Download or read book Gate Stack and Silicide Issues in Silicon Volume 670 written by S. A. Campbell and published by . This book was released on 2002-02-26 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This volume was first published in 2002.

Download or read book Gate Stack and Silicide Issues in Silicon Processing written by and published by . This book was released on 2002 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Gate Stack and Silicide Issues in Silicon Processing written by L. A. Clevenger and published by Cambridge University Press. This book was released on 2014-06-05 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the feature size of microelectronic devices approaches the deep submicron regime, the process development and integration issues related to gate stack and silicide processing are key challenges. Gate leakage is rising due to direct tunneling. Power and reliability concerns are expected to limit the ultimate scaling of SiO2-based insulators to about 1.5nm. Gate insulators must not deleteriously affect the interface quality, thermal stability, charge trapping, or process integration. Metal gate materials and damascene gates are being investigated, in conjunction with the application of a high-permittivity gate insulator, to provide sufficient device performance at ULSI dimensions. The silicidation process is also coming under pressure. Narrow device widths and decreasing junction depths are making the formation of low-leakage, low-resistance silicide straps extremely difficult. Producing shallower junctions via ion implantation is inhibited by transient enhanced diffusion and low beam currents at low implantation energies. Gate stack and contact film effects, such as point defect injection, extended defect formation, and stress on ultrashallow junction formation must be considered.

Download or read book Amorphous and Heterogeneous Silicon Thin Films written by and published by . This book was released on 2001 with total page 1026 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Materials Issues in Novel Si Based Technology Volume 686 written by William G. En and published by . This book was released on 2002-07-15 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Si Front End Processing Volume 669 written by Erin C. Jones and published by . This book was released on 2001-12-14 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Current Issues in Heteropitaxial Growth Stress Relaxation and Self Assembly Volume 696 written by Eric A. Stach and published by . This book was released on 2002 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Progress in Semiconductor Materials for Optoelectronic Applications Volume 692 written by Eric D. Jones and published by . This book was released on 2002-06-19 with total page 768 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Materials Issues in Art and Archaeology written by and published by . This book was released on 2002 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Luminescence and Luminescent Materials Volume 667 written by Peter C. Schmidt and published by . This book was released on 2001-10-15 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Symposium written by Ichirō Takeuchi and published by . This book was released on 2002 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book GaN and Related Alloys 2001 Volume 693 written by John E. Northrup and published by . This book was released on 2002-07-23 with total page 912 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Volume 672 written by Jacques G. Amar and published by . This book was released on 2001-11-12 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions.

Download or read book Electrically Based Microstructural Characterization III Volume 699 written by Rosario A. Gerhardt and published by . This book was released on 2002-09-05 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Among the topics of invited papers are the electrical characterization of inhomogeneous and heterogeneous systems with microstructural periodicity, impedance spectroscopy in ferromagnetic materials, the materials characterization and device performance of a CMR- ferroelectric heterostructure, and broadband dielectric spectroscopic investigations into the influence of confinement on the molecular reorientational dynamics of liquid crystals. Many papers besides the 48 selected here are expected to appear in various scientific journals. Annotation copyrighted by Book News, Inc., Portland, OR

Download or read book Dislocations and Deformation Mechanisms in Thin Films and Small Structures Volume 673 written by Oliver Kraft and published by . This book was released on 2001-09-20 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: The mechanical properties of small volumes of materials (such as thin films and patterned structures) can be very different from larger volumes, especially in the area of dislocation behavior. This text contains a selection of 31 papers from the April 2001 symposium devoted to new methods of dislocation modeling. Topics include mechanisms of plastic deformation in heteroepitaxial, multilayered, and polycrystalline thin films; as well as in 3D mesostructures such as epitaxial islands, semiconducting devices, and microcrystallites. The organizers of the symposium had the particular aim of stimulating exchange between experimental work, theoretical modeling, and numerical simulations. Annotation copyrighted by Book News Inc., Portland, OR.

Download or read book Nanophase and Nanocomposite Materials IV Volume 703 written by Sridhar Komarneni and published by . This book was released on 2002-04 with total page 624 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Applications of Synchrotron Radiation Techniques to Materials Science IV Volume 678 written by P. G. Allen and published by Cambridge University Press. This book was released on 2001-11-13 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt: Much like earlier books in the series, this collection of papers, first published in 2001, brings together the materials science community and the characterization techniques that use synchrotron radiation. Surfaces, interfaces, electronic materials, thin films, carbides, polymers and alloys are all addressed. And while the editors did not anticipate that the cluster of papers treating cementitious materials would necessitate a separate section, it is interesting to see the application of cutting-edge techniques to Portland cement, a very complex materials system long used in engineering structures. Topics include: X-ray diffraction - structures and transformations; X-ray diffraction - stress, strain and texture; microtomography and microdiffraction; SR methods applied to cementitious materials; magnetic materials; X-ray absorption and photoemission; and X-ray scattering and interfaces.