Download or read book Computer Simulation of Plasma surface Chemistry written by Bryan Andrew Helmer and published by . This book was released on 1998 with total page 554 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Database Needs for Modeling and Simulation of Plasma Processing written by Panel on Database Needs in Plasma Processing and published by National Academies Press. This book was released on 1996-11-04 with total page 75 pages. Available in PDF, EPUB and Kindle. Book excerpt: In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly stringent controls on plant emissions, is performed predominantly by trial and error. There is now a strong and growing economic incentive to improve on the traditional methods of plasma reactor and process design, optimization, and control. An obvious strategy for both chip manufacturers and plasma equipment suppliers is to employ large-scale modeling and simulation. The major roadblock to further development of this promising strategy is the lack of a database for the many physical and chemical processes that occur in the plasma. The data that are currently available are often scattered throughout the scientific literature, and assessments of their reliability are usually unavailable. "Database Needs for Modeling and Simulation of Plasma Processing" identifies strategies to add data to the existing database, to improve access to the database, and to assess the reliability of the available data. In addition to identifying the most important needs, this report assesses the experimental and theoretical/computational techniques that can be used, or must be developed, in order to begin to satisfy these needs.
Download or read book Molecular Dynamics Simulations of Plasma surface Chemistry written by Cameron Frank Abrams and published by . This book was released on 2000 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Computer Applications in Plasma Science and Engineering written by Adam T. Drobot and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 466 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume, which contains 15 contributions, is based on a minicourse held at the 1987 IEEE Plasma Science Meeting. The purpose of the lectures in the course was to acquaint the students with the multidisciplinary nature of computational techniques and the breadth of research areas in plasma science in which computation can address important physics and engineering design issues. These involve: electric and magnetic fields, MHD equations, chemistry, radiation, ionization etc. The contents of the contributions, written subsequent to the minicourse, stress important aspects of computer applications. They are: 1) the numerical methods used; 2) the range of applicability; 3) how the methods are actually employed in research and in the design of devices; and, as a compendium, 4) the multiplicity of approaches possible for any one problem. The materials in this book are organized by both subject and applications which display some of the richness in computational plasma physics.
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Download or read book Computional Studies of Plasma surface Interactions written by David W. Humbird and published by . This book was released on 2004 with total page 524 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Introduction to Complex Plasmas written by Michael Bonitz and published by Springer Science & Business Media. This book was released on 2010-07-29 with total page 451 pages. Available in PDF, EPUB and Kindle. Book excerpt: Complex plasmas differ from traditional plasmas in many ways: these are low-temperature high pressure systems containing nanometer to micrometer size particles which may be highly charged and strongly interacting. The particles may be chemically reacting or be in contact with solid surfaces, and the electrons may show quantum behaviour. These interesting properties have led to many applications of complex plasmas in technology, medicine and science. Yet complex plasmas are extremely complicated, both experimentally and theoretically, and require a variety of new approaches which go beyond standard plasma physics courses. This book fills this gap presenting an introduction to theory, experiment and computer simulation in this field. Based on tutorial lectures at a very successful recent Summer Institute, the presentation is ideally suited for graduate students, plasma physicists and experienced undergraduates.
Download or read book Plasma Physics via Computer Simulation written by C.K. Birdsall and published by CRC Press. This book was released on 2018-10-08 with total page 504 pages. Available in PDF, EPUB and Kindle. Book excerpt: Divided into three main parts, the book guides the reader to an understanding of the basic concepts in this fascinating field of research. Part 1 introduces you to the fundamental concepts of simulation. It examines one-dimensional electrostatic codes and electromagnetic codes, and describes the numerical methods and analysis. Part 2 explores the mathematics and physics behind the algorithms used in Part 1. In Part 3, the authors address some of the more complicated simulations in two and three dimensions. The book introduces projects to encourage practical work Readers can download plasma modeling and simulation software — the ES1 program — with implementations for PCs and Unix systems along with the original FORTRAN source code. Now available in paperback, Plasma Physics via Computer Simulation is an ideal complement to plasma physics courses and for self-study.
Download or read book Plasma Simulations by Example written by Lubos Brieda and published by CRC Press. This book was released on 2019-12-13 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: The study of plasmas is crucial in improving our understanding of the universe, and they are being increasingly utilised in key technologies such as spacecraft thrusters, plasma medicine, and fusion energy. Providing readers with an easy to follow set of examples that clearly illustrate how simulation codes are written, this book guides readers through how to develop C++ computer codes for simulating plasmas primarily with the kinetic Particle in Cell (PIC) method. This text will be invaluable to advanced undergraduates and graduate students in physics and engineering looking to learn how to put the theory to the test. Features: Provides a step-by-step introduction to plasma simulations with easy to follow examples Discusses the electrostatic and electromagnetic Particle in Cell (PIC) method on structured and unstructured meshes, magnetohydrodynamics (MHD), and Vlasov solvers Covered topics include Direct Simulation Monte Carlo (DSMC) collisions, surface interactions, axisymmetry, and parallelization strategies. Lubos Brieda has over 15 years of experience developing plasma and gas simulation codes for electric propulsion, contamination transport, and plasma-surface interactions. As part of his master’s research work, he developed a 3D ES-PIC electric propulsion plume code, Draco, which is to this date utilized by government labs and private aerospace firms to study plasma thruster plumes. His Ph.D, obtained in 2012 from George Washington University, USA, focused on a multi-scale model for Hall thrusters utilizing fluid-kinetic hybrid PIC codes. He has since then been involved in numerous projects involving development and the use of plasma simulation tools. Since 2014 he has been teaching online courses on plasma simulations through his website: particleincell.com.
Download or read book Atomistic Simulations of Plasma surface Interactions written by Maria Eve Barone and published by . This book was released on 1995 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Molecular Dynamics Simulations of Plasma surface Interactions written by Joseph James Végh and published by . This book was released on 2007 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Computer Simulation of Low Pressure Plasma Discharges written by Justin David Bukowski and published by . This book was released on 1996 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Molecular Modeling and Theory in Chemical Engineering written by James Wei and published by Elsevier. This book was released on 2001-12-18 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years chemical engineers have become increasingly involved in the design and synthesis of new materials and products as well as the development of biological processes and biomaterials. Such applications often demand that product properties be controlled with precision. Molecular modeling, simulating chemical and molecular structures or processes by computer, aids scientists in this endeavor. Volume 28 of Advances in Chemical Engineering presents discussions of theoretical and computational methods as well as their applications to specific technologies.
Download or read book Study of Plasma surface Kinetics and Feature Profile Simulation of Poly silicon Etching in Cl2 HBr Plasma written by Weidong Jin and published by . This book was released on 2003 with total page 185 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work characterized the Cl2/HBr ion enhanced plasma-surface interactions with poly-silicon as a function of the gas composition, ion energy, ion incident angle and other important process parameters. A realistic inductively coupled plasma beam apparatus capable of generating ions and neutrals representative of real commercial etcher was constructed and utilized to simulate accurately a high density plasma environment. Etching rate of poly- silicon, the oxygen effect and loading effect are quantified to better describe the etching of patterned poly-silicon in fabricating the gate electrode of a transistor in VLSI manufacturing process. The kinetics model derived from these measurements are incorporated into a Monte Carlo based feature profile simulator, and profile evolution has been simulated under various processing conditions. The realistic plasma beam was used to measure the etching yields of poly-silicon with Cl2/HBr chemistry at different ion energies. The etching yields were found to scale linearly with ... where the threshold energies, Eth are 10 eV for both Cl2 and HBr. The etching yields at different neutral-to-ion flux ratio were measured and the sticking coefficients are derived for reactive neutrals for Cl2 and HBr. The sticking coefficient for HBr system is lower probably due to the relatively larger size of bromine atom compared with chlorine and its relatively lower chemical reactivity. The etching yields for mixed Cl2+HBr plasma at different compositions were also measured.
Download or read book Plasma Spraying written by R. Suryanarayanan and published by World Scientific. This book was released on 1993 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: The recent advances in plasma spraying are discussed in this book which divides into two sections — theory and application. The book presents sophisticated experimental techniques, diagnostics, theoretical models and computer simulations which not only improve the understanding and uses of the spraying process but also help to increase the reliability factor of the manufacturing components. Applications that are metallurgical, aeronautical, automobile, chemical, etc. are also shown. More importantly, applications that include silicon for solar cells, magnets and superconductors are also discussed for the first time. Advanced graduate students in materials science and engineering, research scientists, engineers and industries involved in plasma spray applications will benefit from this book.
Download or read book Plasma Physics via Computer Simulation written by Charles K. Brisdsall and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Surface Interactions and Processing of Materials written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
