Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Download or read book 1987 Proceedings written by and published by . This book was released on 1987 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the European Conference on Chemical Vapor Deposition written by and published by . This book was released on 1989 with total page 860 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Electrical Electronics Abstracts written by and published by . This book was released on 1989 with total page 1722 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Tungsten and Other Refractory Metals for VLSI Applications IV written by Robert S. Blewer and published by . This book was released on 1989 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book ECOSS 9 written by Bruno Reihl and published by . This book was released on 1987 with total page 1240 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Modeling of Chemical Vapor Deposition of Tungsten Films written by Chris R. Kleijn and published by Birkhäuser. This book was released on 2013-11-11 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which might arise from this double approach, we feel that the presentation of both sets of results in one book will be very useful for people working in similar projects.

Download or read book Metastable Alloys Preparation and Properties written by K.W. Samwer and published by Elsevier. This book was released on 2014-01-13 with total page 677 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains most of the papers presented at symposium D, one of the four symposia that formed the 1988 Strasbourg Spring Conference. The three day programme consisted of nine oral sessions; a poster session and a plenary talk giving an overview of current topics in hard magnetic materials. Scientists involved in basic as well as applied research concentrated their discussions on the fundamental processes relevant for the formation of metastable alloys such as amorphous alloys (metallic glasses), microcrystalline, quasicrystalline and nanocrystalline alloys and their applications. These materials are proving to be of considerable interest to research workers because of their possible application in the electronics industry, e.g. as diffusion barriers in devices or as data storage media.

Download or read book Rapidly Quenched Metals 6 Volume 2 written by R.W. Cochrane and published by Elsevier. This book was released on 1988-01-01 with total page 575 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapidly Quenched Metals 6: Volume 2

Download or read book VLSI Metallization written by Krishna Shenai and published by Artech House Publishers. This book was released on 1991 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive collection of reprinted articles presents the most important developments on VLSI contact and interconnect technologies and applications. The book covers important developments in metallization of compound semiconductor technologies, and includes a section on metallization reliability and high speed testing.

Download or read book MAM 97 Abstracts Booklet written by and published by Societe Francaise Du Vide. This book was released on 1997 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers the 1997 European workshop on materials for advanced metalization. It should be useful to researchers, universities and packaging engineers.

Download or read book Proceedings International IEEE VLSI Multilevel Interconnection Conference written by and published by . This book was released on 1987 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings in Print written by and published by . This book was released on 1992 with total page 820 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Tenth International Conference on Chemical Vapor Deposition 1987 written by Electrochemical Society. High Temperature Materials Division and published by . This book was released on 1987 with total page 1296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Metals Abstracts written by and published by . This book was released on 1996 with total page 1622 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Directory of Published Proceedings written by and published by . This book was released on 1996 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Physical and Technical Problems of SOI Structures and Devices written by J.-P. Colinge and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.