Download or read book Laser Techniques in the Extreme Ultraviolet written by Seymour Edwin Harris and published by . This book was released on 1984 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Techniques in Extreme Ultraviolet written by Stephen Ernest Harris and published by American Institute of Physics. This book was released on 1984 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser Techniques for Extreme Ultraviolet written by Thomas J. McIlrath and published by American Institute of Physics. This book was released on 1982 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Download or read book Soft X Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Download or read book Ultraviolet Spectroscopy And Uv Lasers written by Prabhakar Misra and published by CRC Press. This book was released on 2002-02-25 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a complete and thorough examination of advances in the instrumentation, evaluation, and implementation of UV technology for reliable and efficient data acquisition and analysis. It provides real-world applications in expanding fields such as chemical physics, plasma science, photolithography, laser spectroscopy, astronomy and atmospheric science.
Download or read book X Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2016 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: Master the physics and understand the current applications of modern X-ray and EUV sources with this fully updated second edition.
Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Download or read book Ultraviolet Laser Technology and Applications written by David L. Elliott and published by Academic Press. This book was released on 2014-06-28 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields. The text enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers. Those in laser fields (including medical, electronics, and semiconductors), students, engineers, technicians, as well as newcomers to the subject who require a basic introduction to the topic, will all find Ultraviolet Laser Technology and Applications to be an essential resource. Serves as a valuable, practical reference to UV laser technology Presents detailed technical data and techniques Offers highly illustrated optics designs and beam delivery systems Includes an extensive bibliography, references, and glossary Covers all major UV laser markets and technology systems
Download or read book Excimer Laser Technology written by Dirk Basting and published by Springer Science & Business Media. This book was released on 2005-04-21 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
Download or read book Physics of New Laser Sources written by Neal B. Abraham and published by Springer. This book was released on 2013-12-19 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the lectures and seminars presented at the NATO Advanced Study Institute on "Physics of New Laser Sources", the twelfth course of the Europhysics School of Quantum Electronics, held under the supervision of the Quantum Electronics Division of the European Physical Society. The Institute was held at Centro "I Cappuccini" San Miniato, Tuscany, July 11-21, 1984. The Europhysics School of Quantum Electronics was started in 1970 with the aim of providing instruction for young researchers and advanced students already engaged in the area of quantum electronics or for those wishing to switch into this area after working previously in other areas. From the outset, the School has been under the direction of Prof. F. T. Arecchi, then at the University of Pavia, now at the University of Florence, and Dr. D. Roess of Heraeus, Hanau. In 1981, Prof. H. Walther, University of Munich and Max-Planck Institut fur Quantenoptik joined as co-director. Each year the Directors choose a subj~ct of particular interest, alternating fundamental topics with technological ones, and ask colleagues specifically competent in the chosen areas to take the scientific responsibility for that course.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1995 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nanoscale Photonic Imaging written by Tim Salditt and published by Springer Nature. This book was released on 2020-06-09 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book, edited and authored by a team of world-leading researchers, provides a broad overview of advanced photonic methods for nanoscale visualization, as well as describing a range of fascinating in-depth studies. Introductory chapters cover the most relevant physics and basic methods that young researchers need to master in order to work effectively in the field of nanoscale photonic imaging, from physical first principles, to instrumentation, to mathematical foundations of imaging and data analysis. Subsequent chapters demonstrate how these cutting edge methods are applied to a variety of systems, including complex fluids and biomolecular systems, for visualizing their structure and dynamics, in space and on timescales extending over many orders of magnitude down to the femtosecond range. Progress in nanoscale photonic imaging in Göttingen has been the sum total of more than a decade of work by a wide range of scientists and mathematicians across disciplines, working together in a vibrant collaboration of a kind rarely matched. This volume presents the highlights of their research achievements and serves as a record of the unique and remarkable constellation of contributors, as well as looking ahead at the future prospects in this field. It will serve not only as a useful reference for experienced researchers but also as a valuable point of entry for newcomers.
Download or read book Tunable Lasers written by Jonathan C. White and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever since the invention of the laser itself, the spectroscopist has dreamed of lasers that could be tuned continuously over whatever set of resonances he wished to study. Two developments of the mid-1960s - the optical paramet ric oscillator and the dye laser - were the first to begin to fulfill that dream. The cw dye laser, with its ability to produce extremely narrow linewidths, was particularly successful and revitalized the study of atomic physics. Other, complementary developments soon followed. These included the excimer, color center, and high pressure gas lasers, as well as Raman shifting and four wave mixing techniques for further extending the tuning ranges of such primary tunable laser sources. By the end of the 1970s, continuously or quasi-continuously tunable coherent sources were thus available for the visible and the near infrared, and a good part of the ultraviolet and the far infrared. Despite the existence of a number of excellent treatises on individual tech nologies, to the best of our knowledge, no one has yet attempted to survey the entire field of tunable lasers in a single volume. The purpose of this book is to fill that void. It is particularly aimed at those who are not necessarily laser ex perts, but who may wish to discover quickly and with a minimum of effort the best technology to satisfy a particular problem, and what the possibilities and limitations of that technology are.
Download or read book Encyclopedia of Modern Optics written by Bob D. Guenther and published by Academic Press. This book was released on 2018-02-14 with total page 2253 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Encyclopedia of Modern Optics, Second Edition, Five Volume Set provides a wide-ranging overview of the field, comprising authoritative reference articles for undergraduate and postgraduate students and those researching outside their area of expertise. Topics covered include classical and quantum optics, lasers, optical fibers and optical fiber systems, optical materials and light-emitting diodes (LEDs). Articles cover all subfields of optical physics and engineering, such as electro-optical design of modulators and detectors. This update contains contributions from international experts who discuss topics such as nano-photonics and plasmonics, optical interconnects, photonic crystals and 2D materials, such as graphene or holy fibers. Other topics of note include solar energy, high efficiency LED’s and their use in illumination, orbital angular momentum, quantum optics and information, metamaterials and transformation optics, high power fiber and UV fiber lasers, random lasers and bio-imaging. Addresses recent developments in the field and integrates concepts from fundamental physics with applications for manufacturing and engineering/design Provides a broad and interdisciplinary coverage of specialist areas Ensures that the material is appropriate for new researchers and those working in a new sub-field, as well as those in industry Thematically arranged and alphabetically indexed, with cross-references added to facilitate ease-of-use
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Introduction to Laser Technology written by C. Breck Hitz and published by John Wiley & Sons. This book was released on 2012-04-02 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: The only introductory text on the market today that explains the underlying physics and engineering applicable to all lasers Although lasers are becoming increasingly important in our high-tech environment, many of the technicians and engineers who install, operate, and maintain them have had little, if any, formal training in the field of electro-optics. This can result in less efficient usage of these important tools. Introduction to Laser Technology, Fourth Edition provides readers with a good understanding of what a laser is and what it can and cannot do. The book explains what types of laser to use for different purposes and how a laser can be modified to improve its performance in a given application. With a unique combination of clarity and technical depth, the book explains the characteristics and important applications of commercial lasers worldwide and discusses light and optics, the fundamental elements of lasers, and laser modification.? In addition to new chapter-end problems, the Fourth Edition includes new and expanded chapter material on: Material and wavelength Diode Laser Arrays Quantum-cascade lasers Fiber lasers Thin-disk and slab lasers Ultrafast fiber lasers Raman lasers Quasi-phase matching Optically pumped semiconductor lasers Introduction to Laser Technology, Fourth Edition is an excellent book for students, technicians, engineers, and other professionals seeking a fuller, more formal introduction to the field of laser technology.
