Download or read book Development of Thin film Based Microdevices and Process Enhancement for Making the Same written by Qing Guo and published by . This book was released on 2012 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microdevices driven by Lead Zirconate Titanate (PbZrxTi1-xO3 or PZT) have received wide attention recently, because they could potentially outperform other MEMS devices in terms of bandwidth, energy density, and actuation strength. PZT integrated microdevice is undoubtedly promising, but its development and fabrication still remains challenging. To cope with such challenges and develop a well functional microdevice with adoption of thin-film PZT in sub-millimeter range requires thorough understand on its properties and fundamental behaviors both in theoretical and practical way. First of all, I developed and improved the microfabrication procedure of PZT thin film microsensor and microactuator. Such procedure includes modified sol-gel preparation, stable fabrication of bottom electrode with proper micro surface texture, microdevice wire bonding and packaging. Meanwhile, during the study I characterized the patterns of thin-film PZT defects. Through parametric study, the degree of bottom electrode porosity is revealed to be the most critical parameter surpassing others strongly affects the deposited thin-film PZT quality. A second parametric study is simultaneously carried out to ensure the fabrication repeatability of low porous bottom electrode. These contributions not only greatly improve the yield of thereafter lab-fabricated thin-film PZT but also provide an effective way for quick prediction of ongoing PZT fabrication yield based on the judgment of one parameter. Fabrication of satisfied thin-film PZT could be difficult, however, measuring material piezoelectric properties of just-prepared PZT could be even challenging. Although there are many currently available solutions, they are either complicated or expensive. Most important, they are not applicable for thin-film PZT application. I developed an easy, low cost, but effective method to deal with the thin film piezoelectric coefficient d33 through a mini impact hammer approach. Such method is proved to be suitable for both bulk and thin-film PZT. More practically, it can be adopted as a fast way for lab-prepared PZT quality evaluation. PZT deposition requires a Pt/Ti bi-layer bottom electrode to be annealed retaining condensed structure. The heat treatment will inevitably pull electrode to be porous. It is well known that electrode with pores can greatly affect thin-film PZT material properties. For such reason, I designed and fabricated a special nonporous bottom electrode which inherits the porous electrode surface micro texture but with pores sealed. Although due to the limited experimental results no strong evidence shows new electrode surpasses traditional one in all ways, it contains large effective electrode area by covering the pores earns it better chance to outperform porous electrode.
Download or read book Microelectromechanical Systems written by Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems and published by National Academies Press. This book was released on 1997-12-15 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.
Download or read book The Development of Thin film Active Devices Using a Subtractive Fabrication Process written by Phillip Dewey Foshee and published by . This book was released on 1979 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1989 with total page 1134 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microsystems for Enhanced Control of Cell Behavior written by Andrés Díaz Lantada and published by Springer. This book was released on 2016-03-23 with total page 457 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook focuses on the entire development process of biomedical microsystems that promote special interactions with cells. Fundamentals of cell biology and mechanobiology are described as necessary preparatory input for design tasks. Advanced design, simulation, and micro/nanomanufacturing resources, whose combined use enables the development of biomedical microsystems capable of interacting at a cellular level, are covered in depth. A detailed series of chapters is then devoted to applications based on microsystems that offer enhanced cellular control, including microfluidic devices for diagnosis and therapy, cell-based sensors and actuators (smart biodevices), microstructured prostheses for improvement of biocompatibility, microstructured and microtextured cell culture matrices for promotion of cell growth and differentiation, electrophoretic microsystems for study of cell mechanics, microstructured and microtextured biodevices for study of cell adhesion and dynamics, and biomimetic microsystems (including organs-on-chips), among others. Challenges relating to the development of reliable in vitro biomimetic microsystems, the design and manufacture of complex geometries, and biofabrication are also discussed.
Download or read book Glassy Materials Based Microdevices written by Giancarlo C. Righini and published by MDPI. This book was released on 2019-02-28 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microtechnology has changed our world since the last century, when silicon microelectronics revolutionized sensor, control and communication areas, with applications extending from domotics to automotive, and from security to biomedicine. The present century, however, is also seeing an accelerating pace of innovation in glassy materials; as an example, glass-ceramics, which successfully combine the properties of an amorphous matrix with those of micro- or nano-crystals, offer a very high flexibility of design to chemists, physicists and engineers, who can conceive and implement advanced microdevices. In a very similar way, the synthesis of glassy polymers in a very wide range of chemical structures offers unprecedented potential of applications. The contemporary availability of microfabrication technologies, such as direct laser writing or 3D printing, which add to the most common processes (deposition, lithography and etching), facilitates the development of novel or advanced microdevices based on glassy materials. Biochemical and biomedical sensors, especially with the lab-on-a-chip target, are one of the most evident proofs of the success of this material platform. Other applications have also emerged in environment, food, and chemical industries. The present Special Issue of Micromachines aims at reviewing the current state-of-the-art and presenting perspectives of further development. Contributions related to the technologies, glassy materials, design and fabrication processes, characterization, and, eventually, applications are welcome.
Download or read book Microfluidics written by Yu Song and published by John Wiley & Sons. This book was released on 2018-05-07 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book offering a global overview of fundamental microfluidics and the wide range of possible applications, for example, in chemistry, biology, and biomedical science. As such, it summarizes recent progress in microfluidics, including its origin and development, the theoretical fundamentals, and fabrication techniques for microfluidic devices. The book also comprehensively covers the fluid mechanics, physics and chemistry as well as applications in such different fields as detection and synthesis of inorganic and organic materials. A useful reference for non-specialists and a basic guideline for research scientists and technicians already active in this field or intending to work in microfluidics.
Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Processing of Nanoparticle Structures and Composites written by Tom Hinklin and published by John Wiley & Sons. This book was released on 2009-09-11 with total page 153 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume features papers from the Controlled Processing of Nanoparticle Structures and Composites symposia held during the 2008 Materials Science and Technology conference (MS&T08). It provides a useful one-stop resource for understanding the most important issues in controlled processing of nanoparticle structures and composites. Logically organized and carefully selected articles give insight into controlled processing of nanoparticle structures and composites, covering topics such as nanoparticle-based bulk material templating, the structure of nanoparticulate aggregates of titania as a function of shear, and the role of lattice vibrations in a nanoscale electronic device.
Download or read book Index of Patents Issued from the United States Patent and Trademark Office written by and published by . This book was released on with total page 4160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1993 with total page 1334 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Official Gazette of the United States Patent and Trademark Office written by and published by . This book was released on 1999 with total page 1124 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Official Gazette of the United States Patent and Trademark Office written by United States. Patent and Trademark Office and published by . This book was released on 2001 with total page 1464 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Semiconductor International written by and published by . This book was released on 2000 with total page 754 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Radiation Curing in Polymer Science and Technology written by Jean-Pierre Fouassier and published by Springer Science & Business Media. This book was released on 1993-07-31 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume one deals primarily with the basic principles of radiation curing: UV-curing; EB-curing; microwave curing; oligomer/resin technology; chemistry of imaging science; testing methods; equipment; coatings applications and emerging trends in photopolymers for holographic recording and laser induced reactions.
Download or read book Nanostructures in Ferroelectric Films for Energy Applications written by Jun Ouyang and published by Elsevier. This book was released on 2019-07-15 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanostructures in Ferroelectric Films for Energy Applications: Grains, Domains, Interfaces and the Engineering Methods presents methods of engineering nanostructures in ferroelectric films to improve their performance in energy harvesting and conversion and storage. Ferroelectric films, which have broad applications, including the emerging energy technology, usually consist of nanoscale inhomogeneities. For polycrystalline films, the size and distribution of nano-grains determines the macroscopic properties, especially the field-induced polarization response. For epitaxial films, the energy of internal long-range electric and elastic fields during their growth are minimized by formation of self-assembled nano-domains. This book is an accessible reference for both instructors in academia and R&D professionals. Provides the necessary components for the systematic study of the structure-property relationship in ferroelectric thin film materials using case studies in energy applications Written by leading experts in the research areas of piezoelectrics, electrocalorics, ferroelectric dielectrics (especially in capacitive energy storage), ferroelectric domains, and ferroelectric-Si technology Includes a well balanced mix of theoretical design and simulation, materials processing and integration, and dedicated characterization methods of the involved nanostructures
Download or read book Sustainable Material Forming and Joining written by R.Ganesh Narayanan and published by CRC Press. This book was released on 2019-02-06 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: The main objective of the book is to expose readers to the basics of sustainable material forming and joining technologies, and to discuss the relationship between conventional and sustainable processes. It also provides case studies for sustainable issues in material forming and joining processes, workouts for converting conventional processes to green processes, and highlights the importance of awareness on sustainable and green manufacturing through education. The book will include green and sustainability concepts in material forming like bulk forming and sheet forming emphasizing hot forming, materials development, lubrication, and minimizing defects. Key Features Conceptualizes green and sustainability issues towards efficient material forming and joining Addresses important aspects of sustainable manufacturing by forming operations Presents comparison between traditional and sustainable manufacturing processes Includes practical case studies from industry experts Discusses green and sustainability concepts in material forming like bulk forming and sheet forming emphasizing hot forming, materials development, lubrication, and minimizing defects
