Download or read book Diagnostics of a Glow Discharge Used to Produce Amorphous Silicon Films written by Alan Gallagher and published by . This book was released on 1981 with total page 4 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films A Final Subcontract Report written by and published by . This book was released on 1984 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films written by A. Gallagher and published by . This book was released on 1981 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films written by Alan C. Gallagher and published by . This book was released on 1984 with total page 38 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report and recent publications cited summarize our measurements of the neutral radicals produced in pure silane discharges, our measurements of the interaction of silane with a growing amorphous silicon surface, qualitative models of discharge neutral radical chemistry, and quantitative models of dc discharge ion chemistry. All radicals of the monosilane and disilane groups have been measured and are reported as a function of discharge parameters, but not yet for the full range of parameters that must be investigated for detailed analysis.
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous silicon Films written by A. Gallagher and published by . This book was released on 1981 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films written by A. Gallagher and published by . This book was released on 1981 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films written by and published by . This book was released on 1982 with total page 26 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous silicon Films written by A. Gallagher and published by . This book was released on 1981 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films Quarterly Progress Report October 15 1982 January 14 1983 written by and published by . This book was released on 1983 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films Quarterly Progress Report July 15 1982 October 14 1982 written by and published by . This book was released on 1982 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous silicon Films Quarterly Progress Report October 15 1981 January 14 1982 written by and published by . This book was released on 1982 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of film deposition monitors to rapidly and accurately measure a-Si:H deposition at various surfaces of the discharge is reported. Deposition rates have been measured in-situ within a few minutes, and many different discharge conditions can be probed in a short time. The frequency shift of quartz crystals was used for monitoring thickness. The method used and results obtained are reported. The ratio of deposited silicon atoms to depleted SiH4 molecules is plotted vs. the discharge power to flow ratio. (LEW).
Download or read book Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films Subcontract Report 15 April 1984 14 April 1985 written by and published by . This book was released on 1985 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Measurements of monosilane and disilane radicals were made at the surface of dc glow discharges (GD) in pure silane and silane-argon mixtures. These observations were interpreted as discharge kinetic models. It was inferred that the dominant radical, SiH/sub 3/, is produced in the gas and is primarily responsible for film growth. The heavier radicals observed in the gas appear to be a consequence of surface reactions, as is the disilane, a major product of the monosilane decomposition. A detailed model of the ion chemistry in the discharge was formulated to derive theoretical distributions of ions at the cathodes of low-pressure dc discharges. Chemical vapor deposition (CVD) rates of silane and disilane, measured previously in the laboratory, have now also been interpreted in detail to yield a self-consistent model for the CVD process. This model identifies and quantifies the role of H/sub 2/ as an inhibitor of silane GD and CVD deposition. Implications of these discoveries to deposition rates and film properties are discussed.
Download or read book Diagnostics of a Glow Discharge Used to Produce Amorphous Silicon Films Technical Progress Report August 15 1980 November 14 1980 written by and published by . This book was released on 1980 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Construction of the basic apparatus has been completed during this period, and many apparatus checks have been completed. Almost complete SiH4 dissociation has been obtained in approx. 950 C ovens between the turbo and rough pumps, so that reliable, long-term operation is achieved. A base vacuum of approx. 10−7 Torr is achieved in the discharge chamber in a few hours, and approx. 10−8 overnight, so that gas-phase impurity levels as low as 10−7 are ready achievable. The SiH4 inlet lines are entirely bakeable stainless steel and permanently closed to air, to maintain the tank purity of SiH4. A distillation procedure to further clean the tank SiH4 is under study. Thus we should be able to study the effects of very small, controlled levels of impurities. The discharge configurations are shown, and the ratios of SixH/sub n/ fluxes for three types of discharges in pure SiH4 are given. (WHK).
Download or read book SERI Photovoltaic Advanced Research and Development Bibliography 1982 1985 written by and published by . This book was released on 1986 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Solar Energy Update written by and published by . This book was released on 1981 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1990 with total page 976 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 834 pages. Available in PDF, EPUB and Kindle. Book excerpt:
