Download or read book Focused Electron and Ion beam Induced Processes written by Vinzenz Friedli and published by . This book was released on 2008 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by Oxford University Press. This book was released on 2012-03-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging technologies as processing by cluster beams are also discussed. In addition, the book considers numerous applications of these techniques (milling, etching, deposition) for nanolithography, nanofabrication and characterization, involving different nanostructured materials and devices. Its main focus is on practical details of using focused ion and electron beams with gas assistance (deposition and etching) and without gas assistance (milling/cutting) for fabrication of devices from the fields of nanoelectronics, nanophotonics, nanomagnetics, functionalized scanning probe tips, nanosensors and other types of NEMS (nanoelectromechanical systems). Special attention is given to strategies designed to overcome limitations of the techniques (e.g., due to damaging produced by energetic ions interacting with matter), particularly those involving multi-step processes and multi-layer materials. Through its thorough demonstration of fundamental concepts and its presentation of a wide range of technologies developed for specific applications, this volume is ideal for researches from many different disciplines, as well as engineers and professors in nanotechnology and nanoscience.
Download or read book Ion Beam Processes in Advanced Electronic Materials and Device Technology Volume 45 written by B. R. Appleton and published by . This book was released on 1985-08-30 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Functional Nanostructures Fabricated by Focused Electron Ion Beam Induced Deposition written by Rosa Córdoba Castillo and published by Springer Science & Business Media. This book was released on 2013-10-08 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis constitutes a detailed study of functional nanostructures (ferromagnetic, superconducting, metallic and semiconducting) fabricated by focused electron/ion beam induced deposition techniques. The nanostructures were grown using different precursor materials such as Co2(CO)8, Fe2(CO)9, W(CO)6, (CH3)3Pt(CpCH3) and were characterized by a wide range of techniques. This work reports results obtained for the morphology, the microstructure, the composition, the electrical transport mechanism, magnetic and superconducting properties of nanostructures. The results offers exciting prospects in a wide range of applications in nanotechnology and condensed matter physics.
Download or read book Introduction to Focused Ion Beams written by Lucille A. Giannuzzi and published by Springer Science & Business Media. This book was released on 2006-05-18 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
Download or read book Advanced Focused Beam induced Processing for Nanoscale Synthesis and 2D Materials Device Architectures written by Michael Garrison Stanford and published by . This book was released on 2017 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanofabrication has come to prominence over recent years due to miniaturization of electronic devices as well as interesting physical phenomena that arise in material systems at the nanoscale. Particle beam induced processing enables additive as well as subtractive nanoprocessing techniques. Focused beam induced processing facilitates direct-write processing, thus making it a common technique for fabrication and synthesis on the nanoscale and is typically carried out with charged particles such as electrons or ion species, each of which offer distinct capabilities. This dissertation addresses several challenges which currently plague the focused beam-induced processing community and explores novel applications. Chapter I explores laser based purification strategies for electron beam induced deposition. This addresses the challenge of material purity, which currently limits broader application of the nanofabrication technique. Chapter II covers advanced helium ion beam induced processing using a Gas Field Ionization source. This chapter explores novel applications for the helium ion beam as well as the mitigation of helium-induced subsurface damage, which currently prevents ubiquitous adoption of the helium ion microscope as a nanofabrication tool. Chapter III studies defect introduction in 2D materials under helium ion irradiation, which proves to be an ideal nanoprocessing application for the helium ion beam.
Download or read book High Resolution Focused Ion Beams FIB and its Applications written by Jon Orloff and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.
Download or read book Nanofabrication written by José María de Teresa and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.
Download or read book Liquid Cell Electron Microscopy written by Frances M. Ross and published by Cambridge University Press. This book was released on 2017 with total page 529 pages. Available in PDF, EPUB and Kindle. Book excerpt: 2.6.2 Electrodes for Electrochemistry
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices. Sample Chapter(s). Chapter 1: Atom, Molecule, and Nanocluster Manipulations for Nanostructure Fabrication Using Scanning Probe Microscopy (3,320 KB). Contents: Atomic Force Microscope Lithography (N Kawasegi et al.); Nanowire Assembly and Integration (Z Gu & D H Gracias); Extreme Ultraviolet Lithography (H Kinoshita); Electron Projection Lithography (T Miura et al.); Electron Beam Direct Writing (K Yamazaki); Electron Beam Induced Deposition (K Mitsuishi); Focused Ion Beams and Interaction with Solids (T Ishitani et al.); Nanofabrication of Nanoelectromechanical Systems (NEMS): Emerging Techniques (K L Ekinci & J Brugger); and other papers. Readership: Researchers, professionals, and graduate students in the fields of nanoengineering and nanoscience.
Download or read book Low Energy Electrons written by Oddur Ingólfsson and published by CRC Press. This book was released on 2019-04-23 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-energy electrons are ubiquitous in nature and play an important role in natural phenomena as well as many potential and current industrial processes. Authored by 16 active researchers, this book describes the fundamental characteristics of low-energy electron–molecule interactions and their role in different fields of science and technology, including plasma processing, nanotechnology, and health care, as well as astro- and atmospheric physics and chemistry. The book is packed with illustrative examples, from both fundamental and application sides, features about 130 figures, and lists over 800 references. It may serve as an advanced graduate-level study course material where selected chapters can be used either individually or in combination as a basis to highlight and study specific aspects of low-energy electron–molecule interactions. It is also directed at researchers in the fields of plasma physics, nanotechnology, and radiation damage to biologically relevant material (such as in cancer therapy), especially those with an interest in high-energy-radiation-induced processes, from both an experimental and a theoretical point of view.
Download or read book Modern Electron Microscopy in Physical and Life Sciences written by Milos Janecek and published by BoD – Books on Demand. This book was released on 2016-02-18 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings a broad review of recent global developments in theory, instrumentation, and practical applications of electron microscopy. It was created by 13 contributions from experts in different fields of electron microscopy and technology from over 20 research institutes worldwide.
Download or read book Elucidating Fundamental Mechanisms in Focused Electron and Ion beam Induced Synthesis written by Carlos Manuel Gonzalez and published by . This book was released on 2014 with total page 235 pages. Available in PDF, EPUB and Kindle. Book excerpt: A focused electron beam deposition process (FEBID) coupled with in-situ infrared pulsed laser assist (LA-EBID) has been implemented for higher purity tungsten nanowires using W(CO)6 [tungsten hexacarbonyl] as parent precursor gas. Nanowires made of Co from Co2(CO)8 [dicobalt octacarbonyl] and Pt from MeCpPtIVMe3 [trimethyl methylcyclopentadienyl platinum] have also been realized by using inert focused ion beams of helium and helium and neon, respectively. In all cases, higher electrical conductivities, higher purities and larger grain sizes have been obtained when compared with preceding traditional additive edit techniques. These new approaches will make possible successful nanoscale direct-write processes on complex structures of high technological relevance such as the Mo/Si EUV reflector mirror. Etching of a nickel top absorber layer has been attained by using a neon focused ion beam (Ne-FIB), but not with a He-FIB. Subsurface or collateral damage due to defect generation and interactions still remains a side effect that needs to be minimized and corrected. Experiments made in a helium ion microscope (HIM) indicate that endpoint detection is possible for monitoring when a top film (Ni, Au, Cu, and SiO2 [silicon dioxide]) in a multilayer structure has been milled through to an internal boundary by using a neon focused ion beam. In the case of helium ion irradiation, the electronic signature corresponding to the onset of nanobubbling (or swelling) has been captured, hence improving the detectability of this adverse effect. Models using an empirical 2-D Lambertian distribution have been deployed to predict how the secondary electron (SE) emissions vary as a function of the etch geometry and composition for one-, two- and three-component systems.
Download or read book Transport of Energetic Electrons in Solids written by Maurizio Dapor and published by Springer. This book was released on 2016-12-27 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition describes all the mechanisms of elastic and inelastic scattering of electrons with the atoms of the target as simple as possible. The use of techniques of quantum mechanics is described in detail for the investigation of interaction processes of electrons with matter. It presents the strategies of the Monte Carlo method, as well as numerous comparisons among the results of the simulations and the experimental data available in the literature. New in this edition is the description of the Mermin theory, a comparison between Mermin theory and Drude theory, a discussion about the dispersion laws, and details about the calculation of the phase shifts that are used in the relativistic partial wave expansion method. The role of secondary electrons in proton cancer therapy is discussed in the chapter devoted to applications. In this context, Monte Carlo results about the radial distribution of the energy deposited in PMMA by secondary electrons generated by energetic proton beams are presented.
Download or read book Exploration of Focused Ion Beam Processing written by Sarvesh K. Tripathi and published by LAP Lambert Academic Publishing. This book was released on 2011-12 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: The necessity of miniaturization of the devices expands the scope of nanotechnology. In recent years, researchers have poured in a lot of effort in the development of nanoscale devices. The focused ion beam (FIB) has proven itself as a very powerful and unique technique for nanofabrication. FIB induced micro / nanofabrication fundamentally involves two basic phenomena namely sputtering and molecular cracking, leading to the material removal and material deposition, respectively. In the present work the basic physical processes involved in the FIB induced deposition have been investigated and the correlation between ion beam parameters and physical characteristics of FIB fabricated nanostructures has been studied. There are a number of other physical phenomena viz. scattering, redeposition, secondary electron / photon emission and localized heating etc. which may occur when the incident ions interact with the substrate during the FIB processing, and intricately influence the nanofabrication. Therefore, it is very necessary to investigate the effect of these phenomena for efficient FIB processing. In the present work the influences of these physical phenomena have been explored.
Download or read book Ion Beam Applications written by Ishaq Ahmad and published by BoD – Books on Demand. This book was released on 2018-07-18 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion beam of various energies is a standard research tool in many areas of science, from basic physics to diverse areas in space science and technology, device fabrications, materials science, environment science, and medical sciences. It is an advance and versatile tool to frequently discover applications across a broad range of disciplines and fields. Moreover, scientists are continuously improving the ion beam sources and accelerators to explore ion beam at the forefront of scientific endeavours. This book provides a glance view on MeV ion beam applications, focused ion beam generation and its applications as well as practical applications of ion implantation.
