Download or read book Finite element Methods for Process Simulation Application to Silicon Oxidation written by Pantas Sutardja and published by . This book was released on 1988 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Finite elemnt Methods for Process Simulation Application to Silicon Oxidation written by Pantas Sutardja and published by . This book was released on 1989 with total page 183 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Finite Element Method in Oxidation Process Simulation written by Pantas Sutardja and published by . This book was released on 198? with total page 70 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modeling of Thermal Oxidation and Stress Effects written by Christian Hollauer and published by Sudwestdeutscher Verlag Fur Hochschulschriften AG. This book was released on 2009 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thermal Oxidation is one of the most important process steps in semiconductor fabrication to produce high quality isolation layers. A chemical reaction converts silicon into silicon dioxide which has more than twice of the original volume. This is the main source for stress and displacements in the oxidized structure. Stress in copper interconnects can be essential for the life time of an integrated circuit, because it can support material transport and lead to void formation. During the fabrication of sensors, where thin film deposition is often used, an intrinsic stress is generated in the layers which can cause unwanted deformation in free standing structures. After an introduction the author describes the advanced oxidation model and shows by means of pictures the verified simulation results. A highlight of this book is the chapter about the Finite Element Method (FEM) which is used to solve the mathematical formulation numerically. In a comprehensible way the author describes how to apply FEM in practice, so that the reader of this book should be able to discretize many other kinds of differential equations and solve them with a computer, which is basic for simulation.
Download or read book Memorandum written by and published by . This book was released on 2002 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Silicon Oxidation Simulation written by Gabriel Matthew Cuka and published by . This book was released on 1990 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Moving Finite Element Method written by Maria Do Carmo Coimbra and published by CRC Press. This book was released on 2018-12-05 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on process simulation in chemical engineering with a numerical algorithm based on the moving finite element method (MFEM). It offers new tools and approaches for modeling and simulating time-dependent problems with moving fronts and with moving boundaries described by time-dependent convection-reaction-diffusion partial differential equations in one or two-dimensional space domains. It provides a comprehensive account of the development of the moving finite element method, describing and analyzing the theoretical and practical aspects of the MFEM for models in 1D, 1D+1d, and 2D space domains. Mathematical models are universal, and the book reviews successful applications of MFEM to solve engineering problems. It covers a broad range of application algorithm to engineering problems, namely on separation and reaction processes presenting and discussing relevant numerical applications of the moving finite element method derived from real-world process simulations.
Download or read book Simulation of Metal Forming Processes by the Finite Element Method SIMOP I written by Kurt Lange and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 3276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Download or read book Metal Forming and the Finite element Method written by Shiro Kobayashi and published by Oxford University Press, USA. This book was released on 1989 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: 1. Introduction. 2. Metal Forming Process. 3. Analysis and Technology in Metal Forming. 4. Plasticity and Viscoplasticity. 5. Methods of Analysis. 6. The Finite Element Method--Part I. 7. The Finite Element Method--Part II. 8. Plane-Strain Problems. 9. Axisymmetric Isothermal Forging. 10. Steady State Processes of Extrusion and Drawing. 11. Sheet Metal Forming. 12. Thermo-Viscoplastic Analysis. 13. Compaction and Forging of Porous Metals. 14. Three Dimensional Problems. 15. Preform Design in Metal Forming. 16. Solid Formulation, Comparison of Two Formulations, and Concluding Remarks.
Download or read book 3 Dimensional Process Simulation written by J. Lorenz and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three-dimensional device simulation, and challenged by the great algorithmic problems caused by moving interfaces and by the requirement to limit computation times and memory requirements. A workshop (Erlangen, September 5, 1995) provided a forum to discuss the industrial needs, technical problems, and solutions being developed in the field of three-dimensional semiconductor process simulation. Invited presentations from leading semiconductor companies and research Centers of Excellence from Japan, the USA, and Europe outlined novel numerical algorithms, physical models, and applications in this rapidly emerging field.
Download or read book Fundamental Research on the Numerical Modelling of Semiconductor Devices and Processes written by John J. H. Miller and published by . This book was released on 1987 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Japanese Journal of Applied Physics written by and published by . This book was released on 2001 with total page 1364 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Circuit Device and Process Simulation written by Graham F. Carey and published by . This book was released on 1996-06-19 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents for the first time a unified treatment of the physical processes, mathematical models and numerical techniques for circuit, device and process simulation. At the macroscopic level linear and nonlinear circuit elements are introduced to yield a mathematical model of an integrated circuit. Numerical techniques used to solve this coupled system of ODEs are described. Microscopically, current flow within a transistor is modeled using the drift-diffusion and hydrodynamic PDE systems. Finite difference and finite element methods for spatial discretizations are treated, as are grid generation and refinement, upwinding, and multilevel schemes. At the fabrication level, physical processes such as diffusion, oxidation, and crystal growth are modeled using reaction-diffusion-convection equations. These models require multistep integration techniques and Krylov projection methods for successful implementation. Exercises, programming assignments, and an extensive bibliography are included to reinforce and extend the treatment.
Download or read book Applications of the Finite Element Method to the Plastic Deformation Analysis of Perforated Sheet Metals and the Process Simulation of Shape Rolling written by Fuh-Kuo Chen and published by . This book was released on 1989 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific Computing in Electrical Engineering written by Wilhelmus H. Schilders and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 994 pages. Available in PDF, EPUB and Kindle. Book excerpt:
