Download or read book Design and Implementation of a Z axis MEMS Gyroscope with a Symmetric Multiple mass Mechanical Structure written by Yujie Zhang and published by . This book was released on 2012 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Download or read book Mechanical Design Dynamics and Control of Micro Vibratory Gyroscopes written by Seyed Parsa Taheri Tehrani and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-machined vibratory gyroscopes are very small devices (up to a few millimeters in dimension) that work based on Coriolis force coupling between two resonance modes. The small size, low power consumption, and cheap price make these sensors popular in automotive, gaming, smart phones, and robotics industries. These sensors referred to as MEMS (microelectromechanical system) gyroscopes are currently not used for navigation applications because due to their miniature size and imperfections in fabrication methods they do not have enough accuracy. In this thesis, we present methods in design and control algorithms for MEMS vibratory gyroscopes to cancel the effect of imperfections in fabrication and improve gyroscopes' performance. First chapter of this thesis is an introduction on MEMS vibratory gyroscopes and their principles and standard operations modes.The second chapter presents the structural design and analysis of a single-structure 3-axis MEMS gyroscope. The gyroscope has four resonant modes of interest and uses a decoupling mechanism whereby auxiliary masses are used to actuate the drive mode of the gyroscope in order to reduce drive-force coupling to sense modes' motion (one of the sources of errors in MEMS gyroscopes). The use of auxiliary masses results in a two degree-of-freedom (DOF) mechanism of the drive mode. To compare the effectiveness of using auxiliary masses two gyroscope types has been design one actuated from auxiliary masses (type A) and one actuated from major masses (type B). The two designs are simulated analytically to study the displacement of each mass in each design while comparing the force required to achieve that displacement for drive mode. Experimental data from fabricated devices show how using auxiliary masses will decrease drive force coupling and as a result improve the gyroscope's performance. Third chapter describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f) dependence. Experiments are conducted using an epitaxially-encapsulated 2 x 2 mm2 quad-mass gyroscope (QMG) with a quality factor of 85,000. The device exhibits third-order Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (26 V), these third-order nonlinearities cancel and the amplitude-frequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. While the bias instability is nearly independent of the drive-mode’s nonlinearity, we find that ARW increases when the third-order nonlinearities are minimized, and the decrease in ARW due to increase of amplitude is independent of drive mode's type of nonlinearity.In the fourth chapter we present a direct angle measurement method in gyroscopes. Towards the objective of direct angle measurement using a rate integrating gyroscope (RIG) without a minimum rate threshold and performance limited only by electrical and mechanical thermal noise, in this chapter we present the implementation of a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetry (anisoelasticity) on a stand-alone digital signal processing (DSP) platform. Using the new method, the precession angle dependent bias error and minimum rate threshold, two issues identified by Lynch for a MEMS RIG due to anisodamping are overcome. To minimize angle dependent bias, we augment the electronic feedback force of the amplitude regulator with a non-unity gain output distribution matrix selected to correct for anisodamping. Using this method, we have decreased the angle dependent bias error by a factor of 30, resulting a minimum rate threshold of 2.5 dps. To further improve RIG performance, an electronically-induced self-precession rate is incorporated and successfully demonstrated to lower the rate threshold.

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Download or read book Mems for Biomedical Applications written by Shekhar Bhansali and published by Elsevier. This book was released on 2012-07-18 with total page 511 pages. Available in PDF, EPUB and Kindle. Book excerpt: The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Download or read book Pedestrian Inertial Navigation with Self Contained Aiding written by Andrei M. Shkel and published by John Wiley & Sons. This book was released on 2021-08-10 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore an insightful summary of the major self-contained aiding technologies for pedestrian navigation from established and emerging leaders in the field Pedestrian Inertial Navigation with Self-Contained Aiding delivers a comprehensive and broad treatment of self-contained aiding techniques in pedestrian inertial navigation. The book combines an introduction to the general concept of navigation and major navigation and aiding techniques with more specific discussions of topics central to the field, as well as an exploration of the future of the future of the field: Ultimate Navigation Chip (uNavChip) technology. The most commonly used implementation of pedestrian inertial navigation, strapdown inertial navigation, is discussed at length, as are the mechanization, implementation, error analysis, and adaptivity of zero-velocity update aided inertial navigation algorithms. The book demonstrates the implementation of ultrasonic sensors, ultra-wide band (UWB) sensors, and magnetic sensors. Ranging techniques are considered as well, including both foot-to-foot ranging and inter-agent ranging, and learning algorithms, navigation with signals of opportunity, and cooperative localization are discussed. Readers will also benefit from the inclusion of: A thorough introduction to the general concept of navigation as well as major navigation and aiding techniques An exploration of inertial navigation implementation, Inertial Measurement Units, and strapdown inertial navigation A discussion of error analysis in strapdown inertial navigation, as well as the motivation of aiding techniques for pedestrian inertial navigation A treatment of the zero-velocity update (ZUPT) aided inertial navigation algorithm, including its mechanization, implementation, error analysis, and adaptivity Perfect for students and researchers in the field who seek a broad understanding of the subject, Pedestrian Inertial Navigation with Self-Contained Aiding will also earn a place in the libraries of industrial researchers and industrial marketing analysts who need a self-contained summary of the foundational elements of the field.

Download or read book Wearable Robots written by José L. Pons and published by John Wiley & Sons. This book was released on 2008-04-15 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: A wearable robot is a mechatronic system that is designed around the shape and function of the human body, with segments and joints corresponding to those of the person it is externally coupled with. Teleoperation and power amplification were the first applications, but after recent technological advances the range of application fields has widened. Increasing recognition from the scientific community means that this technology is now employed in telemanipulation, man-amplification, neuromotor control research and rehabilitation, and to assist with impaired human motor control. Logical in structure and original in its global orientation, this volume gives a full overview of wearable robotics, providing the reader with a complete understanding of the key applications and technologies suitable for its development. The main topics are demonstrated through two detailed case studies; one on a lower limb active orthosis for a human leg, and one on a wearable robot that suppresses upper limb tremor. These examples highlight the difficulties and potentialities in this area of technology, illustrating how design decisions should be made based on these. As well as discussing the cognitive interaction between human and robot, this comprehensive text also covers: the mechanics of the wearable robot and it’s biomechanical interaction with the user, including state-of-the-art technologies that enable sensory and motor interaction between human (biological) and wearable artificial (mechatronic) systems; the basis for bioinspiration and biomimetism, general rules for the development of biologically-inspired designs, and how these could serve recursively as biological models to explain biological systems; the study on the development of networks for wearable robotics. Wearable Robotics: Biomechatronic Exoskeletons will appeal to lecturers, senior undergraduate students, postgraduates and other researchers of medical, electrical and bio engineering who are interested in the area of assistive robotics. Active system developers in this sector of the engineering industry will also find it an informative and welcome resource.

Download or read book MEMS Lorentz Force Magnetometers written by Cesare Buffa and published by Springer. This book was released on 2017-07-04 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book Materials Design and Manufacturing for Sustainable Environment written by Santhakumar Mohan and published by Springer Nature. This book was released on 2021-02-06 with total page 909 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprises the select proceedings of the International Conference on Materials, Design and Manufacturing for Sustainable Environment (ICMDMSE 2020). The primary focus is on emerging materials and cutting-edge manufacturing technologies for sustainable environment. The book covers a wide range of topics such as advanced materials, vibration, tribology, finite element method (FEM), heat transfer, fluid mechanics, energy engineering, additive manufacturing, robotics and automation, automobile engineering, industry 4.0, MEMS and nanotechnology, optimization techniques, condition monitoring, and new paradigms in technology management. Contents of this book will be useful to students, researchers, and practitioners alike.

Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Download or read book Introduction to Embedded Systems Second Edition written by Edward Ashford Lee and published by MIT Press. This book was released on 2017-01-06 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: An introduction to the engineering principles of embedded systems, with a focus on modeling, design, and analysis of cyber-physical systems. The most visible use of computers and software is processing information for human consumption. The vast majority of computers in use, however, are much less visible. They run the engine, brakes, seatbelts, airbag, and audio system in your car. They digitally encode your voice and construct a radio signal to send it from your cell phone to a base station. They command robots on a factory floor, power generation in a power plant, processes in a chemical plant, and traffic lights in a city. These less visible computers are called embedded systems, and the software they run is called embedded software. The principal challenges in designing and analyzing embedded systems stem from their interaction with physical processes. This book takes a cyber-physical approach to embedded systems, introducing the engineering concepts underlying embedded systems as a technology and as a subject of study. The focus is on modeling, design, and analysis of cyber-physical systems, which integrate computation, networking, and physical processes. The second edition offers two new chapters, several new exercises, and other improvements. The book can be used as a textbook at the advanced undergraduate or introductory graduate level and as a professional reference for practicing engineers and computer scientists. Readers should have some familiarity with machine structures, computer programming, basic discrete mathematics and algorithms, and signals and systems.

Download or read book Toward Inertial Navigation on Chip written by Haoran Wen and published by Springer Nature. This book was released on 2019-09-14 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

Download or read book Modern Inertial Technology written by Anthony Lawrence and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: A description of the inertial technology used for guidance, control, and navigation, discussing in detail the principles, operation, and design of sensors, gyroscopes, and accelerometers, as well as the advantages and disadvantages of particular systems. An engineer with long practical experience in the field, the author elucidates such recent developments as fibre-optic gyroscopes, solid-state accelerometers, and the global positioning system. This will be of interest to researchers and practising engineers involved in systems engineering, aeronautics, space research, and navigation on both land and sea.

Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.

Download or read book Mechatronic Systems written by El-Kébir Boukas and published by Springer Science & Business Media. This book was released on 2011-10-18 with total page 501 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the analysis, the design and the implementation of the mechatronic systems. Classical and modern tools are developed for the analysis and the design for such systems. Robust control, H-Infinity and guaranteed cost control theory are also used for analysis and design of mechatronic systems. Different controller such as state feedback, static output feedback and dynamic output feedback controllers are used to stabilize mechatronic systems. Heuristic algorithms are provided to solve the design of the classical controller such as PID, phase lead, phase lag and phase lead-lag controllers while linear matrix inequalities (LMI) algorithms are provided for finding solutions to the state feedback, static output feedback and dynamic output feedback controllers. The theory presented in the different chapters of the volume is applied to numerical examples to show the usefulness of the theoretical results. Some case studies are also provided to show how the developed concepts apply for real system. Emphasis is also put on the implementation in real-time for some real systems that we have developed in our mechatronic laboratory and all the detail is provided to give an idea to the reader how to implement its own mechatronic system. Mechatronics Systems: Analysis, Design and Implementation is an excellent textbook for undergraduate and graduate students in mechatronic system and control theory and as a reference for academic researchers in control or mathematics with interest in control theory. The reader should have completed first-year graduate courses in control theory, linear algebra, and linear systems. It will also be of great value to engineers practising in fields where the systems can be modeled by linear time invariant systems.

Download or read book Mastering Uncertainty in Mechanical Engineering written by Peter F. Pelz and published by Springer Nature. This book was released on 2021-10-11 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book reports on innovative methods, technologies and strategies for mastering uncertainty in technical systems. Despite the fact that current research on uncertainty is mainly focusing on uncertainty quantification and analysis, this book gives emphasis to innovative ways to master uncertainty in engineering design, production and product usage alike. It gathers authoritative contributions by more than 30 scientists reporting on years of research in the areas of engineering, applied mathematics and law, thus offering a timely, comprehensive and multidisciplinary account of theories and methods for quantifying data, model and structural uncertainty, and of fundamental strategies for mastering uncertainty. It covers key concepts such as robustness, flexibility and resilience in detail. All the described methods, technologies and strategies have been validated with the help of three technical systems, i.e. the Modular Active Spring-Damper System, the Active Air Spring and the 3D Servo Press, which have been in turn developed and tested during more than ten years of cooperative research. Overall, this book offers a timely, practice-oriented reference guide to graduate students, researchers and professionals dealing with uncertainty in the broad field of mechanical engineering.