Download or read book Materials Science of Microelectromechanical Systems MEMS Devices IV written by Arturo A. Ayón and published by Cambridge University Press. This book was released on 2014-06-05 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices IV Volume 687 written by Arturo A. Ayón and published by . This book was released on 2002-05-23 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices IV written by and published by . This book was released on 2002 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices III written by Harold Kahn and published by Cambridge University Press. This book was released on 2014-06-05 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices written by and published by . This book was released on 2001 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Organic and Polymeric Materials and Devices Optical Electrical and Optoelectronic Properties Volume 725 written by Materials Research Society. Meeting and published by . This book was released on 2002-10-22 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Defect and Impurity Engineered Semiconductors and Devices III Volume 719 written by S. Ashok and published by . This book was released on 2002-08-09 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the deliberate introduction and manipulation of defects and impurities in order to engineer desired properties in semiconductor materials and devices. In view of current exciting developments in wide-bandgap semiconductors like GaN for blue light emission, as well as high-speed and high-temperature electronics, dopant and defect issues relevant to these materials are addressed. Also featured are semiconductor nanocavities and nano-structures, with emphasis on the formation and impact of vacancy-type defects. Defect reaction problems pertaining to impurity gettering, precipitation and hydrogen passivation are specific examples of defect engineering that improve the electronic quality of the material. A number of papers also deal with characterization techniques needed to study and to identify defects in materials and device structures. Finally, papers also address issues such as interface control and passivation, application of ion implantation, plasma treatment and rapid thermal processing for creating/activating/suppressing trap levels, and device applications.
Download or read book Molecularly Imprinted Materials sensors and Other Devices written by Kenneth J. Shea and published by . This book was released on 2002 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the proceedings of two symposia held at the 2002 MRS Spring Meeting in San Francisco. Molecular imprinting (MI) technology has attracted much attention and enjoyed tremendous development over the past decade. MI technology enables the preparation of materials with host sites that recognize specific guest molecules, analogous to the "lock-and-key" paradigm of antibodies and enzymes. Advantages of molecularly imprinted materials include: a degree of specificity approaching that of antibodies but with much greater temporal and thermal stability; rapid development because precise molecular design and chemical synthesis are unnecessary; and wide applicability because materials may be imprinted with almost any shape-persistent analyte of interest. Papers from Symposium M, "Molecularly Imprinted Materials, focus primarily on the fabrication of functional materials and devices based on MI materials. Studies are presented not only by experts in MI, but more importantly, by materials scientists integrating molecular imprinting with cutting-edge techniques in microfabrication and nanotechnology.
Download or read book Defect and Impurity Engineered Semiconductors and Devices written by and published by . This book was released on 2002 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advanced Structural Materials written by Winston O. Soboyejo and published by CRC Press. This book was released on 2006-12-21 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: A snapshot of the central ideas used to control fracture properties of engineered structural metallic materials, Advanced Structural Materials: Properties, Design Optimization, and Applications illustrates the critical role that advanced structural metallic materials play in aerospace, biomedical, automotive, sporting goods, and other indust
Download or read book Organic Inorganic Hybrid Materials 2002 Volume 726 written by Clément J. Sanchez and published by . This book was released on 2002-10-08 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Design Fabrication and Testing of Silicon Microneedle based Microfabricated Biomedical Devices written by Erik Vivek Mukerjee and published by . This book was released on 2003 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Functional Nanostructured Materials Through Multiscale Assembly and Novel Patterning Techniques Volume 728 written by Materials Research Society. Meeting and published by . This book was released on 2002-11-11 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Materials Science of Microelectromechanical Systems MEMS Devices II Volume 605 written by Maarten De Boer and published by Mrs Proceedings. This book was released on 2000-10-02 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Materials for Energy Storage Generation and Transport Volume 730 written by Ricardo B. Schwarz and published by . This book was released on 2002-11-27 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Silicon Materials Processing Characterization and Reliability Volume 716 written by Janice L. Veteran and published by . This book was released on 2002-10-11 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Nickel iron Plating in High aspect ratio Silicon Molds for Microconnector Component Fabrication written by Helen Ann Holder and published by . This book was released on 2003 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:
