Download or read book Modeling of Chemical Vapor Deposition of Tungsten Films written by Chris R. Kleijn and published by Birkhäuser. This book was released on 2013-11-11 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which might arise from this double approach, we feel that the presentation of both sets of results in one book will be very useful for people working in similar projects.
Download or read book Advances in Coatings Deposition and Characterization written by MDPI and published by MDPI. This book was released on 2020-12-29 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coatings offer the unique opportunity to create architectures that combine the functionality of two or more materials, conferring unique properties to objects with an extremely large palette of solutions. For this flexibility, thick and thin films have terrific impacts on the most relevant societal challenges. Computers, food packaging, airplanes, and cars, to mention a few familiar objects from everyday life, rely heavily on coatings. To celebrate the key role that coatings have in society, and in science and technology, this book collects a selection of relevant reviews and original research articles published in “Coatings” in 2017 and 2018. Papers have been selected based on their broad impact and balancing between the two major aspects of coatings science and technology: deposition and characterization.
Download or read book Handbook of Fluid Dynamics written by Richard W. Johnson and published by CRC Press. This book was released on 2016-04-06 with total page 1544 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Fluid Dynamics offers balanced coverage of the three traditional areas of fluid dynamics—theoretical, computational, and experimental—complete with valuable appendices presenting the mathematics of fluid dynamics, tables of dimensionless numbers, and tables of the properties of gases and vapors. Each chapter introduces a different fluid dynamics topic, discusses the pertinent issues, outlines proven techniques for addressing those issues, and supplies useful references for further research. Covering all major aspects of classical and modern fluid dynamics, this fully updated Second Edition: Reflects the latest fluid dynamics research and engineering applications Includes new sections on emerging fields, most notably micro- and nanofluidics Surveys the range of numerical and computational methods used in fluid dynamics analysis and design Expands the scope of a number of contemporary topics by incorporating new experimental methods, more numerical approaches, and additional areas for the application of fluid dynamics Handbook of Fluid Dynamics, Second Edition provides an indispensable resource for professionals entering the field of fluid dynamics. The book also enables experts specialized in areas outside fluid dynamics to become familiar with the field.
Download or read book CVD XI written by Karl E. Spear and published by . This book was released on 1990 with total page 762 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Innovative Processing Of Films And Nanocrystalline Powders written by Kwang-leong Choy and published by World Scientific. This book was released on 2002-10-14 with total page 309 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of advanced engineering ceramic films and powders for structural and functional applications is expanding rapidly. Improved materials and innovative methods of fabrication are needed to enhance the engineering performance and reduce the production costs. This book highlights innovative/cost-effective material-processing methods, at a mature production stage and also in development. In addition, issues and strategies associated with scaling-up are emphasized.
Download or read book Theory and Application of Laser Chemical Vapor Deposition written by J. Mazumder and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Download or read book Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition written by Theodore M. Besmann and published by The Electrochemical Society. This book was released on 1996 with total page 922 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Transport Phenomena in Materials Processing written by and published by Academic Press. This book was released on 1996-06-25 with total page 447 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials processing and manufacturing are fields of growing importance whereby transport phenomena play a central role in many of the applications. This volume is one of the first collections of contributions on thesubject. The five papers cover a wide variety of applications
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Download or read book Numerical Investigation of the Physical Vapor Deposition of Titanium written by Jitendra Balakrishnan and published by . This book was released on 2001 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Direct Modeling For Computational Fluid Dynamics Construction And Application Of Unified Gas kinetic Schemes written by Kun Xu and published by World Scientific. This book was released on 2014-12-23 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt: Computational fluid dynamics (CFD) studies the flow motion in a discretized space. Its basic scale resolved is the mesh size and time step. The CFD algorithm can be constructed through a direct modeling of flow motion in such a space. This book presents the principle of direct modeling for the CFD algorithm development, and the construction unified gas-kinetic scheme (UGKS). The UGKS accurately captures the gas evolution from rarefied to continuum flows. Numerically it provides a continuous spectrum of governing equation in the whole flow regimes.
Download or read book Transport Simulation in Microelectronics written by Alfred Kersch and published by Birkhäuser. This book was released on 2012-12-06 with total page 235 pages. Available in PDF, EPUB and Kindle. Book excerpt: Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod eling physical events occurring on microscopic scales which are intricately connected to the particle structure of nature. Here physical phenomena can be simulated by following simulation particles (such as electrons, molecules, photons, etc. ) through a statistical sampling of scattering events. Monte Carlo is, however, generally looked on as a last resort due to the extremely slow convergence of these methods. It is of interest, then, to examine when in microelectronics it is necessary to use Monte Carlo methods, how such methods may be improved, and what are the alternatives. This book ad dresses three general areas of simulation which frequently arise in semicon ductor modeling where Monte Carlo methods playa significant role. In the first chapter the basic mathematical theory of the Boltzmann equation for particle transport is presented. The following chapters are devoted to the modeling of the transport processes and the associated Monte Carlo meth ods. Specific examples of industrial applications illustrate the effectiveness and importance of these methods. Two of these areas concern simulation of physical particles which may be assigned a time dependent position and velocity. This includes the molecules of a dilute gas used in such processing equipment as chemi cal vapor decomposition reactors and sputtering reactors. We also consider charged particles moving within a semiconductor lattice.
Download or read book Computational Mechanics 95 written by S.N. Atluri and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 3181 pages. Available in PDF, EPUB and Kindle. Book excerpt: AI!, in the earlier conferences (Tokyo, 1986; Atlanta, 1988, Melbourne, 1991; and Hong Kong, 1992) the response to the call for presentations at ICES-95 in Hawaii has been overwhelming. A very careful screening of the extended abstracts resulted in about 500 paper being accepted for presentation. Out of these, written versions of about 480 papers reached the conference secretariat in Atlanta in time for inclusion in these proceedings. The topics covered at ICES-95 range over the broadest spectrum of computational engineering science. The editors thank the international scientific committee, for their advice and encouragement in making ICES-95 a successful scientific event. Special thanks are expressed to the International Association for Boundary Elements Methods for hosting IABEM-95 in conjunction with ICES-95. The editors here express their deepest gratitude to Ms. Stacy Morgan for her careful handling of a myriad of details of ICES-95, often times under severe time constraints. The editors hope that the readers of this proceedings will find a kaleidoscopic view of computational engineering in the year 1995, as practiced in various parts of the world. Satya N. Atluri Atlanta, Georgia, USA Genki Yagawa Tokyo,Japan Thomas A. Cruse Nashville, TN, USA Organizing Committee Professor Genki Yagawa, University of Tokyo, Japan, Chair Professor Satya Atluri, Georgia Institute of Technology, U.S.A.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book BioMEMS written by Simona Badilescu and published by CRC Press. This book was released on 2016-04-19 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written to cover often overlooked areas in the field of bioMEMS, this volume bridges topics related to biomolecules and complex biological entities with those directly related to the design, fabrication, and characterization of the devices. Unlike other references, this text aids with the fundamental physicochemical understanding of biological processes relevant to the performance of various biosensing devices. Accessible to seniors and graduate students enrolled in engineering programs, the book includes problems in each chapter as well as case studies to provide real-life examples.
Download or read book High Performance Computing in Science and Engineering 08 written by Wolfgang E. Nagel and published by Springer Science & Business Media. This book was released on 2009-01-10 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: The discussions and plans on all scienti?c, advisory, and political levels to realize an even larger “European Supercomputer” in Germany, where the hardware costs alone will be hundreds of millions Euro – much more than in the past – are getting closer to realization. As part of the strategy, the three national supercomputing centres HLRS (Stuttgart), NIC/JSC (Julic ̈ h) and LRZ (Munich) have formed the Gauss Centre for Supercomputing (GCS) as a new virtual organization enabled by an agreement between the Federal Ministry of Education and Research (BMBF) and the state ministries for research of Baden-Wurttem ̈ berg, Bayern, and Nordrhein-Westfalen. Already today, the GCS provides the most powerful high-performance computing - frastructure in Europe. Through GCS, HLRS participates in the European project PRACE (Partnership for Advances Computing in Europe) and - tends its reach to all European member countries. These activities aligns well with the activities of HLRS in the European HPC infrastructure project DEISA (Distributed European Infrastructure for Supercomputing Appli- tions) and in the European HPC support project HPC-Europa. Beyond that, HLRS and its partners in the GCS have agreed on a common strategy for the installation of the next generation of leading edge HPC hardware over the next ?ve years. The University of Stuttgart and the University of Karlsruhe have furth- more agreed to bundle their competences and resources.
Download or read book Handbook of Software Solutions for ICME written by Georg J. Schmitz and published by John Wiley & Sons. This book was released on 2016-09-20 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt: As one of the results of an ambitious project, this handbook provides a well-structured directory of globally available software tools in the area of Integrated Computational Materials Engineering (ICME). The compilation covers models, software tools, and numerical methods allowing describing electronic, atomistic, and mesoscopic phenomena, which in their combination determine the microstructure and the properties of materials. It reaches out to simulations of component manufacture comprising primary shaping, forming, joining, coating, heat treatment, and machining processes. Models and tools addressing the in-service behavior like fatigue, corrosion, and eventually recycling complete the compilation. An introductory overview is provided for each of these different modelling areas highlighting the relevant phenomena and also discussing the current state for the different simulation approaches. A must-have for researchers, application engineers, and simulation software providers seeking a holistic overview about the current state of the art in a huge variety of modelling topics. This handbook equally serves as a reference manual for academic and commercial software developers and providers, for industrial users of simulation software, and for decision makers seeking to optimize their production by simulations. In view of its sound introductions into the different fields of materials physics, materials chemistry, materials engineering and materials processing it also serves as a tutorial for students in the emerging discipline of ICME, which requires a broad view on things and at least a basic education in adjacent fields.
