materials scientists, processing and design engineers, and device physicists will find the book very useful.

Book Monthly Catalogue  United States Public Documents

Download or read book Monthly Catalogue United States Public Documents written by and published by . This book was released on 1980 with total page 1234 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Monthly Catalog of United States Government Publications

Download or read book Monthly Catalog of United States Government Publications written by United States. Superintendent of Documents and published by . This book was released on 1968 with total page 1220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Publications of the National Institute of Standards and Technology     Catalog

Download or read book Publications of the National Institute of Standards and Technology Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1988 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Publications of the National Bureau of Standards     Catalog

Download or read book Publications of the National Bureau of Standards Catalog written by United States. National Bureau of Standards and published by . This book was released on 1980 with total page 686 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Publications

Download or read book Publications written by United States. National Bureau of Standards and published by . This book was released on 1981 with total page 684 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Semiconductor Measurement Technology

Download or read book Semiconductor Measurement Technology written by United States. National Bureau of Standards and published by . This book was released on 1988 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: