Download or read book Femtosecond Pulsed Laser Deposition and Patterning of Thin Films for MEMS written by Michael Joseph Stock and published by . This book was released on 2003 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt: Procedural variables such as fluence, polarization, pulse width, machining speed, and material properties are investigated to determine their effects on the PLD and laser micromachining of aluminum magnesium boride. In this work, a 120-fs pulsed, 800-nm wavelength Ti: Sapphire laser was used for micromachining thin films of ultra-hard AlMgB14 and polysilicon thin films on silicon substrate. Polysilicon was first deposited by low-pressure chemical vapor deposition followed by boride using femtosecond pulsed laser deposition. Channels were then machined in thin films to pattern a device that would produce a linear resistance/deflection curve. Results show that the ultrafast laser has precisely ablated the thin films. However, the high-energy fluence used in single-pass surface micromachining enabled the formation of recast layer of molten silicon substrate ejected by vapor pressure, and conglomerates of re-condensed material at a distance from the feature. Multi-pass surface micromachining at low energy fluences eliminated the recast layers and produced clean features. Ultrafast laser micromachining is certainly beneficial over wet and dry etching in reproducibility, material choice, and minimal number of processing steps. Thin films of ultra-hard AlMgB14 were grown on Si (100) substrates at 300 K using femtosecond pulsed Ti:sapphire laser and subsequently annealed in argon gas up to 1373 K for two hours. X-ray photoelectron spectroscopy, X-ray diffraction, atomic force microscope, and nanoindentation were employed to study the composition, microstructure and hardness of thin films. Results were compared with nanosecond pulsed KrF excimer laser-deposited films. The as-deposited and post-annealed films (up to 1173 K), independent of the pulse width, exhibited amorphous structures with a hardness of 40 GPa. However, post-annealing at higher temperatures has varied effects on crystallization depending on the pulse width. The effect of pulse width on the microstructure and quality of thin films is discussed.

Download or read book Ultrafast Laser Deposition and Microfabrication of Thin Films for MEMS Structures written by Monica Vendan and published by . This book was released on 2006 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis is organized into a chapter on literature review, three papers and a chapter on conclusions. The first paper deals with the femtosecond pulsed laser deposition and fabrication of micromotor on Teflon thin films along with a comparison of the traditional excimer deposition. The second paper deals with the femtosecond pulsed laser deposition and fabrication of microgripper on 3C-SiC along with a comparison of films deposited by excimer laser and atmospheric chemical vapor deposition methods. The third paper deals with the details of fabrication of a microgripper on 3C-SiC thin film.

Download or read book Femtosecond Pulsed Laser Ablation and Patterning of 3C SiC Films on Si Substrates for MEMS Fabrication written by Yuanyuan Dong and published by . This book was released on 2004 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond pulsed laser (FPL) micromachining is a direct-writing technique in which an ultrashort pulse laser beam is focused to dimensions of a few microns inside or on the surface of the substrate and then moved around using a X-Y positioning table, thereby creating either features or patterns as required. It outperforms conventional micromachining technologies due to advantages such as precise resolution, minimal thermal or shock damage, and absence of discrimination among materials. 3C-SiC is a very important semiconductor in electronics and opto-electronics and more recently regarded as an optimal candidate for structural or coating applications in microelectromechanical systems (MEMS) used under harsh and high-temperature environments; however, it is a very difficult material to be machined or etched by mechanical or chemical methods. In this work, fundamental studies on the interaction of femtosecond pulsed beam with 3C-SiC films were performed. The influence of laser parameters such as pulsed energy on the ablation and calculations of damage thresholds and ablation rates were determined. Based on these results, MEMS structures including micromotors, microturbine rotors, and lateral resonators were patterned with good quality and repeatability. Research demonstrates that FPL micromachining is capable of offering a unique solution to overcome the traditional barriers in SiC machining method, opening up opportunities for SiC materials to be used in industrial environment. As a spinoff of femtosecond pulse micromachining, nanostructuring of 3C-SiC films on Si was observed. Nanoparticle surfaces were further studied in terms of formation conditions and characterizations of crystal structure and related properties. "Incubation" effects were identified and Coulomb explosion mechanism was proposed to be responsible for the generation of nanoparticles. Results of research enhance our current understanding of ultrashort pulse-matter interactions and offer potential applications for SiC-MEMS.

Download or read book Comparative Study of Metallic Thin Films Deposited by Femtosecond and Nanosecond Pulsed Laser Deposition written by Abdul Lateef Ali Mohammed and published by . This book was released on 1996 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Characterization of Femtosecond Laser Ablation and Deposition written by Sudipta Bera and published by LAP Lambert Academic Publishing. This book was released on 2010-05 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt: A novel femtosecond micromachining workstation that permits real-time measurement of ablation depth and transient reflectivity is demonstrated. This instrumentation is used to characterize two processes: micromachining of thin metal films, and laser induced forward transfer (LIFT). Spectral interferometry was incorporated in a femtosecond micromachining system to enable real-time visualization of micromachined features as they are written into thin metal films-low energy(pJ) femtosecond oscillator pulses are used to probe the sample as it is cut by high energy (uJ) pulses. Sub-wavelength depths are readily resolved using this technique, making it possible to monitor the integrity of micromachined structures as they are created. This technique can also be employed to characterize interesting processes such as laser induced forward transfer (LIFT) of thin metal films. LIFT essentially involves using a pulsed laser to pattern a structure by deposition as opposed to ablation. Using modest numerical apertures (0.65 or less) we have been able to produce submicron features using this method of femtosecond pulsed laser deposition.

Download or read book Femtosecond Laser Induced Thermal Damage in Thin Films written by Yoosuf N. Picard and published by . This book was released on 2006 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Wear resistance Lubricity and Adhesion of Femtosecond Pulsed Laser Deposited AlMgB14 based Thin Films written by Austin Harold Shaw and published by . This book was released on 2011 with total page 48 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optically Induced Nanostructures written by Karsten König and published by Walter de Gruyter GmbH & Co KG. This book was released on 2015-05-19 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanostructuring of materials is a task at the heart of many modern disciplines in mechanical engineering, as well as optics, electronics, and the life sciences. This book includes an introduction to the relevant nonlinear optical processes associated with very short laser pulses for the generation of structures far below the classical optical diffraction limit of about 200 nanometers as well as coverage of state-of-the-art technical and biomedical applications. These applications include silicon and glass wafer processing, production of nanowires, laser transfection and cell reprogramming, optical cleaning, surface treatments of implants, nanowires, 3D nanoprinting, STED lithography, friction modification, and integrated optics. The book highlights also the use of modern femtosecond laser microscopes and nanoscopes as novel nanoprocessing tools.

Download or read book Growth and Magnetism of Metallic Thin Films and Multilayers by Pulsed laser Deposition written by and published by . This book was released on 2004 with total page 55 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advanced MEMS NEMS Fabrication and Sensors written by Zhuoqing Yang and published by Springer Nature. This book was released on 2021-10-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Download or read book Pulsed Laser Deposition of InP Thin Films written by Theodore T. Pekny and published by . This book was released on 1990 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nd Fe B Thin Films Deposited by Pulsed Laser Deposition written by Xiaojuan Huang and published by . This book was released on 2001 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Comparative Characterization of Molybdenum Oxide Thin Films Grown on Various Substrates Using Temporally Different Pulsed Laser Deposition Techniques written by Krishna Harsha Puppala and published by . This book was released on 2016 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pulsed Laser Deposition (PLD) technique, with its vast tunability in terms of thin film fabrication has been the center of this study. By changing the temporal component of the laser source used for deposition into the femtosecond (fs) regime, interesting structural, morphological changes can be achieved which may prove to be beneficial for photocatalytic applications. In particular, molybdenum oxide thin films, which are the less well-studied and potentially newer candidates for photocatalysis applications have been chosen for investigation. Hence, a detailed characterization study of molybdenum oxide thin films synthesized using femtosecond-based (f-PLD) and nanosecond-based (n-PLD) techniques, was carried out in terms of their structural, morphological, surface chemical/ electronic states and vibrational properties using X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. The f-PLD technique was found to produce more favorable molybdenum oxide thin films deposited on glass for surface-related applications, in terms of having a higher surface to volume ratio, than the n-PLD technique. A related simultaneous study of substrate-based effect on the thin films produced using n-PLD system, also revealed both variation among the morphological, structural, and electronic (in terms of Mo oxidation state) properties depending upon the nature of the substrate used to synthesize the molybdenum oxide thin films. Special cases of thin films on epitaxial substrates (Si, sapphire) have been characterized to determine the parameters necessary for fabricating highly-textured thin films with large surface-area to volume ratio, which is key to efficient photo-catalysts.

Download or read book Deposition of Magnetic Shape Memory Films and Shaping of Laser Beams written by Antti Hakola and published by LAP Lambert Academic Publishing. This book was released on 2011-12 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferromagnetic shape-memory (FSM) compounds are actively studied materials due to their large shape changes in an external magnetic field. This makes it possible to realize novel actuators and sensors. For the fabrication of micromechanical components and even microscopic machines, the material should be in thin-film form, and pulsed laser deposition (PLD) is an effective technique to reach this goal. In this thesis, FSM Ni-Mn-Ga films with a thickness of a few hundred nanometers were deposited on different substrates and methods were developed to release the film from its substrate. For efficient ablation, the intensity distribution of the laser beam on the target should be smooth with steep edges. In this work, such a distribution was realized with the help of diffractive optics. Diffractive optics was also applied to directly produce almost propagation-invariant laser beams, so-called Bessel-Gauss beams in laser resonators. Furthermore, Bessel-like laser beams were created as a result of self-focusing in a certain liquid crystal. Such diffraction-free laser beams can be used in precise laser ablation and accurate patterning of small structures in thin films.

Download or read book Preparation of SrMgx Ru1 xO3 Thin Films by Pulsed Laser Deposition written by Mohammad Mehdi Yazdanian and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Dissertation Abstracts International written by and published by . This book was released on 2007 with total page 924 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Handbook of Laser Technology and Applications written by Chunlei Guo and published by CRC Press. This book was released on 2021-06-23 with total page 359 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive handbook gives a fully updated guide to lasers and laser technologies, including the complete range of their technical applications. This third volume covers modern applications in engineering and technology, including all new and updated case studies spanning telecommunications and data storage to medicine, optical measurement, defense and security, nanomaterials processing and characterization. Key Features: • Offers a complete update of the original, bestselling work, including many brand-new chapters. • Deepens the introduction to fundamentals, from laser design and fabrication to host matrices for solid-state lasers, energy level diagrams, hosting materials, dopant energy levels, and lasers based on nonlinear effects. • Covers new laser types, including quantum cascade lasers, silicon-based lasers, titanium sapphire lasers, terahertz lasers, bismuth-doped fiber lasers, and diode-pumped alkali lasers. • Discusses the latest applications, e.g., lasers in microscopy, high-speed imaging, attosecond metrology, 3D printing, optical atomic clocks, time-resolved spectroscopy, polarization and profile measurements, pulse measurements, and laser-induced fluorescence detection. • Adds new sections on laser materials processing, laser spectroscopy, lasers in imaging, lasers in environmental sciences, and lasers in communications. This handbook is the ideal companion for scientists, engineers, and students working with lasers, including those in optics, electrical engineering, physics, chemistry, biomedicine, and other relevant areas.