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Book Growth and Characterization of Diamond Thin Films

Download or read book Growth and Characterization of Diamond Thin Films written by Sattar Mirzakuchaki and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposited (CVD) diamond thin films grown homoepitaxially as well as on non-diamond substrates have been the subject of intense investigation since the beginning of the last decade. Diamond's remarkable properties such as physical hardness, chemical inertness, high thermal conductivity, high breakdown voltage, and high carrier mobility are the main factors for the attention it has received from many researchers around the world. Although these properties are somewhat degraded in polycrystalline diamond films, they are still superior to many other materials. One of the most potentially useful applications of diamond thin films is in the semiconductor industry. Although a few prototype devices such as field effect transistors and Schottky diodes have been fabricated on diamond, some major obstacles remain to be overcome before full scale commercial applications of diamond as a semiconductor is possible. The high cost of large area monocrystalline diamond substrates has forced researchers to look for alternative substrates for the heteroepitaxial growth of diamond. So far only marginal results have been reported on the growth of highly oriented diamond films and on the heteroepitaxial growth involving substrates that are as costly as diamond. Silicon, as the dominant material in semiconductor industry, has been the subject of much research as a substrate for the growth of polycrystalline diamond. Another problem in development of diamond as a semiconductor is the effective doping of diamond, particularly for n-type conductivity. Although many researchers have studied boron-doped (p-type) diamond thin films in the past several years, there have been few reports on the effects of doping diamond films with phosphorous (n-type). Once these two issues have been solved, other fabrication steps such as oxidation, etching, masking, etc. may be attempted. The present work is a study directed toward solving some of these problems by looking at in-situ doping of n-type hot filament CVD (HFCVD) grown diamond films on silicon substrates. The study includes electrical characterization, stable metallic contacts, effect of silicon substrate surface pretreatment, and selective area deposition. A number of different techniques for inducing diamond nucleation on Si substrates are studied and the resulting diamond films characterized by common techniques such as Raman spectroscopy, X-ray diffraction, optical and scanning electron microscopy, and profilometery. The effect of doping the diamond films with different concentrations of phosphorous as well as calculation of the activation energy by temperature measurement was also carried out in this work. A new technique is presented for the selective deposition of diamond films onto silicon substrates.

Book Characterization of Diamond Thin Films Grown on Silicon Substrates

Download or read book Characterization of Diamond Thin Films Grown on Silicon Substrates written by Kiam Meng Tey and published by . This book was released on 1995 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Growth and Characterization of Diamond Thin Films Deposited on Silicon Substrates

Download or read book Growth and Characterization of Diamond Thin Films Deposited on Silicon Substrates written by Po-Jen Cheng and published by . This book was released on 1993 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Chemical Vapor Deposited Boron Doped Polycrystalline Diamond Thin Film Growth on Silicon and Sapphire Growth Doping Metallization and Characterization

Download or read book Chemical Vapor Deposited Boron Doped Polycrystalline Diamond Thin Film Growth on Silicon and Sapphire Growth Doping Metallization and Characterization written by Hassan Golestanian and published by . This book was released on 1997 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond's unique properties are potentially superior among the existing substrate materials for electronic applications. Among these properties, diamond's physical hardness, molar density, thermal conductivity, and sound velocity are the highest while its thermal expansion coefficient, compressibility, and bulk modules are the lowest. Because of this unique combination of properties, diamond has diverse applications in electronics, optics, and material coatings. Scientists around the world have been studying possible applications of diamond and its synthesis by chemical vapor deposition (CVD) in the semiconductor industry for almost the latter half of this century. The use of bulk crystals severely limits semiconductor applications of diamond due to difficulty in doping, device integration, high cost, and small area of bulk diamond. Therefore, a great deal of effort has been undertaken by researchers around the world on diamond synthesis by chemical vapor deposition (CVD). With some of the same limitations, homoepitaxial growth of diamond is not considered to be a feasible solution. As a result, heteroepitaxial growth of diamond is being considered to be an attractive possibility. Heteroepitaxial diamond growth has been the main subject of research since the first successful growth of diamond thin films on foreign substrates was reported. Polycrystalline and highly oriented diamond thin films grown on various substrates, especially silicon, have been reported over the years. There also have been reports of device fabrication on diamond such as diamond based point contact transistors, Schottky diodes, and field effect transistors at a laboratory level. The technology has been very challenging and there remain many obstacles to overcome before diamond based devices are to become part of the semiconductor industry. For example, epitaxial growth of CVD diamond, selective doping, n-type doping, and metallization of the grown films are not totally understood due to the polycrystalline nature of CVD diamond films. The objective of this work is the study of hot-filament chemical vapor deposited boron doped polycrystalline diamond thin films grown on both silicon and sapphire. A new horizontal gas flow configuration rather than the typical vertical gas flow configuration is utilized to provide larger area and better quality films grown on these substrates. The study includes characterization of grown films using scanning electron microscopy, Raman spectroscopy, X-ray diffraction analysis, and electrical characterization. Two types of contacts to the films grown on silicon substrates are fabricated enabling various electrical measurements. However, on sapphire substrates, low volume resistivity diamond films are grown despite severe adhesion problems. The effects of various substrate pre-treatments, growth conditions, and doping concentrations are presented.

Book Fabrication and Characterization of Nano crystalline Diamond Films

Download or read book Fabrication and Characterization of Nano crystalline Diamond Films written by and published by . This book was released on 1993 with total page 18 pages. Available in PDF, EPUB and Kindle. Book excerpt: Highly uniform, smooth nano-crystalline diamond films have been fabricated with a magneto-active microwave CVD system. Top and bottom magnet currents were 145A and 60A, while microwave power and substrate temperature were controlled at 1500W and 850°C during deposition. Total processing pressure was regulated at 40 Pa (300 mTorr), with gas flow rates of 30 sccm of hydrogen, 2.4 sccm of methane and 1 sccm of oxygen. Diamond films obtained under the above conditions have grain sizes between 0.1--0.3 [mu]m, a growth rate of 0.1[mu]m/hr and a mean roughness of 14.95 nm. Characterization techniques have involved XRD, Raman spectroscopy, SEM, AFM and TEM. Both X-ray and electron diffraction patterns show no evidence of non-diamond phases. Although a high density of twins and stacking faults were revealed by HREM, compact diamond grains and clean intergranular boundaries (no graphitic or amorphous phases) were observed.

Book Characterization of Diamond Thin Films and Related Materials

Download or read book Characterization of Diamond Thin Films and Related Materials written by Travis Kyle McKindra and published by . This book was released on 2010 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Diamond Thin Films

    Diamond Thin Films

    Book Details:
  • Author : John I. B. Wilson
  • Publisher : Wiley-VCH
  • Release : 1996-07-09
  • ISBN : 9783527401437
  • Pages : 481 pages

Download or read book Diamond Thin Films written by John I. B. Wilson and published by Wiley-VCH. This book was released on 1996-07-09 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is now over thirty years since a method was first described for the pyrolysis of hydrocarbons to form thin film diamond. We are now entering a new phase, in which potential applications of this unique material are driving improved understanding of diamond synthesis, better control of both phase purity and structural perfection, and engineering advances that will reduce the cost and increase the deposition rate. In this highly competitive area, researchers from many countries have contributed to our knowledge base, and there are several established international conferences concentrating on diamond thin films. This book brings together some of the key components in what is an exciting scientific and technical challenge: to establish diamond as an engineering material that will revolutionise operations in optics, mechanics and electronics. The sequence of papers in the book moves from fundamental studies of the deposition process, the surface structure of diamond and its stability, and the nucleation of diamond on a foreign substrate, through the current capacity for achieving epitaxial quality films, to the characterisation of diamond quality. The final section describes some of the variety of applications, and their requirements, that are being introduced to potential users.

Book Synthesis and Characterization of Diamond Thin Films by Microwave Plasma enhanced Chemical Vapor Deposition MPECVD

Download or read book Synthesis and Characterization of Diamond Thin Films by Microwave Plasma enhanced Chemical Vapor Deposition MPECVD written by Shih-Feng Chou and published by . This book was released on 2005 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.

Book Synthesis and characterization of thin diamond films on silica glass substrates especially on optic fibers for applications in optoelectronic sensors

Download or read book Synthesis and characterization of thin diamond films on silica glass substrates especially on optic fibers for applications in optoelectronic sensors written by Mateusz Ficek and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Synthesis and Characterization of Diamond like Carbon Thin Films for Biomedical Applications

Download or read book Synthesis and Characterization of Diamond like Carbon Thin Films for Biomedical Applications written by Russell Lee Leonard and published by . This book was released on 2010 with total page 91 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-like carbon (DLC) thin films were produced by pulsed laser deposition (PLD) on silicon, fused silica, and silicon nitride substrates. The films produced were either undoped, made using a pure graphite target, or doped, using multi-component targets made from a combination of graphite and silicon, silicon nitride, titanium dioxide, or silicon monoxide. These films were evaluated for their potential use in biomedical applications, including coatings for artificial joints, heart stents, and bronchoscopes. The films were characterized by Raman spectroscopy, atomic force microscopy, ball-on-flat tribometry, contact angle measurements, and spectrophotometry. Film thickness was determined by optical profilometry. Film adhesion was checked by soaking the films in simulated body fluid (SBF) and monitoring the quality of the film surface at varying time intervals using an optical microscope. DLC coatings were produced with a root mean square surface roughness of less than 1 nm and a 0.08 lubricated coefficient of friction. Contact angles of water on the undoped films varied with deposition conditions, ranging from 65 to 88 degrees. Contact angles as low as 25 degrees were achieved by incorporating silicon monoxide dopant. DLC coatings were produced on fused silica having high transparency and showing no delamination after forty-three weeks of immersion in SBF. These results indicate that these films have potential as biomedical coatings.