Download or read book Emissivity Measurements and Modeling of Silicon Related Materials written by Vijay Krishnamurthy and published by . This book was released on 1999 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Emissivity Measurements and Modeling of Silicon Related Materials and Structures written by Sufian Abedrabbo and published by . This book was released on 1998 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: The objective of this dissertation is to investigate the major issues concerning applications of pyrometry for applications in rapid thermal processing (RTP) of silicon related materials. The research highlights of this work are: Establishment of spectral ernissometry as a novel, reliable and reproducible technique for: Determination of wavelength and temperature dependent reflectivity, transmissivity, emissivity and temperature, simultaneously, of silicon related materials and structures. The emissometer operates in the wavelength range of 1-20mm and temperature range of 300-1200K. The analysis of the influence of morphological effects on the radiative properties by measurement of (a) front-smooth incidence versus backside-rough incidence of singleside polished silicon wafers and (b) single versus double-side polished wafers. This is the first time in the literature that such a study is devoted to detect differences in the optical properties of the same sample. Attempts have been made to verify the VandenabeeleMaex one-parameter model against the experimentally obtained optical properties for rough surfaces. The model has been proven to be inaccurate and inadequate for simulating the measured properties. Establishment of methodologies and schemes for deconvolution of the measured optical properties to yield the fundamental constants such as absorption coefficient a. Effects of wavelength, temperature, the total available free carriers both by doping and thermal generation and doping types have been considered in the deconvolution process. Comparisons have been sought with the available knowledge of cc in the literature by the extensive use of the Multi-Rad model. This is a state of the art model that has been developed by MIT/SEMATECH. The first detailed investigation of the radiative properties of SIM0X has been performed. The first detailed experimental measurements of the radiative properties Of Si3N4 have been performed. The real part of the dielectric constant or refractive index has been deconvoluted from the measured properties in the near-rnid IR. A thorough testing of the models and simulation tools available to the industry has been made. The models have been utilized extensively in investigating the optical properties, and the effects of surface morphology. The models utilized in performing the simulations of the optical properties of ideally double-side polishes wafers agree in their basic mathematical approaches, i.e. the Abele's matrix theory and differ in the degree of complexity and number of parameters involved. The models utilized to achieve the surface effects task fall under two categories: simple approach that utilizes an extension of the equations that treat the parallel plane properties by relating the roughness effect linearly with the ideally polished plane surfaces, and the other proposed by NREL that utilizes a complex solid-state approach for the optical parameters and a statistical (e.g. MonteCarlo) technique that tends to average the behavior of a photon incident on the textured surface over all the possible angles and wavelengths. Various approaches using wafer emissivity independent tools for non-contact temperature measurements are discussed with emphasis on the advantages and limitations of the technique.

Download or read book Spectral Emissivity Measurements and Modeling of High Temperature Reactor Materials written by Tamara L. Malaney and published by . This book was released on 2009 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Radiative Properties of Silicon Related Materials written by Scott Sanowitz and published by . This book was released on 2017-02-25 with total page 96 pages. Available in PDF, EPUB and Kindle. Book excerpt: The objective of this thesis is to study the optical properties of silicon, as a function of temperature, in the infrared range of wavelengths. The wavelength range, considered in this study, is between 1 micron and 20 microns. The temperature range observed is from 50 degrees Celsius to 1000 degrees Celsius. Varying wafer thickness and doping are taken into account. The thickness of the native oxide, silicon dioxide, must be taken into account as well as its orientation (front side versus back side). The effect of layering wafers one onto another is investigated. It is shown that all these parameters affect the optical properties, emittance, reflectance, and transmittance, of a wafer and multiple layers of wafers. The IR-563 Blackbody source is utilized as the infrared source. Emissivity measurements are performed using an Ex-Series FLIR camera and a Laser Grip -Model 1022. A matrix method based approach is implemented to simulate the optical properties.

Download or read book Radiative Properties of Semiconductors written by N.M. Ravindra and published by Morgan & Claypool Publishers. This book was released on 2017-08-21 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical properties, particularly in the infrared range of wavelengths, continue to be of enormous interest to both material scientists and device engineers. The need for the development of standards for data of optical properties in the infrared range of wavelengths is very timely considering the on-going transition of nano-technology from fundamental R&D to manufacturing. Radiative properties play a critical role in the processing, process control and manufacturing of semiconductor materials, devices, circuits and systems. The design and implementation of real-time process control methods in manufacturing requires the knowledge of the radiative properties of materials. Sensors and imagers operate on the basis of the radiative properties of materials. This book reviews the optical properties of various semiconductors in the infrared range of wavelengths. Theoretical and experimental studies of the radiative properties of semiconductors are presented. Previous studies, potential applications and future developments are outlined. In Chapter 1, an introduction to the radiative properties is presented. Examples of instrumentation for measurements of the radiative properties is described in Chapter 2. In Chapters 3-11, case studies of the radiative properties of several semiconductors are elucidated. The modeling and applications of these properties are explained in Chapters 12 and 13, respectively. In Chapter 14, examples of the global infrastructure for these measurements are illustrated.

Download or read book Spectral Emissivity of Highly Doped Silicon written by Curt H. Liebert and published by . This book was released on 1968 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Temperature Measurement during Millisecond Annealing written by Denise Reichel and published by Springer. This book was released on 2016-01-07 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Download or read book Blackbody Radiometry written by Victor Sapritsky and published by Springer Nature. This book was released on 2020-10-19 with total page 698 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, the first of a two-volume set, focuses on the basic physical principles of blackbody radiometry and describes artificial sources of blackbody radiation, widely used as sources of optical radiation, whose energy characteristics can be calculated on the base of fundamental physical laws. Following a review of radiometric quantities, radiation laws, and radiative heat transfer, it introduces the basic principles of blackbody radiators design, details of their practical implementation, and methods of measuring their defining characteristics, as well as metrological aspects of blackbody-based measurements. Chapters are dedicated to the effective emissivity concept, methods of increasing effective emissivities, their measurement and modeling using the Monte Carlo method, techniques of blackbody radiators heating, cooling, isothermalization, and measuring their temperature. An extensive and comprehensive reference source, this book is of considerable value to students, researchers, and engineers involved in any aspect of blackbody radiometry.

Download or read book Subsecond Annealing of Advanced Materials written by Wolfgang Skorupa and published by Springer Science & Business Media. This book was released on 2013-12-16 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.

Download or read book TMS 2023 152nd Annual Meeting Exhibition Supplemental Proceedings written by The Minerals, Metals & Materials Society and published by Springer Nature. This book was released on 2023-02-06 with total page 1349 pages. Available in PDF, EPUB and Kindle. Book excerpt: This collection presents papers from the 152nd Annual Meeting & Exhibition of The Minerals, Metals & Materials Society.

Download or read book Microbolometers written by Nuggehalli Ravindra and published by Woodhead Publishing. This book was released on 2021-12-01 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microbolometers: Fundamentals, Materials, and Recent Developments describes the fundamentals of microbolometers, their historic evolution, operational principles and material choices. It also explains the impact of materials on the processing and development of device characteristics. Sections address various aspects of optical properties and recommend models of properties of materials of interest for the fabrication of the uncooled microbolometers. In addition, the book presents two case studies, Honeywell and Texas Instruments, that focus on the design and manufacture of microbolometers. Finally, recent developments, applications, patents and future trends are presented. The chapter on patents will summarize the strengths and weaknesses of each of the technologies. “Please note that there is an error on the Dedication page, it should read: “To my sister, Math. G.Y. Premalatha, and my brother-in-law, the late Professor G.N. Yoganarasimhan, Professor of Water Resources Engineering and Management, for showing me the direction Describes the fundamentals of uncooled infrared detectors, operational principles and material approaches Includes case studies based on Honeywell and Texas Instruments’ work on microbolometers Provides analyses of current patents with a look towards their strengths and weaknesses

Download or read book High Temperature Measurements of Materials written by Hiroyuki Fukuyama and published by Springer Science & Business Media. This book was released on 2008-12-28 with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt: A variety of industries – information technology, aerospace, automobile, and basic and new materials manufacturing – need technological innovations, which bring high-value-added and high-quality products at low cost not only because of global competition, but also because of the perspective of en- ronmental consciousness and regulation. Thermophysical properties of hi- temperature melts are indispensable for numerical simulations of material processes such as semiconductor and optical crystal growth of the melt, and castingofsuper-high-temperaturealloysforjet-engineturbineblades,inad- tion to welding in automobile manufacturing. Recent developments in process modeling provide 3D unsteady analysis of melt convection, temperature, and heat ?ux distribution, which enables us to predict product quality. In fact, 3D process visualization using computer modeling helps us to understand complicated phenomena occurring in the melt and to control the process. Accurate data are necessary to improve the modeling, which co- e?ectively engenders high-quality products. However, crucial obstacles render measurements of thermophysical properties di?cult at elevated temperatures because of high chemical reactivity and ?uidity of melts. Substantial and persistent challenges have been made to ascertain the precise thermophysical properties of high-temperature melts. This book describes the new techniques and latest developments in the measurements of atomic structure, density, surface tension, viscosity, heat capacity, thermal and mass di?usivity, th- mal conductivity, emissivity, and electrical conductivity of high-temperature melts. In addition to up-to-date improvements in conventional techniques, some new attempts are introduced to open a new scienti?c ?eld, that is, physics of high-temperature melts.

Download or read book Modeling and Measurements of the Bidirectional Reflectance of Microrough Silicon Surfaces written by Qunzhi Zhu and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Bidirectional reflectance is a fundamental radiative property of rough surfaces. Knowledge of the bidirectional reflectance is crucial to the emissivity modeling and heat transfer analysis. This thesis concentrates on the modeling and measurements of the bidirectional reflectance for microrough silicon surfaces and on the validity of a hybrid method in the modeling of the bidirectional reflectance for thin-film coated rough surfaces. The surface topography and the bidirectional reflectance distribution function (BRDF) of the rough side of several silicon wafers have been extensively characterized using an atomic force microscope and a laser scatterometer, respectively. The slope distribution calculated from the surface topographic data deviates from the Gaussian distribution. Both nearly isotropic and strongly anisotropic features are observed in the two-dimensional (2-D) slope distributions and in the measured BRDF for more than one sample. The 2-D slope distribution is used in a geometric-optics based model to predict the BRDF, which agrees reasonably well with the measured values. The side peaks in the slope distribution and the subsidiary peaks in the BRDF for two anisotropic samples are attributed to the formation of (311) planes during chemical etching. The correlation between the 2-D slope distribution and the BRDF has been developed. A boundary integral method is applied to simulate the bidirectional reflectance of thin-film coatings on rough substrates. The roughness of the substrate is one dimensional for simplification. The result is compared to that from a hybrid method which uses the geometric optics approximation to model the roughness effect and the thin-film optics to consider the interference due to the coating. The effects of the film thickness and the substrate roughness on the validity of the hybrid method have been investigated. The validity regime of the hybrid method is established for silicon dioxide films on silicon substrates in the visible wavelength range. The proposed method to characterize the microfacet orientation and to predict the BRDF may be applied to other anisotropic or non-Gaussian rough surfaces. The measured BRDF may be used to model the apparent emissivity of silicon wafers to improve the temperature measurement accuracy in semiconductor manufacturing processes. The developed validity regime for the hybrid method can be beneficial to future research related to the modeling for thin-film coated rough surfaces.

Download or read book Dissertation Abstracts International written by and published by . This book was released on 2001 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Remote Compositional Analysis written by Janice L. Bishop and published by Cambridge University Press. This book was released on 2019-11-28 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive overview of the spectroscopic, mineralogical, and geochemical techniques used in planetary remote sensing.

Download or read book Black Silicon written by Nuggehalli M. Ravindra and published by Momentum Press. This book was released on 2016-05-31 with total page 97 pages. Available in PDF, EPUB and Kindle. Book excerpt: The ability to tailor the properties of silicon, by controlling its surface morphology in the form of black silicon, is anticipated to revolutionize silicon photonics. Black Silicon (BSi), one of the approaches to counter the inherent disadvantages of Si, is a surface modification of crystalline Si (c-Si). This book presents a discussion on manufacturing BSi by various methods for morphing the surface of the material, which are economical and easily applicable for mass production. Comparisons of the surfaces of BSi fabricated by various techniques are presented and thermal, electrical, electronic, and optical properties of black silicon are described. Some major applications of BSi have been given and possible future directions in the research and development of BSi and its applications are identified.

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2010-10-29 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e