Download or read book Extreme Ultraviolet Imaging and Resist Characterization Using Spatial Filtering Techniques written by Michael David Shumway and published by . This book was released on 2004 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Characterization of Extreme Ultraviolet Imaging Systems written by Edita Tejnil and published by . This book was released on 1997 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nanofabrication written by Ampere A. Tseng and published by World Scientific. This book was released on 2008 with total page 583 pages. Available in PDF, EPUB and Kindle. Book excerpt: Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.
Download or read book Characterization of Resists for Extreme Ultraviolet EUV Projection Lithography written by Bernice M. Lum and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Extreme Ultraviolet Interferometry written by Kenneth Alan Goldberg and published by . This book was released on 1997 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A Novel Technique for 4 Dimensional Atmospheric and Oceanographic Irradiance Measurements Using 3 D Spatial Filtering written by and published by . This book was released on 1994 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this project, POC advanced and optimized a spatial filtering technique for measuring irradiance spatial density. The key component of the novel technique is a pixel filter placed at the image focal plane. The pixel filter design includes a wavefront-matched filter, a microlens, and a point detector. The pixel filter allows the light from the in-focus volume to pass, suppressing the light from out-of-focus areas. Three objectives were established for the Phase I project and its Option Task. This report does not concern the Option Task since that task has not been performed yet. The objectives were: Objective 1: Numerically analyze and characterize the properties of an imaging system using the proposed 3-D spatial filtering technique, and determine optimal system design parameters; Objective 2: Construct a single pixel filter, and experimentally demonstrate the proof-of-concept of the technique; and Objective 3: Identify work to be performed in Phase II of this research.
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2005 with total page 842 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Lithography written by Vivek Bakshi and published by John Wiley & Sons. This book was released on 2009 with total page 712 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 602 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book Applied Optics written by and published by . This book was released on 1998 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1997 with total page 1860 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optics Letters written by and published by . This book was released on 2008 with total page 760 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Journal of the Optical Society of America written by Optical Society of America and published by . This book was released on 1981 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advanced Holography written by Izabela Naydenova and published by BoD – Books on Demand. This book was released on 2011-11-09 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced Holography - Metrology and Imaging covers digital holographic microscopy and interferometry, including interferometry in the infra red. Other topics include synthetic imaging, the use of reflective spatial light modulators for writing dynamic holograms and image display using holographic screens. Holography is discussed as a vehicle for artistic expression and the use of software for the acquisition of skills in optics and holography is also presented. Each chapter provides a comprehensive introduction to a specific topic, with a survey of developments to date.
Download or read book Optics Index written by and published by . This book was released on 1990 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Download or read book American Doctoral Dissertations written by and published by . This book was released on 1994 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt:
