Download or read book Dependence of Optical Properties and Hardness on Carbon Content in Silicon Carbonitride Films Deposited by Plasma Ion Immersion Processing Technique written by and published by . This book was released on 2002 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt: Materials with Si-C-N composition are of great interest due to their remarkable properties such as high hardness and oxidation resistance. In this study amorphous silicon nitride and silicon carbonitride films were deposited on glass, fised silica, and carbon substrates by the plasma immersion ion processing technique. Gas pressure during the deposition was kept around 0.13 Pa (1 mTorr) and S a, N2, Ar, and C2H2 gas mixtures were used. Film hardness, composition, and UV-visible optical absorption were characterized using nanoindentati on, ion beam analysis techniques, and UV-visible spectroscopy, respectively. The films exhibit high transparency in the visible and near UV regions. Addition of the carbon to the films causes decrease in the density of the films, as well as decrease in hardness and transparency. These results suggest that in the low energy regime of PTIP the deposition of hard carbon composites with nitrogen and silicon does not take place.

Download or read book Optical and Tribological Properties of Diamond like Carbon Films Synthesized by Plasma Immersion Ion Processing written by and published by . This book was released on 1999 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, and Si(100) substrates using C2H2-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp3 bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass and PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed.

Download or read book Neueste Manchfaltigkeiten written by and published by . This book was released on 1776 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Diamond like Carbon Coatings Deposited by Plasma Source Ion Implantation and Conventional Ion Beam Assisted Deposition Processes written by Brian M. Stout and published by . This book was released on 1999 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-like carbon coatings produced by Plasma Source Ion Implantation (PSII) and beamline Ion Beam Assisted Deposition (IBAD) were synthesized and studied. Gas pressure and electrical current were used as variables to design four independent PSII test sets. Beamline IBAD samples were produced with a pre-optimized set of parameters. Profilometry measurements showed the films to have thicknesses between 1.44 +/- 09 and 1.64 +/- 04 microns and to possess very low roughness averages, ranging from 14 +/- 3 to 28 +/- 3 nm, which correlate with substrate surface roughness. Atomic Force Microscopy revealed that diamond-like carbon crystal sizes varied significantly with chamber pressure. Crystals were generally spherical in shape suggesting that films were highly amorphous. Microhardness and nanohardness test results showed the hardest films to be greater than 3 times the hardness of untreated steel. The elastic modulus of the films, measured during the nanohardness test, was directly related to film hardness. Fretting wear and Pin-on-Disk tests were performed to quantitatively assess the ability of films to resist wear. Fretting wear tests showed a dramatic decrease in friction for diamond-like carbon films with friction levels ranging from 10% to 30% of that of untreated steel. Pin-on-Disk tests revealed a significant improvement in wear resistance prior to stylus penetration into the substrate.

Download or read book Characterization and Performance of Carbon Films Deposited by Plasma and Ion Beam Based Techniques written by and published by . This book was released on 1994 with total page 7 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma and ion beam based techniques have been used to deposit carbon-based films. The ion beam based method, a cathodic arc process, used a magnetically mass analyzed beam and is inherently a line-of-sight process. Two hydrocarbon plasma-based, non-line-of-sight techniques were also used and have the advantage of being capable of coating complicated geometries. The self-bias technique can produce hard carbon films, but is dependent on rf power and the surface area of the target. The pulsed-bias technique can also produce hard carbon films but has the additional advantage of being independent of rf power and target surface area. Tribological results indicated the coefficient of friction is nearly the same for carbon films from each deposition process, but the wear rate of the cathodic arc film was five times less than for the self-bias or pulsed-bias films. Although the cathodic arc film was the hardest, contained the highest fraction of sp3 bonds and exhibited the lowest wear rate, the cathodic arc film also produced the highest wear on the 440C stainless steel counterface during tribological testing. Thus, for tribological applications requiring low wear rates for both counterfaces, coating one surface with a very hard, wear resistant film may detrimentally affect the tribological behavior of the counterface.

Download or read book Structure and Optical Properties of Carbon Nitride and Silicon Carbonitride Films Prepared by PECVD written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Method for Producing Fluorinated Diamond like Carbon Films written by and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C.sub. 2 H.sub. 2) and hexafluoroethane (C.sub. 2 F.sub. 6) gas mixture, and the fluorinated, diamond-like carbon films were deposited on silicon 100substrates. The film hardness and wear resistance were found to be strongly dependent on the fluorine content incorporated into the coatings. The hardness of the F-DLC films was found to decrease considerably when the fluorine content in the coatings reached about 20%. The contact angle of water on the F-DLC coatings was found to increase with increasing film fluorine content and to saturate at a level characteristic of polytetrafluoroethylene.

Download or read book The Structural and Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Films Deposited Using a Direct Current plasma Enhanced Chemical Vapour Deposition DC PECVD Technique written by Suriani Abu Bakar and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Films Deposited Using DC PECVD Technique written by Hazwani Mohd. Som and published by . This book was released on 2008 with total page 54 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical and Structural Characterization of Amorphous Carbon Films written by Pratish Mahtani and published by . This book was released on 2010 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fundamental study of the correlations between ion energy, substrate temperature, and plasma density with hydrogen content, percent sp2 bonding, optical gap, and refractive index of hydrogenated amorphous carbon (a-C) films is presented. A strong dependency between the ion energy used during deposition and the film's microstructure is shown. Moreover, it is revealed that the optical properties of the a-C films are controlled by the concentration and size of sp2 clusters in the film.Through N2 mixing in the source gas, room-temperature nitrogen doped polymeric-like a-C films were demonstrated for the first time. X-ray Photoelectron Spectroscopy revealed an increase in the Fermi level of these films with increased nitrogen content.A proof-of-concept a-C based transparent heat mirror (THM) was demonstrated. It was shown that a-C acts as an oxygen-free protective barrier and anti-reflective coating for Ag films in the THM, increasing the transmission in the visible region by 10-20%.

Download or read book The Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Films Deposited Using DC PECVD Technique written by Bakar Ismail and published by . This book was released on 2009 with total page 54 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical and Scratch Resistant Properties of Diamondlike Carbon Films Deposited with Single and Dual Ion Beams written by and published by . This book was released on 1993 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Plasma deposited Amorphous Hydrogenated Carbon Films and Their Tribological Properties written by and published by . This book was released on 1989 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2676 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The Characterization of Thin Carbon Films Created Via Radio Frequency Plasma enhanced Chemical Vapor Deposition written by George Tecos and published by . This book was released on 2011 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: Various deposition parameters have been adopted to deposit carbon-based thin films on silicon subtrates via Plasma-Enhanced Chemical Vapor Detection (PECVD) with a Radio-Frequency Plasma. We seek a recipe and formulation for carbon film deposition by varying the ratios of input gases and subtrate temperature, with the goal of observing these effects on the deposited carbon film. Characterization of the samples was carried out through various procedures, including the Ion Beam Analysis (IBA) techniques: Rutherford/Non-Rutherford Backscattering Spectrometry (RBS/NRBS), Elastic Recoil Detection Analysis (ERDA), and Raman Spectroscopy. This data was analyzed to determine the purity, quality, elemental compensation, and interface integrity of each respective sample. We conclude that the films deposited on Si subtrates are polymer-like carbon films with 30-35 at% C and 65-70 at% H. The interface between the film and subtrate was found to be abrupt. The effect of subtrate temperature on the microstructure of the deposited films was found to be inconclusive. This study will lay the basis for future explorations into Western Michigan University produced CVD carbon-based films, and investigate the properties of these unique and profitable materials.

Download or read book Optical Properties of Hydrogenated Amorphous Carbon a C H Thin Film Deposited by DC PECVD Method written by Mohd. Firdaus Md. Shah and published by . This book was released on 2008 with total page 65 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical and Mechanical Properties of Amorphous Hydrogenated Carbon Thin Films written by Calvin Bradford Hopper and published by . This book was released on 1991 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt: