Download or read book Fundamental processes of plasma and reactive gas surface treatment for the recovery of hydrogen isotopes from carbon co deposits in fusion devices written by Sören Möller and published by Forschungszentrum Jülich. This book was released on 2014 with total page 107 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Assessment of Laser Induced Ablation Spectroscopy LIAS as a method for quantitative in situ surface diagnostic in plasma environments written by Niels Gierse and published by Forschungszentrum Jülich. This book was released on 2014 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A Lagrangian transport core for the simulation of stratospheric trace species in a Chemistry Climate Model written by Charlotte Marinke Hoppe and published by Forschungszentrum Jülich. This book was released on 2014 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].
Download or read book Handbook of Plasma Processing Technology written by Stephen M. Rossnagel and published by William Andrew. This book was released on 1990 with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Download or read book Plasma Technology for Hyperfunctional Surfaces written by Hubert Rauscher and published by John Wiley & Sons. This book was released on 2010-04-16 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasma technology research. Clearly divided in three sections, the first part is dedicated to the fundamentals of plasma and offers information about scientific and theoretical plasma topics, plasma production, surface treatment process and characterization. The second section focuses on technological aspects and plasma process applications in textile, food packaging and biomedical sectors, while the final part is devoted to concerns about the environmental sustainability of plasma processes.
Download or read book Bulletin of the Atomic Scientists written by and published by . This book was released on 1970-06 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Bulletin of the Atomic Scientists is the premier public resource on scientific and technological developments that impact global security. Founded by Manhattan Project Scientists, the Bulletin's iconic "Doomsday Clock" stimulates solutions for a safer world.
Download or read book Surface Cleaning of Optics by Plasma scope with Atomic Hydrogen written by Robert E. Lofgren and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A major obstacle in the implementation of extreme ultraviolet (EUV) light photolithography in production tools is the accumulation of fuel debris on the collector optics near the pinch region. Specifically, removal of deposited tin from the source onto the collector optics is needed to improve the lifetime of these optics and lower the cost of ownership. Most cleaning processes investigated thus far have had trouble with selectivity; they require highly reactive gases that will degrade the optics in the removal process. In addition, the current cleaning gases have low transmission for the EUV light, eliminating in-situ operation as an option. An investigation into a new approach is researched by the Center for Plasma Material0́9s Interactions (CPMI) at University of Illinois in Urbana, Illinois. This unique non-invasive background process selectively etches tin from the collector optics surface at room temperature without damage to the underlying collector optics composition. A computer model of the plasma system used and of the etching process of the tin film is shown in correlation to experimental results. Created using collisional cross sections of input gas particles in a helical-resonated plasma and assumed surface interactions at a sample substrate, a clear indication of how the plasma system behaves with the desired substrate is found from the model (approximate etch rates of 80 nm/min). The cross sections are developed from past research data on particle-particle interactions and are numerically integrated into the computer model. Surface interactions are initially set to related material specifications as this process is relatively new and unexplored. Comparison to experimental data allows for changes to the surface interaction inputs in the model. The developed procedure has selected etching of tin ranging from 20-160 nm/min experimentally. A variation in inputs causes alterations in the etch rate. Mainly, gas pressure and plasma input creates a difference in the reactive species created in the plasma system. Gas flowrate and surface temperature affects the surface interactions. These variances are explored as to optimize the cleaning process. With these results, the hope is to input this new process as an in-situ cleaning process or a quick cleaning cycle in the EUV lithography process.
Download or read book Bulletin of the Atomic Scientists written by and published by . This book was released on 1970-06 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Bulletin of the Atomic Scientists is the premier public resource on scientific and technological developments that impact global security. Founded by Manhattan Project Scientists, the Bulletin's iconic "Doomsday Clock" stimulates solutions for a safer world.
Download or read book Magnetic Fusion Technology written by Thomas J. Dolan and published by Springer Science & Business Media. This book was released on 2014-02-10 with total page 816 pages. Available in PDF, EPUB and Kindle. Book excerpt: Magnetic Fusion Technology describes the technologies that are required for successful development of nuclear fusion power plants using strong magnetic fields. These technologies include: • magnet systems, • plasma heating systems, • control systems, • energy conversion systems, • advanced materials development, • vacuum systems, • cryogenic systems, • plasma diagnostics, • safety systems, and • power plant design studies. Magnetic Fusion Technology will be useful to students and to specialists working in energy research.
Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1989 with total page 1606 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.
Download or read book Bulletin of the Atomic Scientists written by and published by . This book was released on 1970-12 with total page 104 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Bulletin of the Atomic Scientists is the premier public resource on scientific and technological developments that impact global security. Founded by Manhattan Project Scientists, the Bulletin's iconic "Doomsday Clock" stimulates solutions for a safer world.
Download or read book Advanced Oxidation Processes for Water and Wastewater Treatment written by Simon Parsons and published by IWA Publishing. This book was released on 2004-03-01 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: The suitability of Advanced Oxidation Processes (AOPs) for pollutant degradation was recognised in the early 1970s and much research and development work has been undertaken to commercialise some of these processes. AOPs have shown great potential in treating pollutants at both low and high concentrations and have found applications as diverse as ground water treatment, municipal wastewater sludge destruction and VOCs control. Advanced Oxidation Processes for Water and Wastewater Treatment is an overview of the advanced oxidation processes currently used or proposed for the remediation of water, wastewater, odours and sludge. The book contains two opening chapters which present introductions to advanced oxidation processes and a background to UV photolysis, seven chapters focusing on individual advanced oxidation processes and, finally, three chapters concentrating on selected applications of advanced oxidation processes. Advanced Oxidation Processes for Water and Wastewater Treatment will be invaluable to readers interested in water and wastewater treatment processes, including professionals and suppliers, as well as students and academics studying in this area. Dr Simon Parsons is a Senior Lecturer in Water Sciences at Cranfield University with ten years' experience of industrial and academic research and development.
Download or read book Bulletin of the Atomic Scientists written by and published by . This book was released on 1970-06 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Bulletin of the Atomic Scientists is the premier public resource on scientific and technological developments that impact global security. Founded by Manhattan Project Scientists, the Bulletin's iconic "Doomsday Clock" stimulates solutions for a safer world.
Download or read book Nuclear Fusion written by C.M. Braams and published by CRC Press. This book was released on 2002-06-20 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fusion research started over half a century ago. Although the task remains unfinished, the end of the road could be in sight if society makes the right decisions. Nuclear Fusion: Half a Century of Magnetic Confinement Fusion Research is a careful, scholarly account of the course of fusion energy research over the past fifty years. The authors outline the different paths followed by fusion research from initial ignorance to present understanding. They explore why a particular scheme would not work and why it was more profitable to concentrate on the mainstream tokamak development. The book features descriptive sections, in-depth explanations of certain physical and technical issues, scientific terms, and an extensive glossary that explains relevant abbreviations and acronyms.
Download or read book Atomic and Plasma material Interaction Data for Fusion written by and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
