Download or read book Interactions of Plasma Generated Species on Porous Dielectric Thin Films written by Joe Lee and published by . This book was released on 2013 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low pressure plasma processing is used extensively in the semiconductor industry for modern technology. As a result, the understanding of plasma/material interactions is very important to the improvement and design of materials and treatment methods. This dissertation focuses on the understanding of interactions between individual plasma species and materials that are used in the fabrication of the interconnect in semiconductor devices, namely porous low-k dielectrics. Proper insulation of the metal lines in the interconnect relies on maintaining the integrity of the insulator's dielectric properties. As the features of the interconnect are shifting to smaller dimensions, techniques used to implement lower dielectric permittivity have also lowered the material's resistance to plasma-induced damage. As a result, plasma processing of these materials have become a major challenge for future advances in interconnect technology. This study examines specific species generated from typical plasma discharges and their effect on porous low-k materials. The first part of this dissertation studies the mechanism for photon-induced effects and demonstrates the influence of emission wavelength on carbon removal from carbon-doped oxide films. VUV photons emitted from the plasma were observed to break Si-C bonds. However, oxidizing gas species must be present in the background to cause carbon removal. Depending on gas chemistry, VUV photons of different wavelengths are emitted, which affects the depth of the damage penetration into the film. Shorter wavelength emissions are absorbed by the SiO2-like damage layer that is produced after carbon extraction, thereby preventing further removal of carbon. The dissertation continues by examining the effects of photons and radicals individually by isolating the species to obtain separate exposures. By doing so, radicals and photons generated from O2 plasma were observed to remove carbon in different ways, creating different carbon profiles as a function of depth. 130 nm wavelength photons are fairly transparent through the material, leading to a gradual removal of carbon throughout the modification depth. In contrast, oxygen radicals are diffusion-limited, leading to removal of carbon occurring as a front. Modeling of damage effects by these species was performed in each case, and good predictions of their behavior were obtained. However, direct plasma exposures were observed to behave differently, exhibiting much less carbon removal than predicted by the model. Further experimentation found evidence that synergy between photon and radical species led to an effective decrease in the diffusivity of the modified material, reducing subsequent plasma damage. Through fundamental study of plasma/material interactions, the role of photons and radicals in plasma-induced damage has been determined. As a result, treatment methods to reduce plasma damage based on inhibiting these species can be designed. These include plasma filtration techniques, densification by ion bombardment, and the use of plasmas with reducing chemistries. While the scope of this research has focused on interactions with dielectric thin films, these approaches to plasma interactions are relevant to other processes that rely on plasma processing.
Download or read book Thin Films On Silicon Electronic And Photonic Applications written by Vijay Narayanan and published by World Scientific. This book was released on 2016-08-15 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.
Download or read book Plasma Science and Technology written by Haikel Jelassi and published by BoD – Books on Demand. This book was released on 2019-02-27 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Usually called the "fourth state of matter," plasmas make up more than 99% of known material. In usual terminology, this term generally refers to partially or totally ionized gas and covers a large number of topics with very different characteristics and behaviors. Over the last few decades, the physics and engineering of plasmas was experiencing a renewed interest, essentially born of a series of important applications such as thin-layer deposition, surface treatment, isotopic separation, integrated circuit etchings, medicine, etc. Plasma Science
Download or read book Plasma Interactions on Organosilicate Glass Dielectric Films and Emerging Amorphous Materials written by Haseeb Kazi and published by . This book was released on 2015 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2007 with total page 960 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Supercritical Fluid Cleaning written by Samuel P. Sawan and published by Elsevier. This book was released on 1998-12-31 with total page 307 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although supercritial fluid (SCF) technology is now widely used in extraction and purification processes (in the petrochemical, food and pharmaceuticals industries), this book is the first to address the new application of cleaning. The objective is to provide a roadmap for readers who want to know whether SCF technology can meet their own processing and cleaning needs. It is particularly helpful to those striving to balance the requirements for a clean product and a clean environment. The interdisciplinary subject matter will appeal to scientists and engineers in all specialties ranging from materials and polymer sciences to chemistry and physics. It is also useful to those developing new processes for other applications, and references given at the end of each chapter provide links to the wider body of SCF literature. The book is organized with topics progressing from the fundamental nature of the supercritical state, through process conditions and materials interactions, to economic considerations. Practical examples are included to show how the technology has been successfully applied. The first four chapters consider principles governing SCF processing, detailing issues such as solubility, design for cleanability, and the dynamics of particle removal. The next three chapters discuss surfactants and microemulsions, SCF interaction with polymers, and the use of supercritical carbon dioxide (CO2) as a cleaning solvent. The closing chapters focus on more practical considerations such as scaleup, equipment costs, and financial analysis.
Download or read book Plasma Modification of Polyolefins written by N. S. Baneesh and published by Springer Nature. This book was released on 2021-11-22 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses plasma modification of polyolefin surfaces. It comprises 21 chapters divided into three major sections. The first section covers the different techniques used for plasma modification of polyolefin surfaces and the effects of various gases as a surrounding medium, while the second provides a detailed analysis of the physics and chemistry of plasma modification and discusses various innovative characterization techniques, as well as ageing of the modified surface. It focuses on the analysis of changes in polymers’ surface chemistry using various spectroscopic techniques, and of changes in their surface morphology after plasma treatment using optical microscopy, electron microscopy and atomic force microscopy. In addition, it provides detailed information on the characterization of modified polymer surfaces. The book’s third and last section covers a range of applications of plasma-modified polyolefin surfaces varying from the packaging industry to the biomedical field, and shares valuable insights on the lifecycle analysis of plasma modification and modified surfaces.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.
Download or read book Atmospheric Pressure Plasma written by Anton Nikiforov and published by BoD – Books on Demand. This book was released on 2019-04-24 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma as the fourth state of matter is an ionized gas consisting of both negative and positive ions, electrons, neutral atoms, radicals, and photons. In the last few decades, atmospheric-pressure plasmas have started to attract increasing attention from both scientists and industry due to a variety of potential applications. Because of increasing interest in the topic, the focus of this book is on providing engineers and scientists with a fundamental understanding of the physical and chemical properties of different atmospheric-pressure plasmas via plasma diagnostic techniques and their applications. The book has been organized into two parts. Part I focuses on the latest achievements in advanced diagnostics of different atmospheric-pressure plasmas. Part II deals with applications of different atmospheric-pressure plasmas.
Download or read book Plasma Medicine written by Alexander Fridman and published by John Wiley & Sons. This book was released on 2012-12-19 with total page 629 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive text is suitable for researchers and graduate students of a ‘hot’ new topic in medical physics. Written by the world’s leading experts, this book aims to present recent developments in plasma medicine, both technological and scientific, reviewed in a fashion accessible to the highly interdisciplinary audience consisting of doctors, physicists, biologists, chemists and other scientists, university students and professors, engineers and medical practitioners. The book focuses on major topics and covers the physics required to develop novel plasma discharges relevant for medical applications, the medicine to apply the technology not only in-vitro but also in-vivo testing and the biology to understand complicated bio-chemical processes involved in plasma interaction with living tissues.
Download or read book Advanced Interconnects for ULSI Technology written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2012-02-17 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.
Download or read book Memoirs of the Faculty of Engineering Osaka City University written by Ōsaka Shiritsu Daigaku. Kōgakubu and published by . This book was released on 2014 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CO2 Capture Utilization and Sequestration Strategies written by Yatish T. Shah and published by CRC Press. This book was released on 2021-11-11 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering practical treatment strategies for CO2 emission generated from various energy-related sources, CO2 Capture, Utilization, and Sequestration Strategies emphasizes carbon capture, utilization, and sequestration (CCUS) with special focus on methods for each component of the strategy. While other books mostly focus on CCS strategy for CO2, this book details the technologies available for utilization of CO2, showing how it can be a valuable renewable source for chemicals, materials, fuels, and power instead of a waste material damaging the environment. Highlights current and potential future commercially viable CCUS strategies Discusses applications for direct and the more complex indirect utilization of CO2 streams Examines viability of the mineral carbonation process and biological treatments to convert CO2 into useful biochemicals, biomaterials, and biofuels Explores heterogeneous catalysis for thermal and electrochemical conversion and solar energy-based thermal, photo-thermal, and photocatalytic conversion of CO2 Presents the rapidly growing concept of plasma-activated catalysis for CO2 conversion CO2 Capture, Utilization, and Sequestration Strategies is a valuable reference for researchers in academia, industry, and government organizations seeking a guide to effective CCUS processes, technologies, and applications.
Download or read book Materials Science Engineering written by and published by . This book was released on 2000 with total page 906 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Download or read book Encyclopedia of Plasma Technology Two Volume Set written by J. Leon Shohet and published by CRC Press. This book was released on 2016-12-12 with total page 1654 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
