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Book Gas sensing properties of RF sputtered WO3 thin films

Download or read book Gas sensing properties of RF sputtered WO3 thin films written by Mariana Stankova and published by . This book was released on 2004 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book RF Sputtered Cadmium Oxide Thin Films for Gas Sensing Application

Download or read book RF Sputtered Cadmium Oxide Thin Films for Gas Sensing Application written by Anil Kumar Gadipelly and published by LAP Lambert Academic Publishing. This book was released on 2015-02-04 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book we have discussed the preparation and characterization of CdO thin films using RF reactive magnetron sputtering technique. The deposition parameters such as oxygen partial pressure, substrate temperature and film thickness are optimized for producing good quality films. Systematic characterization of as deposited and annealed films has been discussed from the crystal structure, surface morphology, film composition, optical and electrical properties. The films prepared under optimized conditions are tested for gas sensing characteristics towards ammonia gas.

Book Handbook of Sputter Deposition Technology

Download or read book Handbook of Sputter Deposition Technology written by Kiyotaka Wasa and published by William Andrew. This book was released on 2012-11-20 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Book Sputtering Materials for VLSI and Thin Film Devices

Download or read book Sputtering Materials for VLSI and Thin Film Devices written by Jaydeep Sarkar and published by William Andrew. This book was released on 2010-12-13 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Book Characterization of Inert Gas RF Plasma treated Indium Tin Oxide Thin Films Deposited Via Pulsed DC Magnetron Sputtering

Download or read book Characterization of Inert Gas RF Plasma treated Indium Tin Oxide Thin Films Deposited Via Pulsed DC Magnetron Sputtering written by Amber Nicole Reed and published by . This book was released on 2008 with total page 48 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Proceedings of the 10th Italian Conference Sensors and Microsystems Firenze Italy 15 17 February 2005

Download or read book Proceedings of the 10th Italian Conference Sensors and Microsystems Firenze Italy 15 17 February 2005 written by Anna Grazia Mignani and published by World Scientific. This book was released on 2008 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a selection of papers presented at the 10th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analysts intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approach, many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies.

Book Gas Sensors

Download or read book Gas Sensors written by Ankur Gupta and published by CRC Press. This book was released on 2022-11-28 with total page 493 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the whole range of gas sensing aspects starting from basics, synthesis, processing, characterization, and application developments. All sub-topics within the domain of gas sensors such as active materials, novel nanomaterials, working mechanisms, fabrication techniques, computational approach, and development of microsensors, and latest advancements such as the Internet of Things (IoT) in gas sensors, and nanogenerators, are explained as well. Related manufacturing sections and proposed direction of future research are also reviewed. Features: Covers detailed state-of-the-art specific chemiresistive sensing materials. Presents novel nanomaterial platforms and concepts for resistive gas sensing. Reviews pertinent aspects of smart sensors and IoT sensing. Explains nanotechnology-enabled experimental findings, and future directions of smart gas sensing technology. Explores implication of latest advancements such as IoT in gas sensors, and nanogenerators. This book is aimed at academic researchers and professionals in sensors and actuators, nanotechnology, and materials science.

Book Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films

Download or read book Preparation and Characterization of Reactive RF Sputtered Nitride Thin Films written by Geok Loo Chen and published by . This book was released on 1999 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Sensors And Microsystems Proceedings Of The 10th Italian Conference

Download or read book Sensors And Microsystems Proceedings Of The 10th Italian Conference written by Riccardo Falciai and published by World Scientific. This book was released on 2008-07-24 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a selection of papers presented at the 10th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analysts intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approach, many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies.

Book Investigations on RF Sputter Deposited SiCN Thin Films for MEMS Applications

Download or read book Investigations on RF Sputter Deposited SiCN Thin Films for MEMS Applications written by Ravi M. Todi and published by . This book was released on 2005 with total page 64 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nano-indentation studies indicated that the hardness and the reduced modulus of the film are sensitive to the N2/Ar ratio of gas flow during sputtering. AFM studies revealed that the films become smoother as the N2/Ar ratio is increased. XPS data indicated the existence of C-N phases in the as-deposited films. The study of oxidation kinetics of RF sputter deposited SiCN thin films, using XPS, suggest that N2 co-sputtering helps to suppress the formation of a surface oxide, by allowing un-bonded Si to bond with N and C inside the vacuum chamber as opposed to bonding with O in atmosphere.

Book Chemical Abstracts

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2692 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Preparation and Characterisation of RF sputtered Bismuth Oxide Thin Films

Download or read book Preparation and Characterisation of RF sputtered Bismuth Oxide Thin Films written by Lois Sara Tovey and published by . This book was released on 1989 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: