Download or read book Mechanical Analysis of a Micromachined Vibratory Thin Plate Gyroscope written by Xinnan Wang and published by . This book was released on 2003 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Mechanical Analysis and Design of Vibratory Micromachined Gyroscopes written by Wyatt Owen Davis and published by . This book was released on 2001 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Download or read book Analysis of Mechanical Drift Error in the JPL UCLA Micromachined Vibratory Gyroscope written by Indrani Chakraborty and published by . This book was released on 1996 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Cylindrical Vibratory Gyroscope written by Xuezhong Wu and published by Springer Nature. This book was released on 2021-06-19 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Download or read book Mechanical Design Dynamics and Control of Micro Vibratory Gyroscopes written by Seyed Parsa Taheri Tehrani and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-machined vibratory gyroscopes are very small devices (up to a few millimeters in dimension) that work based on Coriolis force coupling between two resonance modes. The small size, low power consumption, and cheap price make these sensors popular in automotive, gaming, smart phones, and robotics industries. These sensors referred to as MEMS (microelectromechanical system) gyroscopes are currently not used for navigation applications because due to their miniature size and imperfections in fabrication methods they do not have enough accuracy. In this thesis, we present methods in design and control algorithms for MEMS vibratory gyroscopes to cancel the effect of imperfections in fabrication and improve gyroscopes' performance. First chapter of this thesis is an introduction on MEMS vibratory gyroscopes and their principles and standard operations modes.The second chapter presents the structural design and analysis of a single-structure 3-axis MEMS gyroscope. The gyroscope has four resonant modes of interest and uses a decoupling mechanism whereby auxiliary masses are used to actuate the drive mode of the gyroscope in order to reduce drive-force coupling to sense modes' motion (one of the sources of errors in MEMS gyroscopes). The use of auxiliary masses results in a two degree-of-freedom (DOF) mechanism of the drive mode. To compare the effectiveness of using auxiliary masses two gyroscope types has been design one actuated from auxiliary masses (type A) and one actuated from major masses (type B). The two designs are simulated analytically to study the displacement of each mass in each design while comparing the force required to achieve that displacement for drive mode. Experimental data from fabricated devices show how using auxiliary masses will decrease drive force coupling and as a result improve the gyroscope's performance. Third chapter describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f) dependence. Experiments are conducted using an epitaxially-encapsulated 2 x 2 mm2 quad-mass gyroscope (QMG) with a quality factor of 85,000. The device exhibits third-order Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (26 V), these third-order nonlinearities cancel and the amplitude-frequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. While the bias instability is nearly independent of the drive-mode’s nonlinearity, we find that ARW increases when the third-order nonlinearities are minimized, and the decrease in ARW due to increase of amplitude is independent of drive mode's type of nonlinearity.In the fourth chapter we present a direct angle measurement method in gyroscopes. Towards the objective of direct angle measurement using a rate integrating gyroscope (RIG) without a minimum rate threshold and performance limited only by electrical and mechanical thermal noise, in this chapter we present the implementation of a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetry (anisoelasticity) on a stand-alone digital signal processing (DSP) platform. Using the new method, the precession angle dependent bias error and minimum rate threshold, two issues identified by Lynch for a MEMS RIG due to anisodamping are overcome. To minimize angle dependent bias, we augment the electronic feedback force of the amplitude regulator with a non-unity gain output distribution matrix selected to correct for anisodamping. Using this method, we have decreased the angle dependent bias error by a factor of 30, resulting a minimum rate threshold of 2.5 dps. To further improve RIG performance, an electronically-induced self-precession rate is incorporated and successfully demonstrated to lower the rate threshold.

Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Download or read book Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and published by Springer. This book was released on 2015-08-12 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.

Download or read book Micromachined Vibratory Rate Gyroscopes written by William Albert Clark and published by . This book was released on 1997 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Allgemeine Bekanntmachung der geschehenen Errichtung des Kgl Hannoverschen Guelphen Ordens written by and published by . This book was released on 1815 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Vibratory Gyroscopes Based on Micro Electro Mechanical and non Micro Electro Mechanical Systems written by Valeri V. Chikovani and published by Cambridge Scholars Publishing. This book was released on 2023-12-15 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.

Download or read book A High Aspect ratio High performance Polysilicon Vibrating Ring Gyroscope written by Farrokh Ayazi and published by . This book was released on 2000 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Micromachined Gyroscope with Integrated Electronics written by Per Bo Ljung and published by . This book was released on 1997 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book MEMS written by Vikas Choudhary and published by CRC Press. This book was released on 2017-12-19 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Download or read book Practical MEMS written by Ville Kaajakari and published by . This book was released on 2009 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.