Download or read book Coriolis Vibratory Gyroscopes written by Vladislav Apostolyuk and published by Springer. This book was released on 2015-08-12 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.

Download or read book Cylindrical Vibratory Gyroscope written by Xuezhong Wu and published by Springer Nature. This book was released on 2021-06-19 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.

Download or read book Vibratory Gyroscopes Based on Micro Electro Mechanical and non Micro Electro Mechanical Systems written by Valeri V. Chikovani and published by Cambridge Scholars Publishing. This book was released on 2023-12-15 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.

Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Download or read book MEMS Vibratory Gyroscopes written by Cenk Acar and published by Springer Science & Business Media. This book was released on 2008-12-16 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Download or read book IEEE Standard Specification Format Guide and Test Procedure for Coriolis Vibratory Gyros written by and published by . This book was released on 2004 with total page 69 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book IEEE Std 1431 2004 written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book A High Aspect ratio High performance Polysilicon Vibrating Ring Gyroscope written by Farrokh Ayazi and published by . This book was released on 2000 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Investigation of Transducer Performance in Coriolis Vibratory Gyroscopes Using Numerical Modelling and Designed Experiments written by Brian McCormack and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Utilization of Internal Resonance in Gyroscope Design written by ʻAmr Marzūq and published by . This book was released on 2014 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coriolis vibratory gyroscopes (CVG) suffer from various error sources including manufacturing imperfections and environmental factors. Most design constraints incorporate having the drive and sense mode natural frequencies equal. This poses a difficult solution called "mode matching" requiring complex and extremely accurate on-chip electronics. The research discussed in this thesis acts as a proof of concept on utilizing well-established phenomena in the field of nonlinear dynamics and vibration in the design of CVG gyroscopes with improved stability against manufacturing imperfections. A significant increase in the sense mode bandwidth is shown by structurally tuning the system to 2:1 resonance between the sense and drive modes respectively. A simplified mathematical model of a two-degree-of-freedom system, having quadratic nonlinearities, is obtained and compared qualitatively to more complex models from literature. Experimental results verify numerical simulations, confirming the hypothesis. Additional bandwidth enhancement possibility is established through simple feedback of nonlinear coupling terms obtained from mathematical models.

Download or read book Toward Inertial Navigation on Chip written by Haoran Wen and published by Springer Nature. This book was released on 2019-09-14 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

Download or read book Mechanical Design Dynamics and Control of Micro Vibratory Gyroscopes written by Seyed Parsa Taheri Tehrani and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-machined vibratory gyroscopes are very small devices (up to a few millimeters in dimension) that work based on Coriolis force coupling between two resonance modes. The small size, low power consumption, and cheap price make these sensors popular in automotive, gaming, smart phones, and robotics industries. These sensors referred to as MEMS (microelectromechanical system) gyroscopes are currently not used for navigation applications because due to their miniature size and imperfections in fabrication methods they do not have enough accuracy. In this thesis, we present methods in design and control algorithms for MEMS vibratory gyroscopes to cancel the effect of imperfections in fabrication and improve gyroscopes' performance. First chapter of this thesis is an introduction on MEMS vibratory gyroscopes and their principles and standard operations modes.The second chapter presents the structural design and analysis of a single-structure 3-axis MEMS gyroscope. The gyroscope has four resonant modes of interest and uses a decoupling mechanism whereby auxiliary masses are used to actuate the drive mode of the gyroscope in order to reduce drive-force coupling to sense modes' motion (one of the sources of errors in MEMS gyroscopes). The use of auxiliary masses results in a two degree-of-freedom (DOF) mechanism of the drive mode. To compare the effectiveness of using auxiliary masses two gyroscope types has been design one actuated from auxiliary masses (type A) and one actuated from major masses (type B). The two designs are simulated analytically to study the displacement of each mass in each design while comparing the force required to achieve that displacement for drive mode. Experimental data from fabricated devices show how using auxiliary masses will decrease drive force coupling and as a result improve the gyroscope's performance. Third chapter describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f) dependence. Experiments are conducted using an epitaxially-encapsulated 2 x 2 mm2 quad-mass gyroscope (QMG) with a quality factor of 85,000. The device exhibits third-order Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (26 V), these third-order nonlinearities cancel and the amplitude-frequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. While the bias instability is nearly independent of the drive-mode’s nonlinearity, we find that ARW increases when the third-order nonlinearities are minimized, and the decrease in ARW due to increase of amplitude is independent of drive mode's type of nonlinearity.In the fourth chapter we present a direct angle measurement method in gyroscopes. Towards the objective of direct angle measurement using a rate integrating gyroscope (RIG) without a minimum rate threshold and performance limited only by electrical and mechanical thermal noise, in this chapter we present the implementation of a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetry (anisoelasticity) on a stand-alone digital signal processing (DSP) platform. Using the new method, the precession angle dependent bias error and minimum rate threshold, two issues identified by Lynch for a MEMS RIG due to anisodamping are overcome. To minimize angle dependent bias, we augment the electronic feedback force of the amplitude regulator with a non-unity gain output distribution matrix selected to correct for anisodamping. Using this method, we have decreased the angle dependent bias error by a factor of 30, resulting a minimum rate threshold of 2.5 dps. To further improve RIG performance, an electronically-induced self-precession rate is incorporated and successfully demonstrated to lower the rate threshold.

Download or read book Toward Navigational Grade MEMS Gyros Design Control and Error Mitigation of MEMS Gyroscopes written by Howard Haoquan Ge and published by . This book was released on 2018 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coriolis Vibratory Gyroscope (CVG) is considered the most critical component in a strap down inertial navigation unit. It measures the rate of rotation through the Coriolis coupling, or exchange of angular momentum, between a pair of resonance modes with very close resonance frequency, often referred to as a degenerate mode pair. The measurement error, however, is closely related to how close the degenerate mode pair match in frequencies. Further the errors also drifts over time, making precise calibration nearly impossible. There is a particular class of CVGs with radial symmetry in their geometric design. Such symmetry permits the simultaneous actuation and measurement of multiple Coriolis mode pairs. Such design opens up the possibility of operating more than one pair of degenerate modes on the same resonator. The UCLA resonator (URES) was designed to exploit the benefits of this possibility. The first challenge to overcome is the simultaneous modal frequency match of two Coriolis mode pairs. The two mode pairs of interest are the n = 2 mode, which is elliptical in shape, and the n = 3 mode, which is trilobal in shape. The as etched resonator typically exhibit frequency mismatch on the order of 10Hz for both mode pairs. A technique using mass perturbation has been developed to simultaneously reduce the frequency mismatch of both mode pairs to within 0.1 Hz. Once tuned, a system identification procedure is performed to determine the modal properties of both mode pairs, from which the drive and sense electrodes and the peripheral electronics can be optimally configured to maximize signal to noise ratio, and reduce quadrature error. ii A new control architecture is then implemented to simultaneously operate both mode pairs on the tuned resonator as two independent Coriolis sensors, thus allowing the extraction of two independent rate measurements from the same resonator. The noise and long term stability performance of both mode pairs are characterized. Angle random walk (ARW), bias stability, and scale factor for each mode pair are first characterized with the other mode pair turned off. The performance parameters are subsequently compared to those when the two mode pairs are simultaneously operated. Degradation in the noise performance due to nonlinearity in the electronics was analyzed, and an effective mitigation using frequency domain filtering was implemented. Correlation between the n = 2 and n = 3 bias drift was observed, and studied in detail in this research. Further a blending filter architecture is introduced to optimally combine the two rate measurements to yield a single superior rate measurement, in terms of both the sensors noise characteristics and its long term bias stability. Lastly, a novel in-situ technique is introduced to adaptively identify a finite-impulse-response (FIR) model for the parasitic feedthrough signal between the input port and the output port of a microelectromechanical (MEMS) resonator. The identified FIR model is then used as a filter to cancel the parasitic signal leaving a clean resonance peak. Experiments conducted on multiple two-input-two-output resonator devices show that the filters can adapt to different devices without precise knowledge of the devices' parameters. The filters also track the changes in the parasitic feedthrough over time, providing consistent cancellation. Suppressions of more than 30 dB on the parasitic feedthrough signals are obtained on all tested devices.

Download or read book Modern Inertial Technology written by Anthony Lawrence and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: A description of the inertial technology used for guidance, control, and navigation, discussing in detail the principles, operation, and design of sensors, gyroscopes, and accelerometers, as well as the advantages and disadvantages of particular systems. An engineer with long practical experience in the field, the author elucidates such recent developments as fibre-optic gyroscopes, solid-state accelerometers, and the global positioning system. This will be of interest to researchers and practising engineers involved in systems engineering, aeronautics, space research, and navigation on both land and sea.

Download or read book Investigation of Factors Affecting Bias Stability and Scale Factor Drifts in Coriolis Vibratory MEMS Gyroscopes written by Alexander A. Trusov and published by . This book was released on 2009 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Download or read book Mechanics of Microsystems written by Alberto Corigliano and published by John Wiley & Sons. This book was released on 2018-04-02 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.