Download or read book Electrical Probes for Plasma Diagnostics written by John Douglas Swift and published by Iliffe. This book was released on 1969 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Diagnostics written by Orlando Auciello and published by Academic Press. This book was released on 2013-10-22 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.
Download or read book Electric Probes for Plasma Diagnostics written by John Douglas Swift and published by . This book was released on 1970 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2000-08-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.
Download or read book Cold Plasma in Food and Agriculture written by NN Misra and published by Academic Press. This book was released on 2016-07-15 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cold Plasma in Food and Agriculture: Fundamentals and Applications is an essential reference offering a broad perspective on a new, exciting, and growing field for the food industry. Written for researchers, industry personnel, and students interested in nonthermal food technology, this reference will lay the groundwork of plasma physics, chemistry, and technology, and their biological applications. Food scientists and food engineers interested in understanding the theory and application of nonthermal plasma for food will find this book valuable because it provides a roadmap for future developments in this emerging field. This reference is also useful for biologists, chemists, and physicists who wish to understand the fundamentals of plasma physics, chemistry, and technology and their biological interactions through applying novel plasma sources to food and other sensitive biomaterials. Examines the topic of cold plasma technology for food applications Demonstrates state-of-the-art developments in plasma technology and potential solutions to improve food safety and quality Presents a solid introduction for readers on the topics of plasma physics and chemistry that are required to understand biological applications for foods Serves as a roadmap for future developments for food scientists, food engineers, and biologists, chemists, and physicists working in this emerging field
Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
Download or read book Langmuir Probe in Theory and Practice written by Evgeny V. Shun'ko and published by Universal-Publishers. This book was released on 2009 with total page 251 pages. Available in PDF, EPUB and Kindle. Book excerpt: From flat-panel televisions to thermonuclear fusion for energy production, plasmas currently have numerous and wide applications in sciences and industry. A diversity of plasma diagnostics is available to physicists and engineers to measure and control plasma parameters. Among them, the Langmuir probe is the most inexpensive and most popular instrument and method. The Langmuir probe is a small electrode which is submerged in plasma in order to measure the probe current-voltage characteristic. The same characteristic is processed further to derive the electron and ion concentration, the electron distribution function, and the plasma potential at the probe location. Langmuir probe diagnostics afford rapid measurements of the electron distribution function and plasma potential at a good time resolution, 10-8 seconds in a wide range of plasma densities 10+3 - 10+14 cm-3, and the electron energy from the room temperature to hundreds of electron-volts - qualities which are essential for researchers. In view of these facts, Langmuir probe diagnostics are applied very frequently to measuring plasma parameters. This book will be useful in teaching plasma diagnostics to undergraduate and graduate students in plasma physics courses. And it will also serve as a practical reference manual for physicists and engineers working in the growing area of plasma physics. The reader of this book will learn what kind of plasma parameters the Langmuir probe can measure, how to develop the probe diagnostics for specific cases, and how the probe data obtained should be processed to deduce reliable plasma parameters. In this book, the reader can find not only the basic physics information important to understanding the principles of probe operation, but also how the "real" probe disturbs plasma, and how it is possible to reconstruct undisturbed plasma parameters with available probe data.
Download or read book Plasma Diagnostics written by W. Lochte-Holtgreven and published by . This book was released on 1968 with total page 954 pages. Available in PDF, EPUB and Kindle. Book excerpt: Market: Plasma physicists and students. Upon publication in 1968, Plasma Diagnostics represented the most up- to-date survey of the experimental methods used in plasma analysis, including the necessary theoretical background. This work emphasizes spectroscopic techniques along with in-depth sections on laser techniques and electric and magnetic probe methods. The evaluation of collision and transport cross sections, heat and electrical conductivity, and viscosity are some of the many applications of plasma diagnostics reviewed as well. This long-awaited reprint volume is of interest to both physicists and students of theoretical physics as it deals with plasma theory from a fundamental point of view, stressing a careful derivation and discussion of the equations.
Download or read book Electric Probes in Stationary and Flowing Plasmas written by P.M. Chung and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 163 pages. Available in PDF, EPUB and Kindle. Book excerpt: The electric probe has long been used as a fundamental diagnostic tool for measuring the local properties of a plasma. Since Langmuir first developed the electric-probe technique in 1924, probes have been used to measure electron densities and temperatures in a wide variety of gaseous ionized media, such as electric discharges, afterglows, ionizing shock waves, flames, MHD, and plasma-jet flows, reentry vehicle flow fields, and atmospheric and space plasmas. The first systematic account of modern theories of electriC-probe behavior was given by Chen (1965), who also provided practical information on experimental techniques. A subsequent survey by Swift and Schwar (1970), which was representative of results contained in the literature through 1969, included additional information on some of the modern theories and on practical details of probe utilization. The purpose of this volume is to supplement the previously mentioned two works by providing an account of a large body of the up-to-date informa tion available on electric probes, particularly in the areas of transitional and continuum-flow phenomena, and by offering, for all domains of probe appli cation, a critical appraisal of the more significant probe theories and experi mental investigations in the literature.
Download or read book Plasma Diagnostics written by A. A. Ovsyannikov and published by Cambridge Int Science Publishing. This book was released on 2000 with total page 585 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book contains the results of investigations of electro-physical, chemical, gas-dynamic and other processes in low-temperature plasma and their diagnostics. Both conventional spectral and optical methods of diagnostics and new and laser methods are examined, together with electrostatic probes for investigating rarefied and dense plasma, especially in the presence of chemical reactions. Problems of probe calorimetry of plasma flows are investigated and approaches to measuring the spatial and time characteristics of plasma outlined. Procedural problems of processing experimental data and automating diagnostic experiments are discussed.
Download or read book Atmospheric Pressure Plasma written by Anton Nikiforov and published by BoD – Books on Demand. This book was released on 2019-04-24 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma as the fourth state of matter is an ionized gas consisting of both negative and positive ions, electrons, neutral atoms, radicals, and photons. In the last few decades, atmospheric-pressure plasmas have started to attract increasing attention from both scientists and industry due to a variety of potential applications. Because of increasing interest in the topic, the focus of this book is on providing engineers and scientists with a fundamental understanding of the physical and chemical properties of different atmospheric-pressure plasmas via plasma diagnostic techniques and their applications. The book has been organized into two parts. Part I focuses on the latest achievements in advanced diagnostics of different atmospheric-pressure plasmas. Part II deals with applications of different atmospheric-pressure plasmas.
Download or read book Introduction to Plasma Physics and Controlled Fusion written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.
Download or read book A Formulary for Plasma Physics written by André Anders and published by Andre Anders. This book was released on 1990 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electrical Diagnostics of Radio Frequency Glow Discharges Used for Plasma Etching written by Walter Eugene Mlynko and published by . This book was released on 1983 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Download or read book Physics of Plasma Wall Interactions in Controlled Fusion written by D. E. Post and published by Springer Science & Business Media. This book was released on 2013-11-21 with total page 1178 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlled thermonuclear fusion is one of the possible candidates for long term energy sources which will be indispensable for our highly technological society. However, the physics and technology of controlled fusion are extremely complex and still require a great deal of research and development before fusion can be a practical energy source. For producing energy via controlled fusion a deuterium-tritium gas has to be heated to temperatures of a few 100 Million °c corres ponding to about 10 keV. For net energy gain, this hot plasma has to be confined at a certain density for a certain time One pro mising scheme to confine such a plasma is the use of i~tense mag netic fields. However, the plasma diffuses out of the confining magnetic surfaces and impinges on the surrounding vessel walls which isolate the plasma from the surrounding air. Because of this plasma wall interaction, particles from the plasma are lost to the walls by implantation and are partially reemitted into the plasma. In addition, wall atoms are released and can enter the plasma. These wall atoms or impurities can deteriorate the plasma performance due to enhanced energy losses through radiation and an increase of the required magnetic pressure or a dilution of the fuel in the plasma. Finally, the impact of the plasma and energy on the wall can modify and deteriorate the thermal and mechanical pro perties of the vessel walls.
Download or read book The Development of Electrical Plasma Diagnostics for HiPIMS Discharges written by Phitsanu Poolcharuansin and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: High power impulse magnetron sputtering (HiPIMS) is a plasma-based thin film deposition technique in which extremely high power pulses are applied to a conventional magnetron sputtering source. As a result, the plasma density in HiPIMS discharges is considerably increased up to 1E19 per cubic metre, about three orders of magnitude higher than that in conventional direct current magnetron sputtering (DCMS) discharges. Hence the vapour of the sputtered species becomes highly ionised, leading to remarkable improvement in the microstructure and the properties of depositing films. To better control the deposition process, it is important to gain insights into the properties and the dynamics of the HiPIMS plasmas. This thesis is associated with the investigations on HiPIMS plasmas using a number of electrical diagnostic tools including a Langmuir probe, a retarding field energy analyser and a gridded quartz crystal microbalance. It was shown, using a Langmuir probe analysis, that there are three distinct groups of electrons generated during first the 4 microseconds of the HiPIMS pulse. These electrons are super-thermal or beam-like electrons with effective temperatures of up to 100 eV, hot electrons with temperatures up to 7 eV and cold electrons with temperatures
