Download or read book Silicon Nitride Silicon Dioxide and Emerging Dielectrics 10 written by R. Ekwal Sah and published by The Electrochemical Society. This book was released on 2009 with total page 871 pages. Available in PDF, EPUB and Kindle. Book excerpt: The issue of ECS Transactions contains papers presented at the Tenth International Symposium on Silicon Nitride, Silicon Dioxide, and Alternate Emerging Dielectrics held in San Francisco on May 24-29, 2009. The papers address a very wide range of fabrication and characterization techniques, and applications of thin dielectric films in microelectronic and optoelectronic devices. More specific topics addressed by the papers include reliability, interface states, gate oxides, passivation, and dielctric breakdown.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1982 with total page 1282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book Diffusion of Metals in Silicon Dioxide written by John David McBrayer and published by . This book was released on 1983 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optics Manufacturing written by Christoph Gerhard and published by CRC Press. This book was released on 2017-12-14 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical components are essential key elements in modern engineering and everyday life. The education of skilled personnel and specialists in the fields of theoretical and practical optics manufacturing is of essential importance for next-generation technologies. Against this background, this book provides the basis for the education and advanced training of precision and ophthalmic optics technicians, craftsmen, and foremen, and it is an extensive reference work for students, academics, optical designers or shop managers, and production engineers. It not only covers particularly used and applied machines, working materials, testing procedures, and machining steps for classical optics manufacturing, but it also addresses the production and specification of optical glasses as well as unconventional production techniques and novel approaches. Optics Manufacturing: Components and Systems furthermore covers the basics of light propagation and provides an overview on optical materials and components; presents an introduction and explanation of the necessary considerations and procedures for the initial definition of manufacturing tolerances and the relevant industrial standards for optics manufacturing; and addresses the production of micro optics, the assembly of opto-mechanical setups and possible manufacturing errors, and the impact of the resulting inaccuracies. In order to allow fast and clear access to the most essential information, each chapter ends with a short summary of the most important aspects, including an explanation of relevant equations, symbols, and abbreviations. For further reading, extensive lists of references are also provided. Finally, exercises on the covered basic principles of optics, approaches, and techniques of optics manufacturing—including their corresponding detailed solutions—are found in the appendix.
Download or read book Solid State Physics Fluidics and Analytical Techniques in Micro and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms. Topics include: Crystallography and the crystalline materials used in many semiconductor devices Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS Single crystal Si properties that conspire to make Si so important Optical properties of bulk 3D metals, insulators, and semiconductors Effects of electron and photon confinement in lower dimensional structures How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics Metamaterials and how they could make for perfect lenses, changing the photonic field forever Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior Electromechanical and optical analytical processes in miniaturized components and systems The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
Download or read book The Physics and Chemistry of SiO2 and the Si SiO2 Interface written by B.E. Deal and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 543 pages. Available in PDF, EPUB and Kindle. Book excerpt: The properties of Si02 and the Si-Si02 interface provide the key foundation onto which the majority of semiconductor device technology has been built Their study has consumed countless hours of many hundreds of investigators over the years, not only in the field of semiconductor devices but also in ceramics, materials science, metallurgy, geology, and mineralogy, to name a few. These groups seldom have contact with each other even though they often investigate quite similar aspects of the Si02 system. Desiring to facilitate an interaction between these groups we set out to organize a symposium on the Physics and Chemistry of Si()z and the Si-Si()z Interface under the auspices of The Electrochemical Society, which represents a number of the appropriate groups. This symposium was held at the 173rd Meeting of The Electrochemical Society in Atlanta, Georgia, May 15-20, 1988. These dates nearly coincided with the ten year anniversary of the "International Topical Conference on the Physics of Si02 and its Interfaces" held at mM in 1978. We have modeled the present symposium after the 1978 conference as well as its follow on at North Carolina State in 1980. Of course, much progress has been made in that ten years and the symposium has given us the opportunity to take a multidisciplinary look at that progress.
Download or read book Glass Science written by R. H. Doremus and published by Wiley-Interscience. This book was released on 1994-04 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This Second Edition of Robert H. Doremus's classic, Glass Science, has been extensively revised and updated to reflect recent advances, while retaining the pedagogical structure that made its predecessor a superb tool for both teaching and professional research. Special emphasis is placed on areas of research that have been particularly active in recent years. Two new chapters have been added: one covers chemical durability [the reaction of glass with water], which includes recent work related to corrosion of glass and radioactive waste disposal: the other concerns the reaction of gasses with glass, especially oxygen. Other new or expanded discussions cover recent advances in the structure of glass, zirconium fluoride glasses, and electrical conductivity of glass.".
Download or read book Diffusion in Minerals and Melts written by Youxue Zahng and published by Walter de Gruyter GmbH & Co KG. This book was released on 2018-12-17 with total page 1056 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume 72 of Reviews in Mineralogy and Geochemistry represents an extensive compilation of the material presented by the invited speakers at a short course on Diffusion in Minerals and Melts held prior (December 11-12, 2010) to the Annual fall meeting of the American Geophysical Union in San Francisco, California. The short course was held at the Napa Valley Marriott Hotel and Spa in Napa, California and was sponsored by the Mineralogical Society of America and the Geochemical Society.
Download or read book Fundamentals of Microfabrication and Nanotechnology Three Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1983 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Download or read book Proceedings of the International Symposium on Semiconductor Wafer Bonding written by and published by . This book was released on 1993 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Tech Notes written by and published by . This book was released on 1983 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2010-10-29 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Download or read book Technology of Si Ge and SiC Technologie Von Si Ge und SiC written by W. Dietze and published by Springer Science & Business Media. This book was released on 1983-12 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
Download or read book Silicon Nitride Silicon Dioxide and Emerging Dielectrics 9 written by Ram Ekwal Sah and published by The Electrochemical Society. This book was released on 2007 with total page 863 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue of ECS Transactions contains the papers presented in the symposium on Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Emerging Dielectics held May 6-11, 2007 in Chicago. Papers were presented on deposition, characterization and applications of the dielectrics including high- and low-k dielectrics, as well as interface states, device characterization, reliabiliy and modeling.
Download or read book Solid State Chemical Sensors written by Jiri Janata and published by Academic Press. This book was released on 2012-12-02 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solid State Chemical Sensors reviews the basic chemical and physical principles involved in the construction and operation of solid state sensors. A major portion of the book is devoted to explanation of the basic mechanism of operation and the many actual and potential applications of field effect transistors for gas and solution sensing. This text is comprised of four chapters; the first of which describes the basics of device fabrication. Emphasis is placed on the physical description of semiconductor devices with catalytic metal gates, along with their drawbacks and their promise. The behavior of hydrogen in the Pd-SiO2 system is also considered, and some applications of hydrogen-sensitive transistors, such as smoke detection and biochemical reaction monitoring, are described. The second chapter focuses on chemically sensitive field effect transistors and their thermodynamics, while the third chapter explains the general fabrication procedure for solid state chemical sensors. The final chapter introduces the reader to piezoelectric and pyroelectric chemical sensors, paying particular attention to the sensor nature of piezoelectricity, the piezoelectric gravimetric sensor, and pyroelectric gas analysis. This book is intended to assist electrical engineers in understanding the chemistry involved in the construction and operation of solid state sensors and to educate chemists in solid state science.
