Download or read book Experimental Investigations of Corona discharge Oxidation of Silicon written by and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Experimental Investigations of Corona discharge Oxidation of Silicon microform written by Sayed-Masoud Sayedi and published by National Library of Canada = Bibliothèque nationale du Canada. This book was released on 1997 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Experimental Investigations of Corona discharge Oxidation of Silicon written by Sayed-Masoud Sayedi and published by . This book was released on 1997 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: As integrated-circuit device dimensions decrease, the importance of having new reliable processes for growing MOS gate oxides becomes more and more evident. Short process times and low process temperatures are desirable features in view of tight thermal budget constraints and the need for precise location of dopants. However, conventional thermal oxidation to grow high quality films usually requires relatively long oxidation times and relatively high temperature. Previous research on negative point (anodic) corona-processed SiO 2 films has shown that the thermal budget incurred using the corona process is much lower than in standard thermal oxidation due to the greatly enhanced oxidation rate. Promising results of low-T corona-processed [Special characters omitted.] 100Å films have shown that the films had physical characteristics comparable to those obtained in thermal oxidation. This research extends the previous work: (a) thin oxides ([Special characters omitted.] 200Å) are processed in order to be potentially more relevant to modern MOS processes, and (b) a more thorough electrical characterization is initiated. Electrical tests show that oxide and interface charges are comparable to thermal oxides. Breakdown characteristics are promising. The boundary between the corona-processed and control regions is found to be severely compromised. Subsequent corona treatments which overlap such boundary regions are found to restore the quality of the oxide. Fourier Transform Infrared (FTIR) Spectroscopy results show that the negative corona films have a different structure from that of thermal oxide films. Electrical tests on positive point (cathodic) corona-processed SiO 2 films show that the electrical quality of the films is much worse than that of standard thermally grown films, grown at a similar temperature. In the interests of growing more-uniform negative-corona SiO 2 films on broader areas of silicon wafers, experiments using multi-point or multi-needle structures were conducted. The enhancement profiles of films grown in both positive and negative cases are simulated using linear-parabolic rate constants, modified to account for the corona current.
Download or read book Low Temperature Oxidation of Silicon Using Point to plane Corona Discharge written by Mohammad Reza Madani and published by . This book was released on 1990 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Experimental Investigation of the Chemical Reaction of Oxygen and Silicon by Molecular Beam Techniques written by Clifton Seu Yin Ching and published by . This book was released on 1976 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing written by Richard E. Novak and published by The Electrochemical Society. This book was released on 1996 with total page 642 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS)* at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dis semination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all concerned if the printing and distribution of the volumes were handled by an international publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 39 (thesis year 1994) a total of 13,953 thesis titles from 21 Canadian and 159 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this impor tant annual reference work. While Volume 39 reports theses submitted in 1994, on occasion, certain uni versities do report theses submitted in previous years but not reported at the time.
Download or read book Publications of the National Institute of Standards and Technology Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1991 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Silicon Carbide and Related Materials 2019 written by Hiroshi Yano and published by Trans Tech Publications Ltd. This book was released on 2020-07-28 with total page 1196 pages. Available in PDF, EPUB and Kindle. Book excerpt: Selected peer-reviewed papers from International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM 2019) Selected, peer-reviewed papers from the 18th International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM 2019), September 29 - October 4, 2019, Kyoto, Japan
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advanced Biomaterials in Biomedical Engineering and Drug Delivery Systems written by Naoya Ogata and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: First of all, I would like to share the great pleasure of the successful five-day symposium with every participant in the 5th Iketani Conference which was held in Kagoshima from April1S (Tuesday) to 22 (Saturday), 1995. Outstanding speakers enthusiastically presented their up-to-the-minute results. Relatively little time was allotted for each presentation to ensure asdnuch time· as possible for intensive discussions on the particular topics that had just been p~esented: I was delighted to see that the lectures were of high quality, and the discu,ssionswere lively, exciting, and productive in a congenial atmosphere. We also had 92 papers in the poster ·session, in which young (and relatively young) scientists made every effort to present the novel results of their research in advanced biomaterials and drug delivery systems (DDS). I believe some of the research is most promising and will become noteworthy in the twenty-first century. It was a privilege for me to deliver a lecture at the special session of the symposium. In my introductory remarks, I pointed out five key terms in multifaceted biomaterials research: materials design, concept or methodology, devices, properties demanded, and fundamentals. I am confident that innovative progress in device manufacturing for end-use, e.g., artificial organs, vascular grafts, and DDS, can be brought about only through properly designed advanced materials that exhibit the desired functionality at the interface with any living body.
Download or read book Publications written by United States. National Bureau of Standards and published by . This book was released on 1989 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2000 with total page 992 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Air Pollution Abstracts written by and published by . This book was released on 1971 with total page 1132 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I written by Electrochemical Society. Dielectric Science and Technology Division and published by . This book was released on 1999 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book JJAP written by and published by . This book was released on 2000 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:
