Download or read book MEMS Lorentz Force Magnetometers written by Cesare Buffa and published by Springer. This book was released on 2017-07-04 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.

Download or read book The Design and Implementation of Parametrically Amplified Lorentz Force MEMS Magnetometers written by Matthew Julian Thompson and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation has two distinct goals. The first is to fabricate a MEMS Lorentz force navigation magnetometer using the same techniques as gyroscopes and accelerometers allowing for construction of a single chip inertial measurement unit. The second is to determine if parametric amplification has commercial benefits or if it is just an academic curiosity. Previous Lorentz force magnetometers have used non-standard fabrication steps, consume too much power or lack the required sensitivity to be competitive. To increase the sensitivity and the competitiveness of Lorentz force magnetometers, parametric amplification is performed. Three Lorentz force magnetometers were studied. The first was a Z-axis parametrically amplified magnetometer with a 34 nT/rt-Hz, 0.3 degrees/rt-Hz resolution operated in a vacuum. The second was a Z-axis parametrically amplified magnetometer with a resolution of 87 nT/rt-Hz, 0.78 degrees/rt-Hz operated at 1 atm. And the third is a 3-axis magnetometer with a resolution of 2.6 nT/rt-Hz, 0.02 degrees/rt-Hz operated in a vacuum. Parametric amplification was shown to increase the magnetic flux sensitivity up to 82.5-fold and improve the system wide signal to noise ratio of the sensor up to 10-fold.

Download or read book Optically Transduced MEMS Magnetometer written by and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

Download or read book High Sensitivity Magnetometers written by Asaf Grosz and published by Springer. This book was released on 2016-09-20 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers, for the first time, an overview of nearly all of the magnetic sensors that exist today. The book is offering the readers a thorough and comprehensive knowledge from basics to state-of-the-art and is therefore suitable for both beginners and experts. From the more common and popular AMR magnetometers and up to the recently developed NV center magnetometers, each chapter is describing a specific type of sensor and providing all the information that is necessary to understand the magnetometer behavior including theoretical background, noise model, materials, electronics, design and fabrication techniques, etc.

Download or read book Magnetic Field Sensing Using Micromechanical Oscillators written by Soner Sonmezoglu and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Lorentz force magnetic sensors based on micro-electromechanical system (MEMS) resonators, measuring the vector components of the magnetic field, have recently attracted substantial commercial interest in inertial navigation systems (INSs) and compasses for smartphones. Over the last decade, substantial research effort has focused on improving the magnetic field sensitivity and resolution of Lorentz force magnetic sensors relying on either amplitude modulation (AM) or frequency modulation (FM), however, they mostly suffer from narrow bandwidth and low scale factor temperature stability, and their bias instability is poor due to high offset in the sensor output, which precludes their use in INSs and compasses. In this thesis, both AM and FM Lorentz force magnetic sensors are investigated to solve each of the above-mentioned problems, where AM sensors are operated either off-resonance in open-loop or at resonance in closed-loop. The MEMS magnetic sensors studied in this work are based on either a single resonator or dual resonators. The experimental results presented here make the Lorentz force sensor compatible with INSs and navigation-grade compasses. In the first part of this study, a method for improving bandwidth and thermal stability of the scale factor is presented. The method is successfully demonstrated using two nominally-identical, resonator-based AM magnetometers: the first is operated off-resonance in open-loop to measure magnetic field, and the second is operated as a closed-loop oscillator to provide a frequency reference for Lorentz force generation. With the proposed method, the sensor’s temperature sensitivity is reduced by a factor of 24, and a wide bandwidth (38 Hz) that is independent of the sensor’s mechanical bandwidth (3.2 Hz) is achieved. However, it is observed that the open-loop AM sensor operating off-resonance suffers from poor bias instability that is found to be limited by offset-related 1/f (flicker) noise. The root cause of 1/f noise is demonstrated to be 1/f noise on the ac and dc bias voltages applied to the sensor, and the effects of 1/f noise sources on the sensor’s bias instability are explored. To reduce offset-related 1/f noise, an innovative method based on chopping the dc bias voltage applied to the resonator is described. Using the chopping method, the sensor’s bias instability is reduced from 27 nT to 7 nT (the best bias instability reported to date for a resonant MEMS magnetometer). The second part of this study focuses on closed-loop AM operation. A force-rebalanced Lorentz force magnetometer is demonstrated, which is the first demonstration of a three-axis magnetic field sensing oscillator incorporating force-rebalanced operation. The proposed force-rebalanced magnetometer shows significantly superior scale factor stability performance over temperature change and allows larger bandwidth compared to conventional closed-loop magnetometers. However, the force-rebalanced sensor is plagued by offset arising from the electrostatic force used to drive the sensor into resonance. Because the offset is strongly temperature-dependent, the sensor’s bias instability degrades in the presence of temperature variations. This problem is successfully solved by designing a dual-resonator magnetometer, having two identical resonators with opposing axes of field sensitivity. In the last part, sensor operation is demonstrated using quadrature FM (QFM) readout, where the field is measured by monitoring the change in oscillation frequency. It is theoretically and experimentally demonstrated that FM sensors potentially provide wide bandwidth and improved stability over temperature as compared to conventional AM sensors. However, their output stability is still poor due to the temperature dependence of the sensor’s resonant frequency. To solve this problem, a dual-resonator QFM magnetic sensor composed of a matched pair of differentially operated resonators on the same silicon die are developed. Experimental data show that a differential measurement scheme using the dual resonator significantly improves the sensor’s bias instability.

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

Download or read book Lorentz Force Magnetic Sensors written by Mo Li and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation describes micromechanical Lorentz force magnetic sensors for electronic compass applications. Recent development in commercially available MEMS accelerometers and gyroscopes has been focused on the reduction of size, power consumption and cost, which has led to the integration of a 3-axis accelerometer and 3-axis gyroscope on the same chip, known as the 6-axis combo sensor. The growing market of smartphone, tablet and wearable device drives the need for a 9-axis combo sensor, which adds a 3-axis magnetic sensor to the 6-axis combo sensor. However, previous approaches to 9-axis combo sensors have been complicated by two facts: (1) the commercially available magnetic sensors cannot be co-fabricated with MEMS inertial sensors, therefore increasing the size, cost and difficulty of calibration. (2) magnetic material is required for commercially available magnetic sensors, which introduces problems such as hysteresis and limited measurement range. Single-axis, dual-axis and tri-axis Lorentz force magnetic sensors are designed and fabricated using microfabrication processes which are fully-compatible with MEMS accelerometers and gyroscopes. The magnetic sensors are based on micromachined resonators, which use no magnetic materials and can be easily integrated with CMOS electronics. The single structure tri-axis magnetic sensor described in this work demonstrates 0.1° heading accuracy with 1 mW power consumption, which is estimated to be 10X better in SNR compared to existing commercially available compasses. The design trade-offs between size, performance, and cost are also explored. In order to improve stability over temperature and eliminate the need for an external frequency source, both AM and FM readout closed-loop magnetic sensors are investigated. AM readout magnetic sensors can be realized by applying a Lorentz force in-phase with velocity to an electrostatically excited MEMS oscillator. FM magnetometers can be realized either by using the Lorentz force to create axial tension on a MEMS resonator, thereby changing its resonant frequency, or by applying a Lorentz force in quadrature with velocity to an electrostatically excited MEMS oscillator. Analytical and experiment results of all three types of closed-loop magnetic sensors are compared and discussed in detail in terms of their magnetic field sensitivity, bandwidth, resolution, offset, and temperature sensitivity. To further reduce the offset and the drift induced by the electrostatic force, current chopping is investigated. The current chopping technique periodically switches the polarity of the sensitivity of the magnetic sensors, while the offset remains the same. The offset of the sensor is reduced from 25 mT to 31 [mu]T, which is 10 times better than the existing Hall-effect magnetic sensors. The long-term drift is also reduced by 120X.

Download or read book Sensitivity Enhancement of Resonant MEMS Magnetometers Using Internal Thermal piezoresistive Amplification written by Varun Kumar and published by . This book was released on 2014 with total page 100 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work presents, for the first time, sensitivity enhancement of MEMS resonant magnetometers using the thermal-piezoresistive quality factor (Q) amplification effect in silicon microstructures. The design and optimization process of the device are reviewed and the constraints for an industrial MEMS technology (process and fabrication) are mastered. Lorentz force transduction principle and piezoresistive sensing are analyzed with the goal of designing a suspended micro-structure to detect magnetic fields in single axis. An electromechanical model of the magnetic sensor is presented along with the simulation results of the predicted model in MATLAB. Measurements show that the results are in good agreement with the simulated electrical model of the magnetometer.

Download or read book Development of CMOS MEMS NEMS Devices written by Jaume Verd and published by MDPI. This book was released on 2019-06-25 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Download or read book Indoor Location Technologies written by Subrata Goswami and published by Springer Science & Business Media. This book was released on 2012-07-25 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the special challenges posed by accurately pinpointing a location indoors, this volume reflects the distance we have come in the handful of decades since the germination of GPS technology. Not only can we locate a signal to within a meter’s accuracy, but we now have this technology in the most basic mobile phone. Tracing recent practical developments in positioning technology and in the market it supplies, the author examines the contributions of the varied research—in silicon, signal and image processing, radio communications and software—to a fast-evolving field. The book looks forward to a time when, in addition to directing your road journey, positioning systems can peer indoors and guide you to an available photocopier in your office building. Featuring standalone chapters each dealing with a specific aspect of the subject, including treatments of systems such as Zebra, Awarepoint, Aeroscout, IEEE 802.11, etc. This study has all the detail needed to get up to speed on a key modern technology.

Download or read book Mems for Automotive and Aerospace Applications written by Michael Kraft and published by Elsevier. This book was released on 2013-01-02 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (MEMS) in developing solutions to the unique challenges presented by the automotive and aerospace industries. Part one explores MEMS for a variety of automotive applications. The role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems are considered, along with pressure and flow sensors for engine management, and RF MEMS for automotive radar sensors. Part two then goes on to explore MEMS for aerospace applications, including devices for active drag reduction in aerospace applications, inertial navigation and structural health monitoring systems, and thrusters for nano- and pico-satellites. A selection of case studies are used to explore MEMS for harsh environment sensors in aerospace applications, before the book concludes by considering the use of MEMS in space exploration and exploitation. With its distinguished editors and international team of expert contributors, MEMS for automotive and aerospace applications is a key tool for MEMS manufacturers and all scientists, engineers and academics working on MEMS and intelligent systems for transportation. Chapters consider the role of MEMS in a number of automotive applications, including passenger safety and comfort, vehicle stability and control MEMS for aerospace applications are also discussed, including active drag reduction, inertial navigation and structural health monitoring systems Presents a number of case studies exploring MEMS for harsh environment sensors in aerospace

Download or read book MEMS and Microstructures in Aerospace Applications written by Robert Osiander and published by CRC Press. This book was released on 2018-10-03 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.

Download or read book Handbook of Magnetic Materials written by K.H.J. Buschow and published by Elsevier. This book was released on 2009-10-24 with total page 473 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume 18 of the Handbook of Magnetic Materials, as the preceding volumes, has a dual purpose. As a textbook it is intended to help those who wish to be introduced to a given topic in the field of magnetism without the need to read the vast amount of literature published. As a work of reference it is intended for scientists active in magnetism research. To this dual purpose, Volume 18 is composed of topical review articles written by leading authorities. In each of these articles an extensive description is given in graphical as well as in tabular form, much emphasis being placed on the discussion of the experimental material in the framework of physics, chemistry and material science. It provides readers with novel trends and achievements in magnetism. - Composed of topical review articles written by leading authorities - Intended to be of assistance to those who wish to be introduced to a given topic in the field of magnetism - As a work of reference it is intended for scientists active in magnetism research - Provide the readership with novel trends and achievements in magnetism

Download or read book Understanding MEMS written by Luis Castañer and published by John Wiley & Sons. This book was released on 2015-10-06 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.

Download or read book Solid State Sensors Actuators and Microsystems Workshop 2010 written by and published by . This book was released on 2010 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Recent Trends on Electromagnetic Environmental Effects for Aeronautics and Space Applications written by Nikolopoulos, Christos D. and published by IGI Global. This book was released on 2020-11-27 with total page 285 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electromagnetic compatibility and regulatory compliance issues are subjects of great importance in electronics engineering. Avoiding problems regarding an electronic system's operation, while always important, is especially critical in space missions and satellite structures. Many problems can be traced to EM field disturbances as interference from unintended sources and other electromagnetic phenomena. As a result, stringent requirements are to be met in terms of electromagnetic emissions levels. The inclusion of this electromagnetic environment in the design of a multimillion mission can lead to a system that is able to withstand whatever challenge the environment throws at it. Failure to do so may lead to important data corruption or loss, destruction of expensive instruments, waste of resources, and even a total mission failure. Research in this area focuses on the studying of the applications of electromagnetic compatibility and electromagnetic interference in the space industry. Recent Trends on Electromagnetic Environmental Effects for Aeronautics and Space Applications will provide relevant theoretical frameworks and the latest empirical research findings in electromagnetic compatibility and electromagnetic interference (EMC/EMI) for the aerospace industry. This book examines all the necessary information for all matters that can possibly affect the system design of a spacecraft and can be a useful reference to space system engineers and more. While highlighting topics such as artificial intelligence, electromagnetic testing, environmental shielding, and EMC modelling techniques, this book is ideal for professionals, spacecraft designers, science and data processing managers, electrical and mechanical engineers, EMC testing engineers, and researchers working in the aerospace industry along with practitioners, researchers, academicians, and students looking for necessary information for all the matters that can possibly affect the system design of a spacecraft.