Download or read book MEMS Aluminum Nitride Technology for Inertial Sensors written by Gabriele Vigevani and published by . This book was released on 2011 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyroscopes) made of Aluminum Nitride (AlN) is described in this dissertation. The goal of this work is to design and fabricate inertial sensors based on c-axis oriented AlN polycrystalline thin films. AlN is a post-CMOS compatible piezoelectric material widely used for acoustic resonators, such Bulk Acoustic Wave (BAW) and Lamb Wave Resonators (LWR). In this work we develop the design techniques necessary to obtain inertial sensors with AlN thin film technology. Being able to use AlN as structural material for both acoustic wave resonator and sensing elements is key to achieve the three level integration of RF-MEMS components, sensing elements and CMOS in the same chip. Using AlN as integration platform is particularly suitable for large consumer emerging markets where production costs are the major factor that determine a product success. In order to achieve a platform integration, the first part of this work focuses on the fabrication process: starting from the fabrication technology used for LWR devices, this work shows that by slightly modifying some of the fabrication steps it is possible to obtain MEMS accelerometers and gyroscopes with the same structural layers used for LWR. In the second part of this work, an extensive analysis, performed with analytical and Finite Element Models (FEM), is developed for beam and ring based structures. These models are of great importance as they provide tools to understand the physics of lateral piezoelectric beam actuation and the major limitations of this technology. Based on the models developed for beam based resonators, we propose two designs for Double Ended Tuning Fork (DETF) based accelerometers. In the last part of the dissertation, we show the experimental results and the measurements performed on actual devices. As this work shows analytically and experimentally, there are some fundamental constraints that limit the ultimate sensitivity of piezoelectric sensors based on resonating beam structures. Although the limitations of the structures here considered cannot achieve tactical grade sensitivities, this research proves that it is possible to achieve performances close to those required by large consumer electronics. This work proves that AlN based platforms can be a great opportunity for future developments in IMU and in general for MEMS integrated solutions.

Download or read book Ultra thin Aluminum Nitride Films for Flexible MEMS Sensors written by Md Sajeeb Rayhan and published by . This book was released on 2016 with total page 145 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) sensors using ultrathin aluminum nitride (AlN) film were developed and fabricated using conventional photolithography techniques in the class 100 clean room with a view to integrate them in flexible substrates along with flexible electronics. The MEMS sensors were designed, analytically modeled, fabricated and characterized. Some of the MEMS sensors were only designed and simulated using finite element method (FEM) for the scope of the dissertation. These MEMS sensors can be applied to many applications such as automobile, robotics, biomedical, biometrics, health condition monitoring, GPS tracking devices, smartphones and aircrafts. MEMS pressure sensors using AlN based piezoelectric film were designed, fabricated and characterized in the form of array of cantilever based structures. A 300 nm thick ultrathin and flexible AlN film with a feature size of ~12 [micron] which was deposited using DC reactive magnetron sputtering system and sandwiched between two electrodes to induce cantilever shaped structures acted as the sensing element of the cantilever sensors. After fabrication, several cantilevers were chosen for electrical characterization. The pressure sensors were characterized in a probe station system to measure the piezoelectric voltage signals and power spectral densities. With the help of simulation results, numerical modeling was also carried out to find the theoretical output voltage ranges and sensitivity of the cantilevers. The simple and flexible cantilevers form the basis for future piezoelectric energy harvesters, pressure sensors, fingerprint sensors and accelerometers using ultrathin AlN film those can be integrated on a system-on-chip (SoC) circuit. Initially, the ultrathin AlN films were developed by changing the deposition temperature and Ar/N2 gas flow ratio and characterized using SEM, XRD and EDX to analyze the quality of the film. Stress analyses were taken into consideration to check the mechanical strength and reliability of the pressure sensors. In addition, bending performance was also analyzed by calculating the radius of curvature (ROC) of the cantilevers. Finally, noise performance was also analyzed. Ultra-thin AlN based novel flexible MEMS fingerprint sensors were designed using finite element method i.e., CoventorWare® with a view to improve the pixel resolution and, hence, the quality of scanned fingerprint image. Two different sized pixel dimensions were used for the design of three fingerprint sensors; they are: a) FPS725A b) FPS725B, and c) FPS1016. The pixel dimension for FPS725A and FPS725B was 35 [micron] by 35 [micron]. The pixel feature was equivalent to an imaging resolution of 725 dot-perinch (dpi). The other sensor had a pixel size of 25 [micron] by 25 [micron] and was equivalent to an imaging resolution of 1016 dpi. In both type of sensors, 200 nm thick, ultrathin AlN film was used as the sensing element. The difference between FPS725A and FPS725B was the location of the sensing element. In FPS725A, AlN film was deposited on top of Al2O3 diaphragm while in FPS725B, AlN was located inside the diaphragm. The fabrications process flow will be discussed in details in the fingerprint sensor chapter. In brief, the fingerprint sensors were comprised of array of pixels and each pixel was made of a cavity like structure which was basically an aluminum oxide (Al2O3) based structure. Underneath the cavity like structure, there was an adjacent piezoelectric plate or film which was sandwiched between two metal electrodes. The total area of the sensors is identical and considered to be 15 mm by 15 mm for practical use. Piezoelectric output voltage with respect to various applied finger pressure were calculated using the stress contour found from the simulation results. Finally, piezoelectric response for each sensor for different finger pressure was found from the slope of the piezoelectric voltage versus applied force plot. The average piezoelectric responses are found to be 225.74 V/N, 115.58 V/N, and 125.52 V/N for FPS725A, FPS725B, and FPS1016, respectively. Stress analysis and noise performance of the sensors were studied. For practical use, the CMOS readouts will be taken from the Silicon substrate through the electrical metallization of pure metal electrodes which will be covered in the chapter. An AlN based piezoelectric z-axis MEMS accelerometer was designed and simulated using CoventorWare®. Modal harmonic analysis was carried out and the simulated resonant frequency was found to be 2.26 kHz. Various loads were applied on top proof mass of the accelerometer ranging from 1g to 10g. Piezoelectric output voltages due to applied loads were calculated. The voltages ranged from 0.00082 V to 0.000082 V. The piezoelectric response or sensitivity was also calculated and found to be 0.000082 V/N. Noise performances was also analyzed and noise equivalent acceleration (NEA) was calculated. Noise equivalent acceleration was found to be 0.253 g/[square root]Hz.

Download or read book Piezoelectric MEMS written by Ulrich Schmid and published by MDPI. This book was released on 2018-07-10 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Download or read book CMOSET 2013 Vol 2 Materials Interfaces and MEMS Track written by CMOS Emerging Technologies Research and published by CMOS Emerging Technologies. This book was released on 2014-06-23 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presentation slides from the 2013 CMOS Emerging Technologies Research symposium in Whistler, Canada.

Download or read book MEMS and Microstructures in Aerospace Applications written by Robert Osiander and published by CRC Press. This book was released on 2018-10-03 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.

Download or read book Low Power Emerging Wireless Technologies written by Reza Mahmoudi and published by CRC Press. This book was released on 2017-07-12 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced concepts for wireless communications offer a vision of technology that is embedded in our surroundings and practically invisible, but present whenever required. Although the use of deep submicron CMOS processes allows for an unprecedented degree of scaling in digital circuitry, it complicates the implementation and integration of traditional RF circuits. The requirement for long operating life under limited energy supply also poses severe design constraints, particularly in critical applications in commerce, healthcare, and security. These challenges call for innovative design solutions at the circuit and system levels. Low Power Emerging Wireless Technologies addresses the crucial scientific and technological challenges for the realization of fully integrated, highly efficient, and cost-effective solutions for emerging wireless applications. Get Insights from the Experts on Wireless Circuit Design The book features contributions by top international experts in wireless circuit design representing both industry and academia. They explore the state of the art in wireless communication for 3G and 4G cellular networks, millimeter-wave applications, wireless sensor networks, and wireless medical technologies. The emphasis is on low-power wireless applications, RF building blocks for wireless applications, and short-distance and beam steering. Topics covered include new opportunities in body area networks, medical implants, satellite communications, automobile radar detection, and wearable electronics. Exploit the Potential behind Emerging Green Wireless Technologies A must for anyone serious about future wireless technologies, this multidisciplinary book discusses the challenges of emerging power-efficient applications. Written for practicing engineers in the wireless communication field who have some experience in integrated circuits, it is also a valuable resource for graduate students.

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Download or read book Aluminum Nitride Thin Films for MEMS Resonators written by Vanni Lughi and published by . This book was released on 2006 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt: High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (

Download or read book Dynamics of the Structures and Non Destructive Testing written by Moussa Karama and published by Trans Tech Publications Ltd. This book was released on 2011-06-30 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters BCI (WoS). With energy costs increasing, the gains to be made from weight-saving are most significant in the aerospace domain, but such gains are clearly also advantageous for road transport and this is even beginning to be recognised in shipbuilding. Consequently, improved reliability and resistance to degradation and durability in severe environments are always important requirements. Thus the development of composites, nano-composites and refractory alloys having specific properties has become a key factor in industrial and technological progress. Another challenge is the recyclability of advanced materials, as reflected by the emergence of projects involving thermoplastic-matrix composite fuselages. Moreover, the incorporation of biopolymers extracted from diverse raw materials can be an interesting alternative route to attaining the objective of 100% biodegradability. The purpose of these topics is to bring together researchers and specialists from universities and industry who are working on new composites and nano-composites, titanium alloys, etc., as well as structural characterisation using destructive or non-destructive testing, numerical analysis and composite processes.

Download or read book Biomaterials for MEMS written by Mu Chiao and published by CRC Press. This book was released on 2011-03-31 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials.Biomaterials for MEMS highlights importan

Download or read book Nano and Microelectromechanical Systems NEMS and MEMS and Molecular Machines Volume 741 written by Materials Research Society. Meeting and published by . This book was released on 2003-05-27 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book broadens the scope from 'conventional' MEMS to include issues relating to bioMEMS, NEMS, and molecular machines and the interfaces between these fields. Although originally based in silicon microelectronics technology, the reach of NEMS and MEMS is now extending to new materials such as diamond, metals and polymers, with various fabrication techniques. New materials and applications envisioned for NEMS and MEMS introduce a number of processing and packaging issues, such as biocompatibility. They also provide potential to study in situ thin-film properties with extraordinary resolution. Properly designed structures fabricated alongside NEMS and MEMS structures and integrated with advanced metrology methods provide unprecedented resolution for measuring material property. The book improves understanding of materials behavior and device issues at the micro-, nano- and molecular scale as well as the behavior and interface between micro-, nano- and molecular devices. Topics include: micro- and nanofluids; nanotechnology and molecular machines; mechanical properties and characterization; alternative micro- and nanofabrication techniques; and surface engineering issues in MEMS structures and devices.

Download or read book System level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

Download or read book Position Navigation and Timing Technologies in the 21st Century written by Y. Jade Morton and published by John Wiley & Sons. This book was released on 2021-01-13 with total page 902 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers the latest developments in PNT technologies, including integrated satellite navigation, sensor systems, and civil applications Featuring sixty-four chapters that are divided into six parts, this two-volume work provides comprehensive coverage of the state-of-the-art in satellite-based position, navigation, and timing (PNT) technologies and civilian applications. It also examines alternative navigation technologies based on other signals-of-opportunity and sensors and offers a comprehensive treatment on integrated PNT systems for consumer and commercial applications. Volume 1 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications contains three parts and focuses on the satellite navigation systems, technologies, and engineering and scientific applications. It starts with a historical perspective of GPS development and other related PNT development. Current global and regional navigation satellite systems (GNSS and RNSS), their inter-operability, signal quality monitoring, satellite orbit and time synchronization, and ground- and satellite-based augmentation systems are examined. Recent progresses in satellite navigation receiver technologies and challenges for operations in multipath-rich urban environment, in handling spoofing and interference, and in ensuring PNT integrity are addressed. A section on satellite navigation for engineering and scientific applications finishes off the volume. Volume 2 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications consists of three parts and addresses PNT using alternative signals and sensors and integrated PNT technologies for consumer and commercial applications. It looks at PNT using various radio signals-of-opportunity, atomic clock, optical, laser, magnetic field, celestial, MEMS and inertial sensors, as well as the concept of navigation from Low-Earth Orbiting (LEO) satellites. GNSS-INS integration, neuroscience of navigation, and animal navigation are also covered. The volume finishes off with a collection of work on contemporary PNT applications such as survey and mobile mapping, precision agriculture, wearable systems, automated driving, train control, commercial unmanned aircraft systems, aviation, and navigation in the unique Arctic environment. In addition, this text: Serves as a complete reference and handbook for professionals and students interested in the broad range of PNT subjects Includes chapters that focus on the latest developments in GNSS and other navigation sensors, techniques, and applications Illustrates interconnecting relationships between various types of technologies in order to assure more protected, tough, and accurate PNT Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications will appeal to all industry professionals, researchers, and academics involved with the science, engineering, and applications of position, navigation, and timing technologies. pnt21book.com

Download or read book Sandia s Aluminum Nitride MEMS Program written by and published by . This book was released on 2016 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Local Residual Stress Monitoring of Aluminum Nitride MEMS Using UV Micro Raman Spectroscopy written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Localized stress variation in aluminum nitride (AlN) sputtered on patterned metallization has been monitored through the use of UV micro-Raman spectroscopy. This technique utilizing 325 nm laser excitation allows detection of the AlN E2(high) phonon mode in the presence of metal electrodes beneath the AlN layer with a high spatial resolution of less than 400 nm. The AlN film stress shifted 400 MPa from regions where AlN was deposited over a bottom metal electrode versus silicon dioxide. Thus, across wafer stress variations were also investigated showing that wafer level stress metrology, for example using wafer curvature measurements, introduces large uncertainties for predicting the impact of AlN residual stress on the device performance.

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.