Download or read book Integrated Optical Interferometric Sensors on Silicon and Silicon CMOS written by Mikkel Andrey Thomas and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of this research is to fabricate and characterize an optically integrated interferometric sensor on standard silicon and silicon CMOS circuitry. An optical sensor system of this nature would provide the high sensitivity and immunity to electromagnetic interference found in interferometric based sensors in a lightweight, compact package capable of being deployed in a multitude of situations inappropriate for standard sensor configurations. There are several challenges involved in implementing this system. These include the development of a suitable optical emitter for the sensor system, the interface between the various optically embedded components, and the compatibility of the Si CMOS with heterogeneous integration techniques. The research reported outlines a process for integrating an integrated sensor on Si CMOS circuitry using CMOS compatible materials, integration techniques, and emitter components.

Download or read book Integrated Optics Microstructures and Sensors written by Massood Tabib-Azar and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the mechanical, electrical, magnetic, and optical properties of materials by advanced fabrication methods (Le. ; Molecular Beam Epitaxy and Metal-Organic Chemical Vapor Deposition) has become the new paradigm in our research era. Sensors, being the most vital part of the electronic data processing and decision making machines, stand to gain the most from engineering of the properties of materials. Microfabrication technology has already contributed significantly to the batch fabrication of micro-sensors with higher over all qualities compared to their counterparts that are fabricated using other methods. Batch fabrication of micro-sensors i) results in more uniform properties of co-fabricated devices, ii) nearly eliminates the need for characterization of individual sensors, and iii) eliminates a need for laborious alignment procedures. A less obvious benefit of using microfabrication methods is the possibility of precise control over the dimensions of the sensor. This control enables engineering of some of the properties of the material which affect the sensor's operation. There are many examples of this in the literature. Optical sensors are known to have superior properties over their counterparts that use other (i. e. ; electrostatic and magnetic) means of detection. To name a few, these advantages are: i) immunity to electromagnetic interferences, ii) higher sensitivities compared to the other types of sensors, iii) simplicity of operation principles, and iv) simplicity of overall construction.

Download or read book Optical Guided wave Chemical and Biosensors I written by Mohammed Zourob and published by Springer Science & Business Media. This book was released on 2010-03-18 with total page 241 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the first time, distinguished scientists from key institutions worldwide provide a comprehensive approach to optical sensing techniques employing the phenomenon of guided wave propagation for chemical and biosensors. This includes both state-of the-art fundamentals and innovative applications of these techniques. The authors present a deep analysis of their particular subjects in a way to address the needs of novice researchers such as graduate students and post-doctoral scholars as well as of established researchers seeking new avenues. Researchers and practitioners who need a solid foundation or reference will find this work invaluable. This first of two volumes contains eight chapters covering planar waveguides for sensing, as well as sensing techniques based on plasmonic waveguides.

Download or read book Integrated Optical Interferometers with Micromachined Diaphragms for Pressure Sensing written by National Aeronautics and Space Administration (NASA) and published by Createspace Independent Publishing Platform. This book was released on 2018-07-25 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical pressure sensors have been fabricated which use an integrated optical channel waveguide that is part of an interferometer to measure the pressure-induced strain in a micromachined silicon diaphragm. A silicon substrate is etched from the back of the wafer leaving a rectangular diaphragm. On the opposite side of the wafer, ring resonator and Mach-Zehnder interferometers are formed with optical channel waveguides made from a low pressure chemical vapor deposited film of silicon oxynitride. The interferometer's phase is altered by pressure-induced stress in a channel segment positioned over the long edge of the diaphragm. The phase change in the ring resonator is monitored using a link-insensitive swept frequency laser diode, while in the Mach-Zehnder it is determined using a broad band super luminescent diode with subsequent wavelength separation. The ring resonator was found to be highly temperature sensitive, while the Mach-Zehnder, which had a smaller optical path length difference, was proportionally less so. The quasi-TM mode was more sensitive to pressure, in accord with calculations. Waveguide and sensor theory, sensitivity calculations, a fabrication sequence, and experimental results are presented. DeBrabander, Gregory N. and Boyd, Joseph T. Glenn Research Center NASA CR-202535, NAS 1.26:202535 NAG3-852...

Download or read book Principles of Bacterial Detection Biosensors Recognition Receptors and Microsystems written by Mohammed Zourob and published by Springer Science & Business Media. This book was released on 2008-09-03 with total page 980 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Bacterial Detection: Biosensors, Recognition Receptors and Microsystems will cover the up-to-date biosensor technologies used for the detection of bacteria. Written by the world's most renowned and learned scientists each in their own area of expertise, Principles of Bacterial Detection: Biosensors, Recognition Receptors and Microsystems is the first title to cover this expanding research field.

Download or read book Integrated optical sensors on the Si N organic hybrid SiNOH platform written by Kohler, Daria and published by KIT Scientific Publishing. This book was released on 2023-03-09 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ein wellenleiterbasierter Sensorchip wird demonstriert, der für Point-of-Care-Anwendungen geeignet ist. Der Biosensor wird mit Hilfe eines mathematischen Modells entworfen, mit dem die Sensitivität der Wellenleiter untersucht wird. Für die Lichteinkopplung in die Wellenleiter wird erstmalig eine neue Klasse von integrierten Laserquellen für sichtbare Wellenlängen untersucht. Die Funktionsfähigkeit des wellenleiterbasierten Biosensorchips durch Detektionsexperimente erfolgreich nachgewiesen. - A waveguide-based sensor chip is demonstrated that is suitable for point-of-care applications. The biosensor is designed using a mathematical model to investigate the sensitivity of the waveguides. A new class of integrated laser sources for visible wavelengths is being investigated for the first time for light coupling into the waveguides. The functionality of the waveguide-based biosensor chip is successfully demonstrated by detection experiments.

Download or read book Photonic Integration and Photonics Electronics Convergence on Silicon Platform written by Koji Yamada and published by Frontiers Media SA. This book was released on 2015-11-10 with total page 111 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon photonics technology, which has the DNA of silicon electronics technology, promises to provide a compact photonic integration platform with high integration density, mass-producibility, and excellent cost performance. This technology has been used to develop and to integrate various photonic functions on silicon substrate. Moreover, photonics-electronics convergence based on silicon substrate is now being pursued. Thanks to these features, silicon photonics will have the potential to be a superior technology used in the construction of energy-efficient cost-effective apparatuses for various applications, such as communications, information processing, and sensing. Considering the material characteristics of silicon and difficulties in microfabrication technology, however, silicon by itself is not necessarily an ideal material. For example, silicon is not suitable for light emitting devices because it is an indirect transition material. The resolution and dynamic range of silicon-based interference devices, such as wavelength filters, are significantly limited by fabrication errors in microfabrication processes. For further performance improvement, therefore, various assisting materials, such as indium-phosphide, silicon-nitride, germanium-tin, are now being imported into silicon photonics by using various heterogeneous integration technologies, such as low-temperature film deposition and wafer/die bonding. These assisting materials and heterogeneous integration technologies would also expand the application field of silicon photonics technology. Fortunately, silicon photonics technology has superior flexibility and robustness for heterogeneous integration. Moreover, along with photonic functions, silicon photonics technology has an ability of integration of electronic functions. In other words, we are on the verge of obtaining an ultimate technology that can integrate all photonic and electronic functions on a single Si chip. This e-Book aims at covering recent developments of the silicon photonic platform and novel functionalities with heterogeneous material integrations on this platform.

Download or read book Selected Papers on Silica Integrated Optical Circuits written by Herman M. Presby and published by SPIE-International Society for Optical Engineering. This book was released on 1996 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contents of this text include: integrated optics; silicon nitride films on silicon for optical waveguides; new technology for reduction in cost and size of silica guided-wave component; and silicon based fibre pigtailed 1x16 power splitter.

Download or read book Conference on Lasers and Electro optics written by and published by . This book was released on 2004 with total page 1700 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Photonic Integrated Circuits for Compact High Resolution Imaging and High Capacity Communication Utility written by Tiehui Su and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: “Integrated photonics” refers to the integration of multiple photonic components on a common substrate. Examples of photonic components include waveguides, gratings, couplers, polarizers, interferometers, beam splitters, light sources, and detectors. In turn, these components can then be used as building blocks to realize more complex planar photonic circuits, capable of performing a wide range of functions with applications in optical sensors and communication systems. The development of integrated photonics is the confluence of waveguide technology and photonic disciplines, which deals with the control of light by electrons and vice versa. The optical waveguide technology is the fundamental of integrated photonics which enables light guiding, coupling, splitting, multiplexing and demultiplexing of optical signals. In the first three chapters of this dissertation, we will discuss the main characteristics of integrated photonics and show relevant aspects of material and fabrication technologies. We will also briefly describe some basic components used in integrated photonics, emphasizing the difference in their design concepts in contrast to conventional bulk optics. Some examples of photonic integrated circuits (PICs) are presented to highlight photonic integration as an elegant solution to realizing multifunctional chip-scale module. Chapter 4 discusses the arrayed waveguide grating (AWG) as another example of PIC. The AWGs are widely used as optical (de)multiplexers in wavelength division multiplexer (WDM) systems. These devices are capable of multiplexing a large number of wavelength channels into a single optical fiber, thereby increasing the aggregate transmission capacity of the single-mode fiber. We will explain the working principle of AWG devices, and then address several design techniques. Eventually, we will demonstrate a large channel spacing AWG (an 18 channel 3.3 THz channel spacing AWG centered around 1310 nm) and a high channel count AWG (a 512 channel 25 GHz channel spacing AWG centered around 1550 nm). Chapter 5 investigates the use of PICs in interferometric imaging. In astronomy, optical interferometric imaging is a technique that brings the light of many telescopes together to create images with high angular resolution. While these interferomic telescopes based on PICs achieve the same spatial resolution as the conventional telescopes, they offer much more compact and robust platforms. This chapter further proposes and demonstrates a small-scale interferometric imager based on PIC technology. The PIC interferometer has the potential to become an alternative to conventional telescope interferometer, but with significantly reduced size, weight and power consumption. Chapter 6 discusses the use of PICs in orbital angular momentum (OAM) communication system. OAM can be understood as characterizing the “twist” of a helical phase front of the light beam. A set of OAM mode forms an orthogonal modal basis set that can be used in a mode-division-multiplexing system, which increases the capacity of optical communication in addition to WDM and polarization division multiplexing (PDM) techniques. This chapter demonstrates the first silicon PIC that is capable of demultiplexing free-space optical beams with multiple OAM states near 1550 nm into the single-mode waveguides. The device is easily connected to high-speed telecommunication components like modulators and photodetectors and is comparable with the CMOS silicon fabrication process. Chapter 7 summarizes this dissertation and projects possible future research directions.

Download or read book Computational Photonic Sensors written by Mohamed Farhat O. Hameed and published by Springer. This book was released on 2018-06-13 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive overview of the photonic sensing field by covering plasmonics, photonic crystal, and SOI techniques from theory to real sensing applications. A literature review of ultra-sensitive photonic sensors, including their design and application in industry, makes this a self-contained and comprehensive resource for different types of sensors, with high value to the biosensor sector in particular. The book is organized into four parts: Part I covers the basic theory of wave propagation, basic principles of sensing, surface plasmon resonance, and silicon photonics; Part II details the computational modeling techniques for the analysis and prediction of photonic sensors; Part III and Part IV cover the various mechanisms and light matter interaction scenarios behind the design of photonic sensors including photonic crystal fiber sensors and SOI sensors. This book is appropriate for academics and researchers specializing in photonic sensors; graduate students in the early and intermediate stages working in the areas of photonics, sensors, biophysics, and biomedical engineering; and to biomedical, environmental, and chemical engineers.

Download or read book Dual Mode Electro photonic Silicon Biosensors written by José Juan Colás and published by Springer. This book was released on 2017-07-18 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: This highly interdisciplinary thesis reports on two innovative photonic biosensors that combine multiple simultaneous measurements to provide unique insights into the activity and structure of surface immobilized biological molecules. In addition, it presents a new silicon photonic biosensor that exploits two cascaded resonant sensors to provide two independent measurements of a biological layer immobilized on the surface. By combining these two measurements, it is possible to unambiguously quantify the density and thickness of the molecular layer; here, the approach’s ability to study molecular conformation and conformational changes in real time is demonstrated. The electrophotonic biosensor integrates silicon photonics with electrochemistry into a single technology. This multi-modal biosensor provides a number of unique capabilities that extend the functionality of conventional silicon photonics. For example, by combining the complementary information revealed by simultaneous electrochemical and photonic measurements, it is possible to provide unique insights into on-surface electrochemical processes. Furthermore, the ability to create electrochemical reactions directly on the silicon surface provides a novel approach for engineering the chemical functionality of the photonic sensors. The electrophotonic biosensor thus represents a critical advance towards the development of very high-density photonic sensor arrays for multiplexed diagnostics.

Download or read book An Integrated Heterodyne Interferometer with On chip Detectors and Modulators written by David Bernard Cole and published by . This book was released on 2015 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of CMOS processing techniques developed in the microelectronics world to that of silicon photonics has been the catalyst for the rapid proliferation of smaller, higher performance, and more densely integrated photonic devices that are rapidly advancing the field with large-scale implementations of photonic systems. It is only logical that as the silicon photonics library continues to grow, that these devices will be synthesized into complete systems for applications including optical networking and communications, imaging, and sensors. Among complex optical systems, the interferometer represents perhaps the most important class of optical sensors and scientific instruments ever developed. Today, interferometric techniques are key to applications such as displacement measurement, photolithography, vibrometry, optical coherence tomography (OCT), and LIDAR. In these applications, the preferred mode is the heterodyne interferometer. However, modern heterodyne interferometers are complex systems requiring bulk optical devices to be implemented. As a result, they are large and expensive precision instruments limited to industrial and scientific applications. The development of a chip-scale integrated interferometer, with its significantly smaller form factor, increased stability, and lower cost, could greatly expand the application of interferometric techniques. Leveraging silicon photonics, the required components can be realized on-chip, allowing for a low-cost, high-precision interferometer to be implemented. In this thesis, the design and experimental results of the first silicon chip-scale heterodyne interferometer is presented. The device is constructed of a series of on-chip beam-splitters, modulators, and germanium detectors in a Michelson-like configuration. The interferometer achieves a noise-limited position resolution of approximately 2 nm in a 1 mm by 6 mm footprint. The vibrometer and LIDAR modes; two modalities with important scientific, industrial, and consumer applications, are also demonstrated.

Download or read book Micro optical Technologies for Measurement Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications written by Olivier M. Parriaux and published by SPIE-International Society for Optical Engineering. This book was released on 1997 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book High Performance Silicon Imaging written by Daniel Durini and published by Woodhead Publishing. This book was released on 2014-05-14 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Performance Silicon Imaging covers the fundamentals of silicon image sensors, with a focus on existing performance issues and potential solutions. The book considers several applications for the technology as well. Silicon imaging is a fast growing area of the semiconductor industry. Its use in cell phone cameras is already well established, and emerging applications include web, security, automotive, and digital cinema cameras. Part one begins with a review of the fundamental principles of photosensing and the operational principles of silicon image sensors. It then focuses in on charged coupled device (CCD) image sensors and complementary metal oxide semiconductor (CMOS) image sensors. The performance issues considered include image quality, sensitivity, data transfer rate, system level integration, rate of power consumption, and the potential for 3D imaging. Part two then discusses how CMOS technology can be used in a range of areas, including in mobile devices, image sensors for automotive applications, sensors for several forms of scientific imaging, and sensors for medical applications. High Performance Silicon Imaging is an excellent resource for both academics and engineers working in the optics, photonics, semiconductor, and electronics industries.

Download or read book A Highly Sensitive Integrable Multimode Evanescent wave Chem bio Sensor written by Jeffrey J. Lillie and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A fully integrated optical chem/bio sensor complete with integrated source, chemically sensitive waveguide, detector arrays, and associated signal processing electronics on a Si-CMOS chip is a challenging, but highly desirable goal. An evanescent-wave multimode interferometric sensing element is a sensitive method for sensing, which is easily integrated on Si-CMOS. This work is concerned with the design, analysis, and demonstration of a planar multimode interferometric chem/bio sensor that is compatible with the fabrication constraints of Si-CMOS. A 4000-micron-long interferometric that can be adapted for different agents by a particular sensing layer has been fabricated on silicon using silicon dioxide and silicon oxynitride. Hexaflouro-isopropanol substituted polynorbornene is the sensing layer. This sensor has also been fabricated on a Si-CMOS circuit with embedded photodetectors. A sensor on silicon was demonstrated with a minimum detectable index change of 2.0x10-6 using an accurate gas delivery system and a custom hermetic waveguide test chamber. A modal pattern analysis strategy has also been developed to extract the optimal SNR from the measured modal patterns. An understanding of the noise processes and spatial bandwidth effects has enabled an experimentally-based prediction of the index sensitivity of a fully integrated multimode chem/bio sensor on Si-CMOS at 9.2 x10-7. Theoretically, the sensitivity enhancement of high over low index sensing layers and transverse-magnetic over transverse electric modes is described. Also, the sensitivity enhancement of higher-order-transverse modes has been quantified. The wide-angle beam propagation method has been used to simulate the sensor. This simulation showed the relation between the modal pattern repetition period and sensor sensitivity. Further, the modal coupling properties of the multimode y-junction have been described. A second multimode y-junction has been designed to change the modal excitation under the SL, and thus the sensitivity. The chemo-optic response of the "substituted polynorbornene" polymer., hexaflouro-isopropanol substituted polynorbornene to methanol, water, iso-propanol, and benzene has been measured. Also, its thermo-optic response has been measured. Athermal interferometric chem/bio sensors have then been suggested.

Download or read book Integrated Optics and Photonics for Optical Interferometric Sensing written by Marco Chiarini and published by . This book was released on 2019 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated optics (IO) microsystems, based on guided wave and photonics structures, can find interesting developments for optical interferometric analysis in sensing applications. In fact, IO interferometric microsystems can act as transducers of the information carried on by an optical signal and originated along the signal optical path. In addition, the application of Integrated Optics and Photonics techniques, allow producing very small size and reduced power consumption instrumentation. These features explain the reason why the IO microsystems for interferometric analytics know an increasing interest in many areas such as Astrophysics, Environment, Biosciences, Space and Earth Exploration, Safety and Security. This chapter starts by synthetically describing the basics of the main analytical techniques covered by IO micro-devices. A discussion of the integrated micro-device fabrication procedures, with an analysis of the implied performance limitations, follows. Finally, a description of new generation optical interferometric microsystems, applied to different scientific and technical areas, completes the chapter.