Download or read book Measurement and Control of Stress in Sputtered Tungsten Thin Films written by Xiaoqin Che and published by . This book was released on 2004 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Film Materials written by L. B. Freund and published by Cambridge University Press. This book was released on 2004-01-08 with total page 772 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film mechanical behavior and stress presents a technological challenge for materials scientists, physicists and engineers. This book provides a comprehensive coverage of the major issues and topics dealing with stress, defect formation, surface evolution and allied effects in thin film materials. Physical phenomena are examined from the continuum down to the sub-microscopic length scales, with the connections between the structure of the material and its behavior described. Theoretical concepts are underpinned by discussions on experimental methodology and observations. Fundamental scientific concepts are embedded through sample calculations, a broad range of case studies with practical applications, thorough referencing, and end of chapter problems. With solutions to problems available on-line, this book will be essential for graduate courses on thin films and the classic reference for researchers in the field.
Download or read book Oxidation of Tungsten written by Vincent David Barth and published by . This book was released on 1961 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: The report presents a detailed review of available information on the oxidation of W and its alloys. W is relatively inert below 700 C. As the temperature is increased above this level, however, oxidation becomes progressively more rapid, reaching catastrophic rates at temperatures around 1200 C and above. Various theories for the mechanism and rates of W oxidation at different temperatures are reviewed, and the effect of pressure and water vapor on the stability of W oxides is discussed in detail. The elevatedtemperature reactions of W with other materials, such as refractory oxides, and with gases other than oxygen also are covered. Information on the protection of W by alloying and coating is included. (Author).
Download or read book The Effect of Deposition Pressure on Stress in Sputtered Molybdenum Thin Films written by Scott Sheppard and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is known that deposition parameters such as pressure, geometry, and deposition device affect the state of stress in a thin film (Thornton and Hoffman). We decided to find the stress vs. deposition pressure curve for a sputtered metal thin film. All other deposition variables remained the same for each film deposited. We looked at measuring the stress incurred in the thin film by x-ray diffraction and geometrical techniques. Measuring this stress dependence on pressure for sputtered thin films has been done for many metals already. It has been found that at low sputter pressures the stress tends to be compressive. As the sputter pressure is increased the stress gradually approaches the critical pressure. i.e, the pressure at which the thin film has zero stress. The stress then becomes tensile as the pressure is increased beyond the critical pressure. The tensile stress will peak at a certain pressure and eventually level off at a low tensile stress as the pressure is increased further. We are attempting to find this curve for a metal this hasn't been done for yet. A new technique for measuring the stress by geometrical optics is also being tested by comparing the results to x-ray stress measurements.
Download or read book Sputtered Tungsten Films written by Gregory Zazzara and published by . This book was released on 1997 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Master s Theses Directories written by and published by . This book was released on 2004 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Education, arts and social sciences, natural and technical sciences in the United States and Canada".
Download or read book Physics of Nonmetallic Thin Films written by C. H. S. Dupuy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: For several years now the intense development in the field of microelectronics, the interest in coating materials, and activity in integrated optics have produced many advances in the field of thin solid filmg~ The research activity has become so intensive and so broad that it is necessary to divide the field into metallic and non metallic thin films. A summer school in the area of non metallic thin films appeared to be a very fruitful concept and, hence, in October, 1973, A.S.l.M.S. made a proposal to N.A.T.O to hold this second summer school in Corsica in September 1974. The basic idea behind this summer school was essentially to stress and synthesize physical properties and structure of non metallic thin films. The main reason for this was the feeling that many laboratories are very specialized and that few engage in both physical and structural analysis of these films. The program included a large section on' physical studies: electrical (transport, interface effects, switching), mechanical and optical. There was also a large section o~characterization, crystal structure, chemical composition (stoichiometry is always a difficult problem), bonding and electronic structure.
Download or read book Metals Abstracts written by and published by . This book was released on 1998 with total page 1042 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Micromachining of Molybdenum and Tungsten Silicide Thin Films written by Muh-Ling Ger and published by . This book was released on 1994 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1973 with total page 1102 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book STAR written by and published by . This book was released on 1964 with total page 1964 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Sputtered Thin Films written by Frederick Madaraka Mwema and published by CRC Press. This book was released on 2021-04-12 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sputtered Thin Films: Theory and Fractal Descriptions provides an overview of sputtered thin films and demystifies the concept of fractal theory in analysis of sputtered thin films. It simplifies the use of fractal tools in studying the growth and properties of thin films during sputtering processes. Part 1 of the book describes the basics and theory of thin film sputtering and fractals. Part 2 consists of examples illustrating specific descriptions of thin films using fractal methods. Discusses thin film growth, structure, and properties Covers fractal theory Presents methods of fractal measurements Offers typical examples of fractal descriptions of thin films grown via magnetron sputtering processes Describes application of fractal theory in prediction of thin film growth and properties This reference book is aimed at engineers and scientists working across a variety of disciplines including materials science and metallurgy as well as mechanical, manufacturing, electrical, and biomedical engineering.
Download or read book Mechanical Behavior of Materials and Structures in Microelectronics Volume 226 written by Ephraim Suhir and published by . This book was released on 1991 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book An Investigation Into the Fundamental Phase and Orientation Properties of Sputtered Tungsten and Tantalum Thin Films written by Jing-Yi Huang and published by . This book was released on 2003 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Properties of Reactive Sputtered Tungsten Oxide Thin Films written by Charles Wangati and published by . This book was released on 2018-10-20 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Bell Laboratories Talks and Papers written by Bell Telephone Laboratories. Libraries and Information Systems Center and published by . This book was released on 1976 with total page 940 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book BTL Talks and Papers written by Bell Telephone Laboratories, inc. Technical Information Libraries and published by . This book was released on 1976 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:
