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Book Growth and Characterization of III V Nitride Thin Films

Download or read book Growth and Characterization of III V Nitride Thin Films written by Zlatko Sitar and published by . This book was released on 1990 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Plasma Assisted Atomic Layer Deposition of III Nitride Thin Films

Download or read book Plasma Assisted Atomic Layer Deposition of III Nitride Thin Films written by Çağla Özgit-Akgün and published by LAP Lambert Academic Publishing. This book was released on 2014-03 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: III-nitride compound semiconductors (AlN, GaN, InN) and their alloys have emerged as versatile and high-performance materials for a wide range of electronic and optoelectronic device applications. Although high quality III-nitride thin films can be grown at high temperatures (>1000 C) with significant rates, deposition of these films on temperature-sensitive device layers and substrates necessitates the adaptation of low-temperature methods such as atomic layer deposition (ALD). When compared to other low-temperature thin film deposition techniques, ALD stands out with its self-limiting growth mechanism, which enables the deposition of highly uniform and conformal thin films with sub-angstrom thickness control. These unique characteristics make ALD a powerful method especially for depositing films on nanostructured templates, as well as preparing alloy thin films with well-defined compositions. This monograph reports on the development of low-temperature ( 200 C) plasma-assisted ALD processes for III-nitrides, and presents detailed characterization results for the deposited thin films and fabricated nanostructures."

Book Growth and Characterization of Nitride Thin Films on Semiconductor Surfaces and Characterization of Nitrogen Containing Insulating Layers

Download or read book Growth and Characterization of Nitride Thin Films on Semiconductor Surfaces and Characterization of Nitrogen Containing Insulating Layers written by Elizabeth Ann Apen and published by . This book was released on 1994 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Growth and Characterization of II IV Semiconductor Thin Films

Download or read book The Growth and Characterization of II IV Semiconductor Thin Films written by Anthony Michael Patterson and published by . This book was released on 1984 with total page 1681 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III V Buffer Layer Applications

Download or read book Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III V Buffer Layer Applications written by and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Zirconium nitride (ZrN) thin films were deposited by reactive dc magnetron sputtering to assess the effects of processing conditions upon film properties. Processing conditions and parameters were optimized to generate films of completely oriented (111) ZrN on silicon to be used as buffer layers for the growth of gallium nitride A single and double Langmuir probe were used to determine trends in electron temperature, ion density, ionization fraction, and floating potential during reactive sputtering of zirconium in argon and nitrogen. Reactive gas concentration, deposition pressure, deposition temperature, cathode current, film thickness and substrate orientation were investigated as variable processing conditions. Four-point probe, scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman spectroscopy, and x-ray diffraction (XRD) were used to characterize thin films produced. The optimum growth conditions for the (111) oriented growth of ZrN, for this work, were found to occur during reactive magnetron sputtering at a deposition temperature of 500 & deg;C, a constant cathode current of 0.5 ampere, a deposition pressure of 15 mTorr, a reactive nitrogen gas concentration of 4% in argon, deposited on (111) oriented silicon, with a thickness on the order of 600 nanometers. Gallium nitride was then deposited on films of ZrN to assess the crystallinity of films produced. The lattice mismatch between (111) oriented ZrN and c-axis oriented GaN was calculated at 1.6%. Microscopic evaluation showed the films to be of columnar structure with dense grains and smooth surfaces. A change in preferred orientation was noticed as a function of increasing film thickness and cathode current and was determined to be due to an increase in ion channeling and bombardment energy.

Book Photo enhanced and Normal Growth of III V Nitride Thin Films

Download or read book Photo enhanced and Normal Growth of III V Nitride Thin Films written by Michael J. Paisley and published by . This book was released on 1992 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book III V Nitride Semiconductors

Download or read book III V Nitride Semiconductors written by Edward T. Yu and published by CRC Press. This book was released on 2022-10-30 with total page 718 pages. Available in PDF, EPUB and Kindle. Book excerpt: The concepts in this book will provide a comprehensive overview of the current state for a broad range of nitride semiconductor devices, as well as a detailed introduction to selected materials and processing issues of general relevance for these applications. This compilation is very timely given the level of interest and the current stage of research in nitride semiconductor materials and device applications. This volume consists of chapters written by a number of leading researchers in nitride materials and device technology addressing Ohmic and Schottky contacts, AIGalnN multiple quantum well laser diodes, nitride vertical cavity emitting lasers, and ultraviolet photodetectors. This unique volume provides a comprehensive review and introduction to application and devices based on GaN and related compounds for newcomers to the field and stimulus to further advances for experienced researchers.

Book The Growth and Characterization of II VI Semiconductor Thin Films

Download or read book The Growth and Characterization of II VI Semiconductor Thin Films written by A. M. Patterson and published by . This book was released on 1984 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III V Buffer Layer Applications

Download or read book Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III V Buffer Layer Applications written by David Ross McGregor and published by . This book was released on 2002 with total page 81 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: thin films, sputtering, zirconium nitride.

Book Characterization of the Growth of Aluminum Nitride and Gallium Nitride Thin Films on Hydrogen Etched And or Cleaned 6H SiC 0001  Surfaces

Download or read book Characterization of the Growth of Aluminum Nitride and Gallium Nitride Thin Films on Hydrogen Etched And or Cleaned 6H SiC 0001 Surfaces written by Jeffrey David Hartman and published by . This book was released on 2000 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: 6H-SiC, Hydrogen etching, Aluminum nitride, Gallium nitride, Photo-electron emission microscopy, Chemical vapor deposition, Molecular beam epitaxy.

Book Optoelectronic Devices

Download or read book Optoelectronic Devices written by M Razeghi and published by Elsevier. This book was released on 2004 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tremendous progress has been made in the last few years in the growth, doping and processing technologies of the wide bandgap semiconductors. As a result, this class of materials now holds significant promis for semiconductor electronics in a broad range of applications. The principal driver for the current revival of interest in III-V Nitrides is their potential use in high power, high temperature, high frequency and optical devices resistant to radiation damage. This book provides a wide number of optoelectronic applications of III-V nitrides and covers the entire process from growth to devices and applications making it essential reading for those working in the semiconductors or microelectronics. Broad review of optoelectronic applications of III-V nitrides

Book Proceedings of the Second Symposium on III V Nitride Materials and Processes

Download or read book Proceedings of the Second Symposium on III V Nitride Materials and Processes written by C. R. Abernathy and published by The Electrochemical Society. This book was released on 1998 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Handbook of Crystal Growth

Download or read book Handbook of Crystal Growth written by Tom Kuech and published by Elsevier. This book was released on 2014-11-02 with total page 1384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume IIIA Basic Techniques Handbook of Crystal Growth, Second Edition Volume IIIA (Basic Techniques), edited by chemical and biological engineering expert Thomas F. Kuech, presents the underpinning science and technology associated with epitaxial growth as well as highlighting many of the chief and burgeoning areas for epitaxial growth. Volume IIIA focuses on major growth techniques which are used both in the scientific investigation of crystal growth processes and commercial development of advanced epitaxial structures. Techniques based on vacuum deposition, vapor phase epitaxy, and liquid and solid phase epitaxy are presented along with new techniques for the development of three-dimensional nano-and micro-structures. Volume IIIB Materials, Processes, and Technology Handbook of Crystal Growth, Second Edition Volume IIIB (Materials, Processes, and Technology), edited by chemical and biological engineering expert Thomas F. Kuech, describes both specific techniques for epitaxial growth as well as an array of materials-specific growth processes. The volume begins by presenting variations on epitaxial growth process where the kinetic processes are used to develop new types of materials at low temperatures. Optical and physical characterizations of epitaxial films are discussed for both in situ and exit to characterization of epitaxial materials. The remainder of the volume presents both the epitaxial growth processes associated with key technology materials as well as unique structures such as monolayer and two dimensional materials. Volume IIIA Basic Techniques Provides an introduction to the chief epitaxial growth processes and the underpinning scientific concepts used to understand and develop new processes. Presents new techniques and technologies for the development of three-dimensional structures such as quantum dots, nano-wires, rods and patterned growth Introduces and utilizes basic concepts of thermodynamics, transport, and a wide cross-section of kinetic processes which form the atomic level text of growth process Volume IIIB Materials, Processes, and Technology Describes atomic level epitaxial deposition and other low temperature growth techniques Presents both the development of thermal and lattice mismatched streams as the techniques used to characterize the structural properties of these materials Presents in-depth discussion of the epitaxial growth techniques associated with silicone silicone-based materials, compound semiconductors, semiconducting nitrides, and refractory materials

Book Handbook of Thin Films  Five Volume Set

Download or read book Handbook of Thin Films Five Volume Set written by Hari Singh Nalwa and published by Academic Press. This book was released on 2001-10-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Book Dilute III V Nitride Semiconductors and Material Systems

Download or read book Dilute III V Nitride Semiconductors and Material Systems written by Ayse Erol and published by Springer Science & Business Media. This book was released on 2008-01-12 with total page 607 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the current status of research and development in dilute III-V nitrides. It covers major developments in this new class of materials within 24 chapters from prominent research groups. The book integrates materials science and applications in optics and electronics in a unique way. It is valuable both as a reference work for researchers and as a study text for graduate students.