Download or read book Lateral Field Excitation Film Bulk Acoustic Wave Resonator Using Interdigitated Electrodes written by Kuok Chun Lou and published by . This book was released on 1998 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Lateral field excitation Film Bulk Acoustic Wave Resonator for High Frequency Wireless Communications written by Woo Wai Lau and published by . This book was released on 1996 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Download or read book Resonator of Bulk acoustic Wave Generated by Lateral Field in ZnO Film written by Yonghua Song and published by . This book was released on 1995 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.

Download or read book Quantitative Determination of Lateral Mode Dispersion in Film Bulk Acoustic Resonators Through Laser Acoustic Imaging written by John D. Larson III. and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Film Bulk Acoustic Resonators are useful for many signal processing applications. Detailed knowledge of their operation properties are needed to optimize their design for specific applications. The finite size of these resonators precludes their use in single acoustic modes; rather, multiple wave modes, such as, lateral wave modes are always excited concurrently. In order to determine the contributions of these modes, we have been using a newly developed full-field laser acoustic imaging approach to directly measure their amplitude and phase throughout the resonator. This paper describes new results comparing modeling of both elastic and piezoelectric effects in the active material with imaging measurement of all excited modes. Fourier transformation of the acoustic amplitude and phase displacement images provides a quantitative determination of excited mode amplitude and wavenumber at any frequency. Images combined at several frequencies form a direct visualization of lateral mode excitation and dispersion for the device under test allowing mode identification and comparison with predicted operational properties. Discussion and analysis are presented for modes near the first longitudinal thickness resonance (~900 MHz) in an AlN thin film resonator. Plate wave modeling, taking account of material crystalline orientation, elastic and piezoelectric properties and overlayer metallic films, will be discussed in relation to direct image measurements.

Download or read book Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator Project Supported by the National Natural Science Foundation of China Nos 61274119 61306141 61335008 and the Natural Science Foundation of Jiangsu Province No BK20131099 written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.

Download or read book Fundamentals of Microfabrication and Nanotechnology Three Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1992 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Download or read book Surface Acoustic Wave Devices in Telecommunications written by Ken-Ya Hashimoto and published by Springer Science & Business Media. This book was released on 2000-06-21 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.

Download or read book Thin Film Bulk Acoustic Wave Devices written by Tuomas Pensala and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.

Download or read book Fundamentals and Applications of Acoustic Metamaterials written by Vicente Romero-Garcia and published by John Wiley & Sons. This book was released on 2019-09-11 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the last few decades, metamaterials have revolutionized the ways in which waves are controlled, and applied in physics and practical situations. The extraordinary properties of metamaterials, such as their locally resonant structure with deep subwavelength band gaps and their ranges of frequency where propagation is impossible, have opened the way to a host of applications that were previously unavailable. Acoustic metamaterials have been able to replace traditional treatments in several sectors, due to their better performance in targeted and tunable frequency ranges with strongly reduced dimensions. This is a training book composed of nine chapters written by experts in the field, giving a broad overview of acoustic metamaterials and their uses. The book is divided into three parts, covering the state-of-the-art, the fundamentals and the real-life applications of acoustic metamaterials.

Download or read book From MEMS to Bio MEMS and Bio NEMS written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology

Download or read book Analysis of Shear horizontal Vibrations of Crystal Plates for Acoustic Wave Resonators and Sensors written by Bo Liu and published by . This book was released on 2010 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this work, theoretical analysis of shear-horizontal vibrations of crystal plates under lateral electric field excitation (LFE) without and with a fluid layer is presented. A crystal plate with separated electrodes under thickness electric field excitation (TFE) in contact with a fluid layer is also analyzed.

Download or read book Surface Acoustic Wave Devices written by Supriyo Datta and published by Prentice Hall. This book was released on 1986 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Microscale Acoustofluidics written by Thomas Laurell and published by Royal Society of Chemistry. This book was released on 2014-12-08 with total page 593 pages. Available in PDF, EPUB and Kindle. Book excerpt: The manipulation of cells and microparticles within microfluidic systems using external forces is valuable for many microscale analytical and bioanalytical applications. Acoustofluidics is the ultrasound-based external forcing of microparticles with microfluidic systems. It has gained much interest because it allows for the simple label-free separation of microparticles based on their mechanical properties without affecting the microparticles themselves. Microscale Acoustofluidics provides an introduction to the field providing the background to the fundamental physics including chapters on governing equations in microfluidics and perturbation theory and ultrasound resonances, acoustic radiation force on small particles, continuum mechanics for ultrasonic particle manipulation, and piezoelectricity and application to the excitation of acoustic fields for ultrasonic particle manipulation. The book also provides information on the design and characterization of ultrasonic particle manipulation devices as well as applications in acoustic trapping and immunoassays. Written by leading experts in the field, the book will appeal to postgraduate students and researchers interested in microfluidics and lab-on-a-chip applications.

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.