Download or read book Laser and Particle beam Chemical Processing for Microelectronics written by Daniel J. Ehrlich and published by . This book was released on 1988 with total page 763 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Laser and Particle Beam Chemical Processing for Microelectronics written by Daniel J. Ehrlich and published by Cambridge University Press. This book was released on 2014-06-05 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Laser and Particle Beam Chemical Processes on Surfaces Volume 129 written by and published by . This book was released on 1989 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Materials Research Society held their symposium 'Laser & Particle-Beam Chemical Processes on Surfaces' in Boston, Massachusetts on November 28 - December 3, 1988. Parts I thru X of this report discuss the following research topics: Overview of Laser- and Beam-Induced Surface Processes; Laser-Induced Deposition of Metal Films; Laser-Induced Writing of Metal Lines; Laser-Induced Deposition of Semiconductors; Laser-Induced Chemical Etching; Laser-Induced Surface Ablation; Laser-Induced Surface Modification; Ion-, Electron-, and Plasma-Assisted Chemistry; and Integrated Circuits Fabricated Technology. (JG).
Download or read book Beam Processing and Laser Chemistry written by I.W. Boyd and published by Elsevier. This book was released on 1990-02-01 with total page 482 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume discusses both the practical and theoretical aspects of energy beam materials processing. It highlights the recent advances in the use of beams and incoherent light sources to enhance or modify chemical processes at solid surfaces. Special attention is given to the latest developments in the use of ion, electron and photon beams, and on laser-assisted process chemistry. Thin film and surface and interface reactions as well as bulk phase transformations are discussed. Practical technological details and the criteria for present and future applications are also reviewed. The papers collected in this volume reflect the continuing strong interest and variety of development in this field.
Download or read book Laser and Particle Beam Chemical Processes on Surfaces Volume 129 written by A. Wayne Johnson and published by Mrs Proceedings. This book was released on 1989-11-20 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Laser Chemical Processing for Microelectronics written by K. G. Ibbs and published by . This book was released on 1989-01 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nine expert contributors describe the application of laser processing techniques in the fabrication of semiconductor materials & devices for the microelectronics industry. This book comprises a carefully edited collection of specially written reviews by leading figures in all aspects of this important area of high technology. This subject matter should interest anyone involved with a semiconductor fabrication facility or a development laboratory with an interest in modern advances in processing technology, especially those people working in the larger electrical & electronics companies. In addition, it will be of value to university groups in engineering & physics departments involved in laser processing of materials, & of subsidiary interest to microfilm technologists working in optics fabrication.
Download or read book Theory and Application of Laser Chemical Vapor Deposition written by J. Mazumder and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Download or read book Polymer Surfaces and Interfaces Characterization Modification and Application written by Kash L. Mittal and published by CRC Press. This book was released on 2023-01-06 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polymeric materials are used for a legion of applications in a wide array of technological areas, and their proper surface/interface characteristics are of cardinal importance for their applications. Therefore, the need to characterize polymer surfaces/interfaces and their suitable modification to impart desired characteristics is quite patent. This book chronicles the proceedings of the Symposium on Polymer Surfaces and Interfaces: Characterization, Modification and Application held as a part of the Society of Plastics Engineers Annual Technical Conference, Boston, May 7--11, 1995. The articles in this book address many aspects of polymer surfaces and interfaces. Topics covered include: various ways (chemical, photochemical, laser, flame, corona) to modify polymer surfaces; modification of contact lens surfaces; various ways to analyze/characterize polymer surfaces; metal/polymer interfaces; metal/polyimide adhesion; metal/self-assembled organic monolayer interfaces; polymer alignment layers for liquid crystals; alignment of liquid crystal surfaces; polyimide alignment layers; molecular re-orientation of polymer surfaces; plasma polymerized organic coatings; epoxy/fiber interphase; epoxy underfill materials for packaging integrated circuits; transport in polymers; polymer miscibility; and cell adhesion.
Download or read book Surface Processing and Laser Assisted Chemistry written by E. Fogarassy and published by Elsevier. This book was released on 1990-12-01 with total page 495 pages. Available in PDF, EPUB and Kindle. Book excerpt: The papers in this volume cover all aspects of laser assisted surface processing ranging from the preparation of high-Tc superconducting layer structures to industrial laser applications for device fabrication. The topics presented give recent results in organometallic chemistry and laser photochemistry, and novel surface characterization techniques. The ability to control the surface morphology by digital deposition and etching shows one of the future directions for exciting applications of laser surface processing, some of which may apply UV and VUV excitation. The understanding of elementary proceses is essential for the design of novel deposition methods, with diamond CVD being an outstanding example. The high quality of these contributions once again demonstrates that the E-MRS is an efficient forum for interaction between research workers and industry.
Download or read book Laser Microfabrication written by Daniel J. Ehrlich and published by Elsevier. This book was released on 1989-06-21 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2002-04-30 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2011-09-02 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Download or read book Laser and Particle Beam Chemical Process on Surfaces written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microlithography High Integration In Microelectronics Proceedings Of The First Workshop written by Vitor Baranauskas and published by World Scientific. This book was released on 1990-05-01 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is a collection of classical and recent empirical studies of currency options and their implications for issues of exchange rate economics, such as exchange rate risk premium, volatility, market expectations, and credibility of exchange rate regimes. It contains applications on how to extract useful information from option market data for financial forecasting policy purposes. The subjects are discussed in a self-contained, user-friendly format, with introductory chapters on currency option theory and currency option markets.The book can be used as supplementary reading for graduate finance and international economics courses, as training material for central bank and regulatory authorities, or as a reference book for financial analysts.
Download or read book Laser Applications in Physical Chemistry written by D.K. Evans and published by CRC Press. This book was released on 2020-11-26 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an introduction on applications of lasers in Chemistry. It describes laser as a tool for chemistry, the consideration involved in describing a laser beam and what happens to beam as it is propagated through a gas. The book is useful for graduates and advanced undergraduates.
Download or read book The Chemistry of Metal CVD written by Toivo T. Kodas and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.
Download or read book Photon Beam and Plasma Assisted Processing written by E.F. Krimmel and published by Elsevier. This book was released on 1989-02-01 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt: This symposium attracted 82 papers which were presented orally or as posters. Fourteen invited speakers presented state of the art reviews and aspects of future key topics in this increasingly important area of materials science. The high level of scientific presentation during the conference enhanced the aim of the symposium, which was to stimulate discussion amongst materials scientists, chemists, engineers and physicists with a common interest in this field and to disseminate knowledge of progress.
