Download or read book Electron Beam Testing Using a Photocathode Scanning Electron Microscope written by Craig J. Scott and published by . This book was released on 1991 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Testing Technology written by John T.L. Thong and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.
Download or read book Electron Beam Testing of Integrated Circuits Using a Modified Scanning Electron Microscope written by Kian Sin Sim and published by . This book was released on 1990 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Analysis of Materials written by M. H. Loretto and published by Springer. This book was released on 1985-11-29 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: The examination of materials using electron beam techniques has developed continuously for over twenty years and there are now many different methods of extracting detailed structural and chemical information using electron beams. These techniques which include electron probe microanalysis, trans mission electron microscopy, Auger spectroscopy and scanning electron microscopy have, until recently, developed more or less independently of each other. Thus dedicated instruments designed to optimize the performance for a specific application have been available and correspondingly most of the available textbooks tend to have covered the theory and practice of an individual technique. There appears to be no doubt that dedicated instru ments taken together with the specialized textbooks will continue to be the appropriate approach for some problems. Nevertheless the underlying electron-specimen interactions are common to many techniques and in view of the fact that a range of hybrid instruments is now available it seems appropriate to provide a broad-based text for users of these electron beam facilities. The aim of the present book is therefore to provide, in a reasonably concise form, the material which will allow the practitioner of one or more of the individual techniques to appreciate and to make use of the type of information which can be obtained using other electron beam techniques.
Download or read book Scanning Electron Microscopy X Ray Microanalysis and Analytical Electron Microscopy written by Charles E. Lyman and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the last four decades remarkable developments have taken place in instrumentation and techniques for characterizing the microstructure and microcomposition of materials. Some of the most important of these instruments involve the use of electron beams because of the wealth of information that can be obtained from the interaction of electron beams with matter. The principal instruments include the scanning electron microscope, electron probe x-ray microanalyzer, and the analytical transmission electron microscope. The training of students to use these instruments and to apply the new techniques that are possible with them is an important function, which. has been carried out by formal classes in universities and colleges and by special summer courses such as the ones offered for the past 19 years at Lehigh University. Laboratory work, which should be an integral part of such courses, is often hindered by the lack of a suitable laboratory workbook. While laboratory workbooks for transmission electron microscopy have-been in existence for many years, the broad range of topics that must be dealt with in scanning electron microscopy and microanalysis has made it difficult for instructors to devise meaningful experiments. The present workbook provides a series of fundamental experiments to aid in "hands-on" learning of the use of the instrumentation and the techniques. It is written by a group of eminently qualified scientists and educators. The importance of hands-on learning cannot be overemphasized.
Download or read book Scanning Electron Microscopy written by Oliver C. Wells and published by McGraw-Hill Companies. This book was released on 1974 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Working with a Scanning Electron Microscope written by Steve K. Chapman and published by . This book was released on 1986 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Microanalysis written by Donald Robert Beaman and published by . This book was released on 1972 with total page 106 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scanning Electron Microscope Optics And Spectrometers written by Anjam Khursheed and published by World Scientific. This book was released on 2010-11-02 with total page 417 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself.The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.
Download or read book Electron Microbeam Analysis written by Abraham Boekestein and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 271 pages. Available in PDF, EPUB and Kindle. Book excerpt: This supplement of Mikrochimica Acta contains selected papers from the Second Workshop of the European Microbeam Analysis Society (EMAS) "Modern Developments and Applications in Microbeam Analysis", on which took place in May 1991 in Dubrovnik (Yugoslavia). EMAS was founded in 1987 by members from almost all European countries, in order to stimulate research, applications and development of all forms of microbeam methods. One of the most important activities EMAS is the organisation of biannual workshops for demonstrating the current status and developing trends of microbeam methods. For this meeting, EMAS chose to highlight the following topics: electron-beam microanalysis (EPMA) of thin films and quantitative analysis of ultra-light elements, Auger electron spectroscopy (AES), electron energy loss spec trometry (EELS), high-resolution transmission electron microscopy (HRTEM), quantitative analysis of biological samples and standard-less electron-beam microanalysis. Seven introductory lectures and almost seventy poster presentations were given by speakers from twelve European and two non-European (U.S.A. and Argentina) countries were made. One cannot assume that all fields of research in Europe were duly represented, but a definite trend is discernible. EPMA with wavelength-dispersive spectrometry (WDS) or energy-dispersive spectrometry (EDS) is the method with by far the widest range of applications, followed by TEM with EELS and then AES. There are also interesting suggestions for the further development of new appa ratus with new fields of application. Applications are heavily biased towards materials science (thin films in microelectronics and semicon ductors), ceramics and metallurgy, followed by analysis of biological and mineral samples.
Download or read book A Procedure to Characterize Electron beam Resist Using a Scanning Electron Microscope and Study of Process Optimization of an Electron Beam Imaging System Using Experimental Design Methods written by Randall C. Pyles and published by . This book was released on 1992 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: "A procedure is established which will enable the study of contrast and sensitivity characteristics of electron-beam resist materials. The imaging system includes an electron beam-sensitive resist coating on an oxidized silicon substrate exposed with a scanning electron microscope (SEM) and developed in a suitable solvent. The results correlate with published data. A chemically amplified electron-beam resist imaging system is studied using a three level, three factor Box-Behnken design. The effects of postbake temperature, postbake time, and development time on contrast and sensitivity are presented."--Abstract.
Download or read book Electron Probe Microanalysis written by L. S. Birks and published by Krieger Publishing Company. This book was released on 1979 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Practical Scanning Electron Microscopy written by Josoph Irwin Goldstein and published by . This book was released on 1975 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Some Aspects of Using a Scanning Electron Microscope for Total Dose Testing written by K. F. Galloway and published by . This book was released on 1977 with total page 33 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report addresses a number of aspects involved in using a Scanning Electron Microscope (SEM) for radiation testing of semiconductor devices. Problems associated with using the low energy electron beam to simulate 60Co exposure and a method for estimating the total absorbed dose in critical device oxides are discussed. The method is based on the experimentally determined expression for electron energy dissipation versus penetration depth in solid materials of Everhart and Hoff. An appendix giving the method of estimating the total absorbed dose in a form sutiable for ASTM deliberations is included. (Author).
Download or read book Scanning Electron Microscopy and X ray Microanalysis written by Joseph I. Goldstein and published by . This book was released on 1984 with total page 673 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Springer Handbook of Microscopy written by Peter W. Hawkes and published by Springer Nature. This book was released on 2019-11-02 with total page 1561 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book features reviews by leading experts on the methods and applications of modern forms of microscopy. The recent awards of Nobel Prizes awarded for super-resolution optical microscopy and cryo-electron microscopy have demonstrated the rich scientific opportunities for research in novel microscopies. Earlier Nobel Prizes for electron microscopy (the instrument itself and applications to biology), scanning probe microscopy and holography are a reminder of the central role of microscopy in modern science, from the study of nanostructures in materials science, physics and chemistry to structural biology. Separate chapters are devoted to confocal, fluorescent and related novel optical microscopies, coherent diffractive imaging, scanning probe microscopy, transmission electron microscopy in all its modes from aberration corrected and analytical to in-situ and time-resolved, low energy electron microscopy, photoelectron microscopy, cryo-electron microscopy in biology, and also ion microscopy. In addition to serving as an essential reference for researchers and teachers in the fields such as materials science, condensed matter physics, solid-state chemistry, structural biology and the molecular sciences generally, the Springer Handbook of Microscopy is a unified, coherent and pedagogically attractive text for advanced students who need an authoritative yet accessible guide to the science and practice of microscopy.
Download or read book Electron Beam Charging of Polymers in a Scanning Electron Microscope written by Grady Franklin Bradley and published by . This book was released on 1992 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
