Download or read book Design and Modeling of a Dual Mass SOI MEMS Gyroscope written by Ashwin A. Seshia and published by . This book was released on 1999 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Download or read book Dual Mass MEMS Gyroscope Structure Design and Electrostatic Compensation written by Huiliang Cao and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Dual-mass MEMS gyroscope is one of the most popular inertial sensors. In this chapter, the structure design and electrostatic compensation technology for dual-mass MEMS gyroscope is introduced. Firstly, a classical dual-mass MEMS gyroscope structure is proposed, how it works as a tuning fork (drive anti-phase mode), and the structure dynamical model together with the monitoring system are presented. Secondly, the imperfect elements during the structure manufacture process are analyzed, and the quadrature error coupling stiffness model for dual-mass structure is proposed. After that, the quadrature error correction system based on coupling stiffness electrostatic compensation method is designed and evaluated. Thirdly, the dual-mass structure sensing mode modal is proposed, and the force rebalancing combs stimulation method is utilized to achieve sensing mode transform function precisely. The bandwidth of sensing open loop is calculated and experimentally proved as 0.54 times with the resonant frequency difference between sensing and drive modes. Then, proportional-integral-phase-leading controller is presented in sensing close loop to expand the bandwidth, and the experiment shows that the bandwidth is improved from 13 to 104 Hz. Finally, the results are concluded and summarized.
Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Download or read book Design and Modeling of Advanced Gyroscopes written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis reports on a design and modeling of a micro-machined gyroscope. The proposed sensor is a dual mass type, electro-statically driven to primary mode oscillation and senses, capacitively, the output signal. Full decoupling between drive and sense modes minimizes the mechanical crosstalk and based on this a novel gyroscope is designed and modeled which has separate sensing and driving masses. The dual mass gyroscope is designed such that driving and sensing resonant frequency is 23101 Hz with 0% mismatch (in simulation)with quality factor of 31.6227 and bandwidth of 730.51Hz. The gyroscope when actuated in simulation with 25V ac and 10V dc showed sensing capacitance variation of 126aF for 1 rad/s with base capacitance of 244.16fF. To the design of the gyroscope a new semi automatic tool was formulated for the noise analysis and noise based optimization of the resonant MEMS structures. Design of a sensitive gyroscope needs to take into account the noise shaping induced by damping phenomena at micro scale and is critical for optimization. The analysis was further extended to the design of the gyroscope and estimation shows that there is a trade of between the S/N ratio and the sensitivity and the design could be made much better in-terms of S/N by tuning its resonant frequency to 106Hz.
Download or read book Adaptive Control Strategies for MEMS Gyroscopes written by Sungsu Park and published by . This book was released on 2000 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Surface Micromachined Frame Microgyroscopes written by Moorthi Palaniapan and published by . This book was released on 2002 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book To Study the Modeling Analysis and Design of MEMS Gyroscope written by Amandeep Sharma and published by LAP Lambert Academic Publishing. This book was released on 2013 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a study of various MEMS Gyroscopes available in the world, their working principles/phenomenon and respective applications.It covers the various processes involved in the fabrication of MEMS gyroscopes.The book will help as a tutorial to model, simulate and thus analyse a MEMS Gyroscope using Coventorware 2010 MEMS+2(MEMS design tool). It will also elaborate the actual working principle of MEMS Gyroscopes used in the sensors, gadgets and instruments with intrinsic propertie
Download or read book Fabrication Testing and Characterization of MEMS Gyroscope written by Ridha Almikhlafi and published by . This book was released on 2017 with total page 50 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon Multi-User-MEMS-Process (Poly-MUMPs). Firstly, relevant literature and background on static and dynamic analysis of MEMS gyroscopes are described. Secondly, the gyroscope analytical model is presented and numerically solved using Mathematica software. The lumped mass model was used to analytically design the gyroscope and predict their performance. Finite element analysis was carried out on the gyroscopes to verify the proposed designs. Thirdly, gyroscope fabrication using MEMSCAP's SOIMUMPs and PolyMUMPs processes is described. For the former, post-processing was carried out at the Quantum Nanofab Center (QNC) on a die-level in order to create the vibratory structural elements (cantilever beam). Following this, the PolyMUMPs gyroscopes are characterized optically by measuring their resonance frequencies and quality factor using a Laser Doppler Vibrometer (LDV). The drive resonance frequency was measured at 40 kHz and the quality factor as Q = 1. For the sense mode, the resonance frequency was measured at 55 kHz and the unity quality factor as Q = 1. The characterization results show large drive direction motions of 100 um/s in response to a voltage pulse of 10 V. The drive pull-in voltage was measured at 19 V. Finally, the ratio of the measured drive to sense mode velocities in response to a voltage pulse of 10 V was calculated at 1.375.
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book Analysis and Modeling of Capacitive MEMS Gyroscopes with Feedback Control written by Wei Cui and published by . This book was released on 2010 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Modeling and Control of Capacitive Single and Dual axis MEMS Frame Gyroscopes written by Florian Mair and published by . This book was released on 2013 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book MEMS NEMS Sensors written by Goutam Koley and published by MDPI. This book was released on 2019-11-20 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
Download or read book Thermal MEMS Gyroscope Design and Characteristics Analysis written by Nilgoon Zarei and published by . This book was released on 2013 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thermal MEMS gyroscope characteristics have been studied to optimize gyroscope performance. Different parameters such as gas properties, heaters power and switching frequency have been optimized to increase the device sensitivity. A new Thermal MEMS gyroscope model referred to as "Forced Convection MEMS Gyroscope" has been introduced. In this design the output signal has been increased by adding external force to the system. Parameter optimization to increase the device efficiency has also been investigated. An experimental set up has been presented and the simulation study compared with experimental results. Another model referred to as the "Three-axis MEMS gyroscope" has been defined to measure rotation along three axes of rotation. In this design a single heater replaces the two heaters of previous models. Simulation results have shown that using this design it may be possible to distinguish the rotation signal from the buoyancy effects associated with acceleration.
Download or read book System level Modeling of MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2012-12-20 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.
Download or read book Evolvable Systems From Biology to Hardware written by Gregory S. Hornby and published by Springer Science & Business Media. This book was released on 2008-09-08 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the refereed proceedings of the 8th International Conference on Evolvable Systems, ICES 2008, held in Prague, Czech Republic, in September 2008. The 28 revised full papers and 14 revised poster papers presented were carefully reviewed and selected from 52 submissions. The papers are organized in topical sections on evolution of analog circuits, evolution of digital circuits, hardware-software codesign and platforms for adaptive systems, evolutionary robotics, development, real-world applications, evolutionary networking, evolvable artificial neural networks, and transistor-level circuit evolution.
Download or read book MEMS and Microstructures in Aerospace Applications written by Robert Osiander and published by CRC Press. This book was released on 2018-10-03 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.
